WO2015164931A3 - Contact microelectromechanical sensor and method for position monitoring therewith - Google Patents

Contact microelectromechanical sensor and method for position monitoring therewith Download PDF

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Publication number
WO2015164931A3
WO2015164931A3 PCT/BG2015/000011 BG2015000011W WO2015164931A3 WO 2015164931 A3 WO2015164931 A3 WO 2015164931A3 BG 2015000011 W BG2015000011 W BG 2015000011W WO 2015164931 A3 WO2015164931 A3 WO 2015164931A3
Authority
WO
WIPO (PCT)
Prior art keywords
microcantilever
position monitoring
therewith
contact
micro
Prior art date
Application number
PCT/BG2015/000011
Other languages
French (fr)
Other versions
WO2015164931A2 (en
Inventor
Vladimir Stavrov
Original Assignee
Amg Technology Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Amg Technology Ltd. filed Critical Amg Technology Ltd.
Publication of WO2015164931A2 publication Critical patent/WO2015164931A2/en
Publication of WO2015164931A3 publication Critical patent/WO2015164931A3/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0005—Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
    • B81C99/002—Apparatus for assembling MEMS, e.g. micromanipulators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

The invention relates to microelectromechanical (MEMS) sensors for contact mode measuring the position of micro- and macro-dimensional objects within a working range of up to 5 millimeters, and to a method for position monitoring with accuracy on the order of nanometers and better. The sensor is used in positioning systems with very high accuracy, for measurement and control in the field of micro-/nanotechnologies, and in other fields. The sensor comprises an anchored body (1) with a measuring microcantilever (2), piezoresistors (4) embedded in the base of the microcantilever (2), and an actuated element 1' which is fixedly attached to a movable object, the position of which is to be monitored. The body (1) attached to a stationary object, and the element 1' are connected via at least one compliant transmission mechanism (5), comprising the microcantilever (2), and a chain of auxiliary flexure elements (6, 7, 8, 14 or 10), being connected to the movable end thereof.
PCT/BG2015/000011 2014-04-29 2015-04-28 Contact microelectromechanical sensor and method for position monitoring therewith WO2015164931A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
BG111754A BG66806B1 (en) 2014-04-29 2014-04-29 Contact microelectromechanical sensor and position determining method with it
BG111754 2014-04-29

Publications (2)

Publication Number Publication Date
WO2015164931A2 WO2015164931A2 (en) 2015-11-05
WO2015164931A3 true WO2015164931A3 (en) 2015-12-23

Family

ID=53373221

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/BG2015/000011 WO2015164931A2 (en) 2014-04-29 2015-04-28 Contact microelectromechanical sensor and method for position monitoring therewith

Country Status (2)

Country Link
BG (1) BG66806B1 (en)
WO (1) WO2015164931A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105643592B (en) * 2016-03-15 2017-06-06 河北工业大学 A kind of symmetrical decoupling single-freedom and flexible operating mechanism
CN105690358B (en) * 2016-04-18 2017-08-01 河北工业大学 A kind of flexible micro operating mechanism
CN109909976B (en) * 2019-03-18 2021-12-24 天津大学 Symmetrical space stereo micro-manipulator with three-stage motion amplifying mechanism
CN111953945B (en) * 2020-08-17 2022-04-29 合肥德泰科通测控技术有限公司 Comprehensive track detection device based on unmanned driving
CN113790736B (en) * 2021-08-03 2023-10-13 北京自动化控制设备研究所 Power tuning gyroscope installation error angle compensation method and circuit

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007033000A1 (en) * 2007-07-16 2009-01-22 Robert Bosch Gmbh Micromechanical component with a position detection component for position determination and amplitude determination of a vibratable element
WO2011038470A1 (en) * 2009-09-29 2011-04-07 Amg Technology Ltd. Sensors for scanning probe microscopy, method for three-dimensional measurement and method for manufacturing such sensors

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007033000A1 (en) * 2007-07-16 2009-01-22 Robert Bosch Gmbh Micromechanical component with a position detection component for position determination and amplitude determination of a vibratable element
WO2011038470A1 (en) * 2009-09-29 2011-04-07 Amg Technology Ltd. Sensors for scanning probe microscopy, method for three-dimensional measurement and method for manufacturing such sensors

Also Published As

Publication number Publication date
BG66806B1 (en) 2018-12-31
BG111754A (en) 2015-10-30
WO2015164931A2 (en) 2015-11-05

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