BE843275A - Canon a electrons destine a etre utilise a des fins de chauffage, de fusion et d'evaporation - Google Patents

Canon a electrons destine a etre utilise a des fins de chauffage, de fusion et d'evaporation

Info

Publication number
BE843275A
BE843275A BE168194A BE168194A BE843275A BE 843275 A BE843275 A BE 843275A BE 168194 A BE168194 A BE 168194A BE 168194 A BE168194 A BE 168194A BE 843275 A BE843275 A BE 843275A
Authority
BE
Belgium
Prior art keywords
melting
heating
electron cannon
evaporation purposes
intended
Prior art date
Application number
BE168194A
Other languages
English (en)
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE843275A publication Critical patent/BE843275A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/301—Arrangements enabling beams to pass between regions of different pressure
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/067—Replacing parts of guns; Mutual adjustment of electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/315—Electron-beam or ion-beam tubes for localised treatment of objects for welding

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Electron Sources, Ion Sources (AREA)
BE168194A 1975-06-24 1976-06-23 Canon a electrons destine a etre utilise a des fins de chauffage, de fusion et d'evaporation BE843275A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2528032A DE2528032C2 (de) 1975-06-24 1975-06-24 Elektronenstrahlerzeuger für Heiz-, Schmelz- und Verdampfungszwecke

Publications (1)

Publication Number Publication Date
BE843275A true BE843275A (fr) 1976-10-18

Family

ID=5949801

Family Applications (1)

Application Number Title Priority Date Filing Date
BE168194A BE843275A (fr) 1975-06-24 1976-06-23 Canon a electrons destine a etre utilise a des fins de chauffage, de fusion et d'evaporation

Country Status (7)

Country Link
US (1) US4034256A (enExample)
JP (1) JPS588104B2 (enExample)
BE (1) BE843275A (enExample)
DD (1) DD123979A1 (enExample)
DE (1) DE2528032C2 (enExample)
FR (1) FR2315767A1 (enExample)
GB (1) GB1513690A (enExample)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3328172A1 (de) * 1983-08-04 1985-02-14 Leybold-Heraeus GmbH, 5000 Köln Elektronenstrahlkanone
DE19623701A1 (de) 1996-06-14 1997-12-18 Leybold Systems Gmbh Vorrichtung und Verfahren zum Elektronenstrahlverdampfen
UA43927C2 (uk) * 2000-12-26 2002-01-15 Міжнародний Центр Електронно-Променевих Технологій Інституту Електрозварювання Ім. Е.О. Патона Нан України Електронна гармата з лінійним термокатодом для електронно-променевого нагрівання
DE102021105201B4 (de) * 2021-03-04 2024-10-02 Carl Zeiss Multisem Gmbh Vielzahl-Teilchenstrahlmikroskop und zugehöriges Verfahren mit schnellem Autofokus mit speziellen Ausführungen
TW202220012A (zh) 2020-09-30 2022-05-16 德商卡爾蔡司多重掃描電子顯微鏡有限公司 在可調工作距離附近具快速自動對焦之多重粒子束顯微鏡及相關方法
KR102560783B1 (ko) * 2022-12-16 2023-07-27 (주)이에프씨 인조흑연 생산 자동화 장치

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3187216A (en) * 1961-05-12 1965-06-01 Welding Research Inc Electron gun having a releasably clamped electron emitting element
DE1248175B (de) * 1961-08-31 1967-08-24 Heraeus Gmbh W C Elektronenstrahlerzeugungssystem
US3298083A (en) * 1964-01-02 1967-01-17 Rca Corp Method of making electron gun mount
DE1955846C3 (de) * 1969-11-06 1973-10-31 Leybold-Heraeus Gmbh & Co Kg, 5000 Koeln Elektronenkanone fur die Erhitzung von Materialien in einem Vakuumbehalter

Also Published As

Publication number Publication date
JPS523368A (en) 1977-01-11
GB1513690A (en) 1978-06-07
DE2528032C2 (de) 1983-06-09
FR2315767B1 (enExample) 1979-07-20
JPS588104B2 (ja) 1983-02-14
FR2315767A1 (fr) 1977-01-21
DD123979A1 (enExample) 1977-01-26
US4034256A (en) 1977-07-05
DE2528032A1 (de) 1977-01-20

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: LEYBOLD-HERAEUS G.M.B.H. & CO. K.G.

Effective date: 19910630