BE830299A - Dispositif d'introduction dirigee de matiere de dopage par voie radio-active dans un barreau cristallin semi-conducteur - Google Patents

Dispositif d'introduction dirigee de matiere de dopage par voie radio-active dans un barreau cristallin semi-conducteur

Info

Publication number
BE830299A
BE830299A BE157381A BE157381A BE830299A BE 830299 A BE830299 A BE 830299A BE 157381 A BE157381 A BE 157381A BE 157381 A BE157381 A BE 157381A BE 830299 A BE830299 A BE 830299A
Authority
BE
Belgium
Prior art keywords
radio
doping material
active route
semiconductor crystalline
directed introduction
Prior art date
Application number
BE157381A
Other languages
English (en)
French (fr)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE830299A publication Critical patent/BE830299A/xx

Links

Classifications

    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
    • C—CHEMISTRY; METALLURGY
    • C30—CRYSTAL GROWTH
    • C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00—Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/20—Doping by irradiation with electromagnetic waves or by particle radiation
    • G—PHYSICS
    • G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
    • G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
    • G21K5/00—Irradiation devices
    • G21K5/08—Holders for targets or for other objects to be irradiated

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Electromagnetism (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
BE157381A 1974-08-12 1975-06-16 Dispositif d'introduction dirigee de matiere de dopage par voie radio-active dans un barreau cristallin semi-conducteur BE830299A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2438710A DE2438710C3 (de) 1974-08-12 1974-08-12 Vorrichtung zum gezielten Einbringen von Dotierungsmaterial in einen Halbleiterkristallstab auf radiogenem Wege

Publications (1)

Publication Number Publication Date
BE830299A true BE830299A (fr) 1975-10-16

Family

ID=5923033

Family Applications (1)

Application Number Title Priority Date Filing Date
BE157381A BE830299A (fr) 1974-08-12 1975-06-16 Dispositif d'introduction dirigee de matiere de dopage par voie radio-active dans un barreau cristallin semi-conducteur

Country Status (8)

Country Link
US (1) US4048508A (it)
JP (1) JPS584812B2 (it)
BE (1) BE830299A (it)
CA (1) CA1061686A (it)
DE (1) DE2438710C3 (it)
DK (1) DK364275A (it)
GB (1) GB1468330A (it)
IT (1) IT1040380B (it)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0532646Y2 (it) * 1986-03-31 1993-08-20
DE3942387A1 (de) * 1989-12-21 1991-06-27 Florian Fischer Transportsystem, insbesondere zum transportieren von siliziumeinkristallen durch das becken eines forschungsreaktors
US5707879A (en) * 1997-01-08 1998-01-13 Reinitz; Karl Neutron detector based on semiconductor materials
WO2005022555A1 (en) * 2003-08-29 2005-03-10 Lifecell Corporation Tissue irradiation system and apparatus
JP7200921B2 (ja) * 2019-12-20 2023-01-10 株式会社Sumco シリコンインゴットへの中性子照射方法、シリコンインゴットの製造方法およびシリコンウェーハの製造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US757806A (en) * 1902-05-22 1904-04-19 Albert Giersiepen Disinfecting apparatus.
US1574884A (en) * 1923-10-24 1926-03-02 Elliott M Hendricks Combined x-ray protective canopy and table
US2087751A (en) * 1932-05-27 1937-07-20 Gen Electric Vapor Lamp Co Method and apparatus for irradiating materials
US3132251A (en) * 1960-10-27 1964-05-05 Budd Co Irradiation vault
FR1555510A (it) * 1967-02-20 1969-01-31

Also Published As

Publication number Publication date
DE2438710C3 (de) 1978-09-21
DE2438710B2 (de) 1978-01-12
JPS5142466A (en) 1976-04-10
DE2438710A1 (de) 1976-02-26
US4048508A (en) 1977-09-13
JPS584812B2 (ja) 1983-01-27
IT1040380B (it) 1979-12-20
GB1468330A (en) 1977-03-23
DK364275A (da) 1976-02-13
CA1061686A (en) 1979-09-04

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Legal Events

Date Code Title Description
RE Patent lapsed

Owner name: SIEMENS A.G.

Effective date: 19860630