BE757017A - - Google Patents

Info

Publication number
BE757017A
BE757017A BE757017DA BE757017A BE 757017 A BE757017 A BE 757017A BE 757017D A BE757017D A BE 757017DA BE 757017 A BE757017 A BE 757017A
Authority
BE
Belgium
Application number
Original Assignee
Centre Rech Metallurgique
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Rech Metallurgique filed Critical Centre Rech Metallurgique
Publication of BE757017A publication Critical patent/BE757017A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/544—Controlling the film thickness or evaporation rate using measurement in the gas phase
BE757017D 1969-10-17 1970-10-02 BE757017A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
LU59669 1969-10-17

Publications (1)

Publication Number Publication Date
BE757017A true BE757017A (fr) 1971-04-02

Family

ID=19726179

Family Applications (1)

Application Number Title Priority Date Filing Date
BE757017D BE757017A (fr) 1969-10-17 1970-10-02

Country Status (4)

Country Link
BE (1) BE757017A (fr)
FR (1) FR2066204A5 (fr)
LU (1) LU59669A1 (fr)
NL (1) NL7015206A (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4036167A (en) * 1976-01-30 1977-07-19 Inficon Leybold-Heraeus Inc. Apparatus for monitoring vacuum deposition processes
DE4336682C1 (de) * 1993-10-27 1994-10-27 Fraunhofer Ges Forschung Verfahren zum Elektronenstrahlbedampfen mit mehrkomponentigem Verdampfungsmaterial

Also Published As

Publication number Publication date
LU59669A1 (fr) 1971-08-10
FR2066204A5 (en) 1971-08-06
NL7015206A (fr) 1971-04-20

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