Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
  • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
  • H01L21/76—Making of isolation regions between components
  • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
  • H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit
• • H10P14/24—
• • H10P14/271—
• • H10P14/2905—
• • H10P14/2925—
• • H10P14/3411—
• • H10P50/242—
• • H10P95/00—

Landscapes

• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Chemical Vapour Deposition (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=8645445

Family Applications (1)

Country Status (5)

Families Citing this family (1)

• 1968
  • 1968-02-01 FR FR138385A patent/FR1562993A/fr not_active Expired
• 1969
  • 1969-01-22 BE BE727229D patent/BE727229A/xx unknown
  • 1969-01-30 GB GB5097/69A patent/GB1224146A/en not_active Expired
  • 1969-01-31 NL NL6901637A patent/NL6901637A/xx unknown
  • 1969-01-31 DE DE19691904834 patent/DE1904834A1/de active Pending

Also Published As

Similar Documents