BE717893A - - Google Patents
Info
- Publication number
- BE717893A BE717893A BE717893DA BE717893A BE 717893 A BE717893 A BE 717893A BE 717893D A BE717893D A BE 717893DA BE 717893 A BE717893 A BE 717893A
- Authority
- BE
- Belgium
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32743—Means for moving the material to be treated for introducing the material into processing chamber
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Plasma Technology (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Silicon Compounds (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB31826/67A GB1164396A (en) | 1967-07-11 | 1967-07-11 | Heating Particulate Material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE717893A true BE717893A (en:Method) | 1969-01-10 |
Family
ID=10328989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE717893D BE717893A (en:Method) | 1967-07-11 | 1968-07-10 |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3596040A (en:Method) |
| BE (1) | BE717893A (en:Method) |
| DE (1) | DE1767988A1 (en:Method) |
| FR (1) | FR1578241A (en:Method) |
| GB (1) | GB1164396A (en:Method) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2120491A5 (en:Method) * | 1971-01-06 | 1972-08-18 | Anvar | |
| US4315832A (en) | 1979-03-05 | 1982-02-16 | Hughes Aircraft Company | Process for increasing laser crystal fluorescence yield by controlled atmosphere processing |
| DE4021182A1 (de) * | 1990-07-03 | 1992-01-16 | Plasma Technik Ag | Vorrichtung zur beschichtung der oberflaeche von gegenstaenden |
-
1967
- 1967-07-11 GB GB31826/67A patent/GB1164396A/en not_active Expired
-
1968
- 1968-07-09 DE DE19681767988 patent/DE1767988A1/de active Pending
- 1968-07-10 BE BE717893D patent/BE717893A/xx unknown
- 1968-07-10 US US743675A patent/US3596040A/en not_active Expired - Lifetime
- 1968-07-11 FR FR1578241D patent/FR1578241A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| DE1767988A1 (de) | 1972-02-24 |
| GB1164396A (en) | 1969-09-17 |
| FR1578241A (en:Method) | 1969-08-14 |
| US3596040A (en) | 1971-07-27 |