GB1164396A - Heating Particulate Material - Google Patents
Heating Particulate MaterialInfo
- Publication number
- GB1164396A GB1164396A GB31826/67A GB3182667A GB1164396A GB 1164396 A GB1164396 A GB 1164396A GB 31826/67 A GB31826/67 A GB 31826/67A GB 3182667 A GB3182667 A GB 3182667A GB 1164396 A GB1164396 A GB 1164396A
- Authority
- GB
- United Kingdom
- Prior art keywords
- tube
- plasma
- particulate material
- silica
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000011236 particulate material Substances 0.000 title abstract 4
- 238000010438 heat treatment Methods 0.000 title 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 6
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 4
- 239000007789 gas Substances 0.000 abstract 3
- 239000000377 silicon dioxide Substances 0.000 abstract 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 abstract 2
- 229910052786 argon Inorganic materials 0.000 abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 2
- 230000006698 induction Effects 0.000 abstract 2
- 239000007788 liquid Substances 0.000 abstract 2
- 239000000203 mixture Substances 0.000 abstract 2
- 239000001301 oxygen Substances 0.000 abstract 2
- 229910052760 oxygen Inorganic materials 0.000 abstract 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 abstract 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 abstract 1
- 239000001569 carbon dioxide Substances 0.000 abstract 1
- 229910002092 carbon dioxide Inorganic materials 0.000 abstract 1
- 239000012159 carrier gas Substances 0.000 abstract 1
- 239000000460 chlorine Substances 0.000 abstract 1
- 229910052801 chlorine Inorganic materials 0.000 abstract 1
- 239000002826 coolant Substances 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 239000001307 helium Substances 0.000 abstract 1
- 229910052734 helium Inorganic materials 0.000 abstract 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 abstract 1
- 229910052743 krypton Inorganic materials 0.000 abstract 1
- DNNSSWSSYDEUBZ-UHFFFAOYSA-N krypton atom Chemical compound [Kr] DNNSSWSSYDEUBZ-UHFFFAOYSA-N 0.000 abstract 1
- 229910052754 neon Inorganic materials 0.000 abstract 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32733—Means for moving the material to be treated
- H01J37/32743—Means for moving the material to be treated for introducing the material into processing chamber
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Plasma Technology (AREA)
- Silicon Compounds (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Abstract
1,164,396. Induction - plasma apparatus. BRITISH TITAN PRODUCTS CO. Ltd. 13 June, 1968 [11 July, 1967], No. 31826/67. Heading H5H. [Also in Division C1] Particulate material to be heated is introduced into the downstream half of the volume of plasma 12 of an induction plasma torch by a feed tube 7 which terminates within the downstream half of the volume of plasma 12. This procedure inhibits growth on the tip of the tube 7 and sides of the silica plasma tube 1. The plasma gas is fed from a tube 3 to a distribution head 2 which causes a helical or laminar flow down the sides of tube 1. A mixture of flows can be produced. The coil 4 is hollow copper through which liquid, e.g. water or gaseous (e.g. plasma gas) coolant flows. A liquid jacket may surround silica tube 1. The feed tube 7 is a double walled tube sealed to a side arm 6 of the silica tube and water flows from inlet 9 through hollow tube 7 to outlet 10 and particulate material is introduced at 11. The plasma stream may flow vertically downward, horizontally, or be inclined at an angle of between 45 to 75 degrees to the vertical, as shown. The plasma gas may be argon, helium, neon, krypton, carbon dioxide, chlorine, oxides of nitrogen but preferably oxygen or mixtures of oxygen and argon. The particulate material is preferably supplied in a carrier gas to feed tube 7.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB31826/67A GB1164396A (en) | 1967-07-11 | 1967-07-11 | Heating Particulate Material |
| DE19681767988 DE1767988A1 (en) | 1967-07-11 | 1968-07-09 | Method of heating particulate material |
| BE717893D BE717893A (en) | 1967-07-11 | 1968-07-10 | |
| US743675A US3596040A (en) | 1967-07-11 | 1968-07-10 | Heating particulate material |
| FR1578241D FR1578241A (en) | 1967-07-11 | 1968-07-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB31826/67A GB1164396A (en) | 1967-07-11 | 1967-07-11 | Heating Particulate Material |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| GB1164396A true GB1164396A (en) | 1969-09-17 |
Family
ID=10328989
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| GB31826/67A Expired GB1164396A (en) | 1967-07-11 | 1967-07-11 | Heating Particulate Material |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3596040A (en) |
| BE (1) | BE717893A (en) |
| DE (1) | DE1767988A1 (en) |
| FR (1) | FR1578241A (en) |
| GB (1) | GB1164396A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2120491A5 (en) * | 1971-01-06 | 1972-08-18 | Anvar | |
| DE4021182A1 (en) * | 1990-07-03 | 1992-01-16 | Plasma Technik Ag | DEVICE FOR COATING THE SURFACE OF OBJECTS |
-
1967
- 1967-07-11 GB GB31826/67A patent/GB1164396A/en not_active Expired
-
1968
- 1968-07-09 DE DE19681767988 patent/DE1767988A1/en active Pending
- 1968-07-10 US US743675A patent/US3596040A/en not_active Expired - Lifetime
- 1968-07-10 BE BE717893D patent/BE717893A/xx unknown
- 1968-07-11 FR FR1578241D patent/FR1578241A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| US3596040A (en) | 1971-07-27 |
| FR1578241A (en) | 1969-08-14 |
| DE1767988A1 (en) | 1972-02-24 |
| BE717893A (en) | 1969-01-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PS | Patent sealed [section 19, patents act 1949] | ||
| PLNP | Patent lapsed through nonpayment of renewal fees |