BE697974A - - Google Patents

Info

Publication number
BE697974A
BE697974A BE697974DA BE697974A BE 697974 A BE697974 A BE 697974A BE 697974D A BE697974D A BE 697974DA BE 697974 A BE697974 A BE 697974A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of BE697974A publication Critical patent/BE697974A/xx

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/24—Circuit arrangements not adapted to a particular application of the tube and not otherwise provided for
    • H01J37/241—High voltage power supply or regulation circuits
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating or etching for evaporating or etching
BE697974D 1966-05-03 1967-05-03 BE697974A (xx)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEF0049092 1966-05-03

Publications (1)

Publication Number Publication Date
BE697974A true BE697974A (xx) 1967-10-16

Family

ID=7102723

Family Applications (1)

Application Number Title Priority Date Filing Date
BE697974D BE697974A (xx) 1966-05-03 1967-05-03

Country Status (5)

Country Link
US (1) US3488426A (xx)
BE (1) BE697974A (xx)
CH (1) CH492033A (xx)
DE (1) DE1521251B2 (xx)
GB (1) GB1151818A (xx)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3756193A (en) * 1972-05-01 1973-09-04 Battelle Memorial Institute Coating apparatus
DE3706495A1 (de) * 1987-04-29 1988-09-15 Vtu Angel Kancev Stromversorgungsschaltung fuer elektronenstrahl-verdampfer
US4978094A (en) * 1989-11-15 1990-12-18 Cooper Industries, Inc. Bracket for curtain rods
US5905753A (en) * 1997-06-23 1999-05-18 The Boc Group, Inc. Free-standing rotational rod-fed source

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2994801A (en) * 1959-06-05 1961-08-01 Stauffer Chemical Co Electron beam generation
DE1199097B (de) * 1962-09-25 1965-08-19 Heraeus Gmbh W C Vorrichtung zum Vakuumbedampfen breiter Baender, insbesondere mit Metallen, durch Erhitzen des Verdampfungsgutes mittels Elektronenstrahlen
DE1156522B (de) * 1962-09-25 1963-10-31 Heraeus Gmbh W C Elektronenlinsenanordnung fuer Elektronenstrahlschmelz- oder -verdampfungsanlagen
FR1351419A (fr) * 1962-09-29 1964-02-07 Centre Nat Rech Scient Procédé et dispositifs pour le chauffage de substances à l'aide de plasma et de rayonnement à haut éclairement énergétique
US3347701A (en) * 1963-02-05 1967-10-17 Fujitsu Ltd Method and apparatus for vapor deposition employing an electron beam
US3277865A (en) * 1963-04-01 1966-10-11 United States Steel Corp Metal-vapor source with heated reflecting shield
US3276902A (en) * 1963-10-01 1966-10-04 Itt Method of vapor deposition employing an electron beam
US3328672A (en) * 1964-02-06 1967-06-27 Temescal Metallurgical Corp Constant current supply

Also Published As

Publication number Publication date
DE1521251A1 (de) 1969-05-08
CH492033A (de) 1970-06-15
US3488426A (en) 1970-01-06
DE1521251B2 (de) 1970-03-26
GB1151818A (en) 1969-05-14

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