BE693026A - - Google Patents
Info
- Publication number
- BE693026A BE693026A BE693026DA BE693026A BE 693026 A BE693026 A BE 693026A BE 693026D A BE693026D A BE 693026DA BE 693026 A BE693026 A BE 693026A
- Authority
- BE
- Belgium
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/503—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using dc or ac discharges
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Photovoltaic Devices (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US52254666A | 1966-01-24 | 1966-01-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| BE693026A true BE693026A (hu) | 1967-07-24 |
Family
ID=24081286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| BE693026D BE693026A (hu) | 1966-01-24 | 1967-01-23 |
Country Status (4)
| Country | Link |
|---|---|
| BE (1) | BE693026A (hu) |
| FR (1) | FR1508794A (hu) |
| GB (1) | GB1141551A (hu) |
| NL (1) | NL6701010A (hu) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4423701A (en) * | 1982-03-29 | 1984-01-03 | Energy Conversion Devices, Inc. | Glow discharge deposition apparatus including a non-horizontally disposed cathode |
| US5141595A (en) * | 1990-03-05 | 1992-08-25 | Northrop Corporation | Method and apparatus for carbon coating and boron-doped carbon coating |
| DE4335573C2 (de) * | 1993-10-19 | 2002-10-17 | Eberhard Kohl | Vorrichtung zur Durchführung einer CVD-Beschichtung |
| DE4439056A1 (de) * | 1994-11-02 | 1996-05-09 | Dresden Vakuumtech Gmbh | Einrichtung zur chemischen Abscheidung auf Fasern und Verfahren zur Anwendung der Einrichtung |
-
1966
- 1966-08-24 GB GB3799866A patent/GB1141551A/en not_active Expired
-
1967
- 1967-01-23 NL NL6701010A patent/NL6701010A/xx unknown
- 1967-01-23 BE BE693026D patent/BE693026A/xx unknown
- 1967-01-23 FR FR92176A patent/FR1508794A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL6701010A (hu) | 1967-07-25 |
| GB1141551A (en) | 1969-01-29 |
| FR1508794A (fr) | 1968-01-05 |