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Publication of BE684563ApublicationCriticalpatent/BE684563A/xx
H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
H10P72/04—Apparatus for manufacture or treatment
H10P72/0428—Apparatus for mechanical treatment or grinding or cutting
B—PERFORMING OPERATIONS; TRANSPORTING
B28—WORKING CEMENT, CLAY, OR STONE
B28D—WORKING STONE OR STONE-LIKE MATERIALS
B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
B28D5/0005—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing
B28D5/0011—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by breaking, e.g. dicing with preliminary treatment, e.g. weakening by scoring