BE634510A - - Google Patents

Info

Publication number
BE634510A
BE634510A BE634510DA BE634510A BE 634510 A BE634510 A BE 634510A BE 634510D A BE634510D A BE 634510DA BE 634510 A BE634510 A BE 634510A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of BE634510A publication Critical patent/BE634510A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Electron Beam Exposure (AREA)
BE634510D 1962-07-05 BE634510A (enrdf_load_html_response)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US207681A US3150257A (en) 1962-07-05 1962-07-05 Electron beam aperture plate

Publications (1)

Publication Number Publication Date
BE634510A true BE634510A (enrdf_load_html_response)

Family

ID=22771562

Family Applications (1)

Application Number Title Priority Date Filing Date
BE634510D BE634510A (enrdf_load_html_response) 1962-07-05

Country Status (8)

Country Link
US (1) US3150257A (enrdf_load_html_response)
JP (1) JPS4933209B1 (enrdf_load_html_response)
BE (1) BE634510A (enrdf_load_html_response)
CH (1) CH413147A (enrdf_load_html_response)
DE (1) DE1248182B (enrdf_load_html_response)
FR (1) FR1362285A (enrdf_load_html_response)
GB (1) GB1057684A (enrdf_load_html_response)
NL (1) NL294850A (enrdf_load_html_response)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1299498B (de) * 1964-07-24 1969-07-17 Steigerwald Strahltech Vorrichtung zur UEberwachung des Strahlauftreffbereichs in Korpuskularstrahl-Bearbeitungsgeraeten
DE2326279A1 (de) * 1973-05-23 1974-12-19 Siemens Ag Ionenstrahlschnellschaltung zur erzielung definierter festkoerperdotierungen durch ionenimplantation
FR2321976A1 (fr) * 1975-08-26 1977-03-25 Commissariat Energie Atomique Vanne d'isolement pour machine de soudage par bombardement electronique et machines munies d'une telle vanne
US4445041A (en) * 1981-06-02 1984-04-24 Hewlett-Packard Company Electron beam blanker
EP2973663B1 (en) * 2013-03-15 2018-04-18 Glenn Lane Family Limited Liability Limited Partnership Adjustable mass resolving aperture

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2877353A (en) * 1954-07-14 1959-03-10 Gen Electric X-ray microscope
US3038993A (en) * 1958-05-21 1962-06-12 Masuda Tatsunosuke Aperture system for electron optical instrument
DE1850497U (de) * 1958-05-21 1962-04-26 Akashi Seisakusho Vorrichtung zum reinigen der blende von elektronen-mikroskopen bzw. elektronen-beugungsgeraeten.

Also Published As

Publication number Publication date
CH413147A (de) 1966-05-15
US3150257A (en) 1964-09-22
FR1362285A (fr) 1964-05-29
GB1057684A (en) 1967-02-08
DE1248182B (de) 1967-08-24
NL294850A (enrdf_load_html_response)
JPS4933209B1 (enrdf_load_html_response) 1974-09-05

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