BE633078A - - Google Patents

Info

Publication number
BE633078A
BE633078A BE633078DA BE633078A BE 633078 A BE633078 A BE 633078A BE 633078D A BE633078D A BE 633078DA BE 633078 A BE633078 A BE 633078A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of BE633078A publication Critical patent/BE633078A/xx

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K15/00—Electron-beam welding or cutting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/065—Construction of guns or parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Electron Sources, Ion Sources (AREA)
BE633078D 1962-05-30 BE633078A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR899323A FR1354784A (fr) 1962-05-30 1962-05-30 Canon à électrons

Publications (1)

Publication Number Publication Date
BE633078A true BE633078A (ja)

Family

ID=8780121

Family Applications (1)

Application Number Title Priority Date Filing Date
BE633078D BE633078A (ja) 1962-05-30

Country Status (5)

Country Link
BE (1) BE633078A (ja)
DE (1) DE1876616U (ja)
FR (1) FR1354784A (ja)
GB (1) GB1020725A (ja)
LU (1) LU43749A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69125229T2 (de) * 1990-08-10 1997-08-28 Koninkl Philips Electronics Nv Ladungspartikelstrahlanordnung
JP2732961B2 (ja) * 1991-07-18 1998-03-30 株式会社日立製作所 荷電粒子線装置

Also Published As

Publication number Publication date
GB1020725A (en) 1966-02-23
FR1354784A (fr) 1964-03-13
DE1876616U (de) 1963-08-01
LU43749A1 (ja) 1963-07-15

Similar Documents

Publication Publication Date Title
BE599783A (ja)
BE614159A (ja)
BE631107A (ja)
BE630504A (ja)
LU43749A1 (ja)
BE616490A (ja)
BE616386A (ja)
BE632276A (ja)
BE616166A (ja)
BE615962A (ja)
BE615849A (ja)
BE633451A (ja)
BE615804A (ja)
BE615523A (ja)
BE634718A (ja)
BE615521A (ja)
BE615316A (ja)
BE636024A (ja)
BE615294A (ja)
BE636711A (ja)
BE615244A (ja)
BE614986A (ja)
BE614757A (ja)
BE633599A (ja)
BE633890A (ja)