BE607571A - - Google Patents

Info

Publication number
BE607571A
BE607571A BE607571DA BE607571A BE 607571 A BE607571 A BE 607571A BE 607571D A BE607571D A BE 607571DA BE 607571 A BE607571 A BE 607571A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of BE607571A publication Critical patent/BE607571A/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0675—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating using interferometry
    • H10P74/203—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S118/00—Coating apparatus
    • Y10S118/90—Semiconductor vapor doping
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/052—Face to face deposition

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Length Measuring Devices By Optical Means (AREA)
BE607571D 1960-09-09 BE607571A (cg-RX-API-DMAC10.html)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US54872A US3099579A (en) 1960-09-09 1960-09-09 Growing and determining epitaxial layer thickness

Publications (1)

Publication Number Publication Date
BE607571A true BE607571A (cg-RX-API-DMAC10.html)

Family

ID=21994045

Family Applications (1)

Application Number Title Priority Date Filing Date
BE607571D BE607571A (cg-RX-API-DMAC10.html) 1960-09-09

Country Status (5)

Country Link
US (1) US3099579A (cg-RX-API-DMAC10.html)
BE (1) BE607571A (cg-RX-API-DMAC10.html)
GB (1) GB997219A (cg-RX-API-DMAC10.html)
NL (1) NL268241A (cg-RX-API-DMAC10.html)
SE (1) SE305963B (cg-RX-API-DMAC10.html)

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3233174A (en) * 1960-12-06 1966-02-01 Merck & Co Inc Method of determining the concentration of active impurities present in a gaseous decomposable semiconductor compound
US3220896A (en) * 1961-07-17 1965-11-30 Raytheon Co Transistor
NL283619A (cg-RX-API-DMAC10.html) * 1961-10-06
BE632105A (cg-RX-API-DMAC10.html) * 1962-05-09
US3447977A (en) * 1962-08-23 1969-06-03 Siemens Ag Method of producing semiconductor members
NL296876A (cg-RX-API-DMAC10.html) * 1962-08-23
US3316130A (en) * 1963-05-07 1967-04-25 Gen Electric Epitaxial growth of semiconductor devices
US3326178A (en) * 1963-09-12 1967-06-20 Angelis Henry M De Vapor deposition means to produce a radioactive source
US3322979A (en) * 1964-03-31 1967-05-30 Texas Instruments Inc Thermionic energy converter
US3407783A (en) * 1964-08-31 1968-10-29 Emil R. Capita Vapor deposition apparatus
DE1262244B (de) * 1964-12-23 1968-03-07 Siemens Ag Verfahren zum epitaktischen Abscheiden einer kristallinen Schicht, insbesondere aus Halbleitermaterial
US3351757A (en) * 1965-02-18 1967-11-07 Bell Telephone Labor Inc Method of testing the internal friction of synthetic quartz crystal by the use of two different frequencies of infrared
US3338761A (en) * 1965-03-31 1967-08-29 Texas Instruments Inc Method and apparatus for making compound materials
US3473977A (en) * 1967-02-02 1969-10-21 Westinghouse Electric Corp Semiconductor fabrication technique permitting examination of epitaxially grown layers
US3399651A (en) * 1967-05-26 1968-09-03 Philco Ford Corp Susceptor for growing polycrystalline silicon on wafers of monocrystalline silicon
US3465150A (en) * 1967-06-15 1969-09-02 Frances Hugle Method of aligning semiconductors
US3601492A (en) * 1967-11-20 1971-08-24 Monsanto Co Apparatus for measuring film thickness
US3620814A (en) * 1968-08-09 1971-11-16 Bell Telephone Labor Inc Continuous measurement of the thickness of hot thin films
US4020791A (en) * 1969-06-30 1977-05-03 Siemens Aktiengesellschaft Apparatus for indiffusing dopants into semiconductor material
US3868924A (en) * 1969-06-30 1975-03-04 Siemens Ag Apparatus for indiffusing dopants into semiconductor material
US4203799A (en) * 1975-05-30 1980-05-20 Hitachi, Ltd. Method for monitoring thickness of epitaxial growth layer on substrate
NL7605234A (nl) * 1976-05-17 1977-11-21 Philips Nv Werkwijze voor het vervaardigen van een halfge- leiderinrichting en halfgeleiderinrichting ver- vaardigd met behulp van de werkwijze.
NL7710164A (nl) * 1977-09-16 1979-03-20 Philips Nv Werkwijze ter behandeling van een eenkristal- lijn lichaam.
JP5444823B2 (ja) * 2009-05-01 2014-03-19 信越半導体株式会社 Ｓｏｉウェーハの検査方法
CN102005401A (zh) * 2010-09-10 2011-04-06 上海宏力半导体制造有限公司 外延薄膜厚度测量方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2726173A (en) * 1953-04-03 1955-12-06 Itt Method and apparatus for measuring film thickness
US2898248A (en) * 1957-05-15 1959-08-04 Ibm Method of fabricating germanium bodies

Also Published As

Publication number Publication date
NL268241A (cg-RX-API-DMAC10.html)
GB997219A (en) 1965-07-07
US3099579A (en) 1963-07-30
SE305963B (cg-RX-API-DMAC10.html) 1968-11-11

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