BE546040A - - Google Patents

Info

Publication number
BE546040A
BE546040A BE546040DA BE546040A BE 546040 A BE546040 A BE 546040A BE 546040D A BE546040D A BE 546040DA BE 546040 A BE546040 A BE 546040A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of BE546040A publication Critical patent/BE546040A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Electron Sources, Ion Sources (AREA)
BE546040D 1955-03-15 BE546040A (nl)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL339297X 1955-03-15

Publications (1)

Publication Number Publication Date
BE546040A true BE546040A (nl)

Family

ID=19784647

Family Applications (1)

Application Number Title Priority Date Filing Date
BE546040D BE546040A (nl) 1955-03-15

Country Status (7)

Country Link
US (1) US2914675A (nl)
BE (1) BE546040A (nl)
CH (1) CH339297A (nl)
DE (1) DE1098634B (nl)
FR (1) FR1148643A (nl)
GB (1) GB793664A (nl)
NL (2) NL195609A (nl)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3046397A (en) * 1959-06-17 1962-07-24 Tesla Np Device for compensating axial astigmatism of electron-optical systems
NL271119A (nl) * 1961-07-10
US3223871A (en) * 1961-08-22 1965-12-14 Gen Electric Electron optical system
US3287558A (en) * 1961-09-08 1966-11-22 High Voltage Engineering Corp Charged particle deflecting device consisting of sequentially positioned uniform and non-uniform magnetic field sectors
US3150258A (en) * 1962-07-05 1964-09-22 Philips Electronic Pharma Electromagnetic stigmators for correcting electron-optical deficiencies in the lenses of electron beam instruments
US3221133A (en) * 1963-04-02 1965-11-30 Japan Electron Optics Lab Co L Electron microscope with means for treating and observing specimens

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB504802A (en) * 1937-11-01 1939-05-01 Frederick Hermes Nicoll Improvements in or relating to permanent magnet devices for producing axially symmetrical magnetic fields
GB665094A (en) * 1947-04-12 1952-01-16 Ass Elect Ind Improvements relating to the reduction of primary spherical aberration in magnetic electron lenses
BE481554A (nl) * 1947-06-26
US2520813A (en) * 1947-12-10 1950-08-29 Rudenberg Reinhold Electron optical system
GB680300A (en) * 1950-02-23 1952-10-01 Vickers Electrical Co Ltd Improvements relating to magnetic electron lenses

Also Published As

Publication number Publication date
FR1148643A (fr) 1957-12-12
NL97470C (nl)
CH339297A (de) 1959-06-30
NL195609A (nl)
DE1098634B (de) 1961-02-02
US2914675A (en) 1959-11-24
GB793664A (en) 1958-04-23

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