BE509097A - - Google Patents

Info

Publication number
BE509097A
BE509097A BE509097DA BE509097A BE 509097 A BE509097 A BE 509097A BE 509097D A BE509097D A BE 509097DA BE 509097 A BE509097 A BE 509097A
Authority
BE
Belgium
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Publication of BE509097A publication Critical patent/BE509097A/xx

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/58Arrangements for focusing or reflecting ray or beam
    • H01J29/64Magnetic lenses
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02Details
    • H01J37/04Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/147Arrangements for directing or deflecting the discharge along a desired path
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00Particle spectrometers or separator tubes
    • H01J49/44Energy spectrometers, e.g. alpha-, beta-spectrometers
    • H01J49/46Static spectrometers

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Tubes For Measurement (AREA)
  • Electron Beam Exposure (AREA)
BE509097D 1951-02-10 BE509097A (US06534493-20030318-C00166.png)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL302299X 1951-02-10

Publications (1)

Publication Number Publication Date
BE509097A true BE509097A (US06534493-20030318-C00166.png)

Family

ID=19783341

Family Applications (1)

Application Number Title Priority Date Filing Date
BE509097D BE509097A (US06534493-20030318-C00166.png) 1951-02-10

Country Status (6)

Country Link
US (1) US2777958A (US06534493-20030318-C00166.png)
BE (1) BE509097A (US06534493-20030318-C00166.png)
CH (1) CH302299A (US06534493-20030318-C00166.png)
DE (1) DE911878C (US06534493-20030318-C00166.png)
FR (1) FR1058851A (US06534493-20030318-C00166.png)
GB (1) GB753562A (US06534493-20030318-C00166.png)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2872574A (en) * 1956-04-12 1959-02-03 Edwin M Mcmillan Cloverleaf cyclotron
GB846898A (en) * 1956-10-25 1960-08-31 Nat Res Dev Improvements in or relating to electrion lenses
BE564870A (US06534493-20030318-C00166.png) * 1957-02-16 1900-01-01
NL225017A (US06534493-20030318-C00166.png) * 1957-02-19
US2931903A (en) * 1957-06-17 1960-04-05 High Voltage Engineering Corp Acceleration and application of high intensity electron beams for radiation processing
US3360647A (en) * 1964-09-14 1967-12-26 Varian Associates Electron accelerator with specific deflecting magnet structure and x-ray target
CH393535A (de) * 1961-09-26 1965-06-15 Trueb Taeuber & Co Ag Magnetanordnung zur Erzeugung von Magnetfeldern veränderbarer Feldstärke mit konstanter geometrischer Konfiguration
US3243667A (en) * 1962-04-09 1966-03-29 High Voltage Engineering Corp Non dispersive magnetic deflection apparatus and method
GB1074625A (en) * 1963-04-24 1967-07-05 Ass Elect Ind Improvements relating to magnetic spectrometers
US3379911A (en) * 1965-06-11 1968-04-23 High Voltage Engineering Corp Particle accelerator provided with an adjustable 270deg. non-dispersive magnetic charged-particle beam bender
US3516037A (en) * 1967-12-05 1970-06-02 High Voltage Engineering Corp Nondispersive magnetic deflection method
FR2036373A5 (US06534493-20030318-C00166.png) * 1969-03-12 1970-12-24 Thomson Csf
FR2043973A5 (US06534493-20030318-C00166.png) * 1969-05-05 1971-02-19 Thomson Csf
US3659236A (en) * 1970-08-05 1972-04-25 Us Air Force Inhomogeneity variable magnetic field magnet
NL7012758A (US06534493-20030318-C00166.png) * 1970-08-28 1972-03-01
US3655902A (en) * 1970-10-19 1972-04-11 Air Reduction Heating system for electron beam furnace
US3673528A (en) * 1971-03-01 1972-06-27 Gen Electric Wide frequency response line scan magnetic deflector
US4281251A (en) * 1979-08-06 1981-07-28 Radiation Dynamics, Inc. Scanning beam deflection system and method
JPS62295347A (ja) * 1986-04-09 1987-12-22 イクリプス・イオン・テクノロジ−・インコ−ポレイテツド イオンビ−ム高速平行走査装置
US4980562A (en) * 1986-04-09 1990-12-25 Varian Associates, Inc. Method and apparatus for high efficiency scanning in an ion implanter
US4745281A (en) * 1986-08-25 1988-05-17 Eclipse Ion Technology, Inc. Ion beam fast parallel scanning having dipole magnetic lens with nonuniform field
US5053627A (en) * 1990-03-01 1991-10-01 Ibis Technology Corporation Apparatus for ion implantation
US5279723A (en) * 1992-07-30 1994-01-18 As Represented By The United States Department Of Energy Filtered cathodic arc source
US5319339A (en) * 1993-03-08 1994-06-07 The United States Of America As Represented By The Secretary Of The Army Tubular structure having transverse magnetic field with gradient
AU1067799A (en) * 1997-10-07 1999-04-27 Sti Optronics Inc. Magnetic separator for linear dispersion and method for producing the same
US6677599B2 (en) * 2000-03-27 2004-01-13 Applied Materials, Inc. System and method for uniformly implanting a wafer with an ion beam
AU2001270133A1 (en) 2000-06-22 2002-01-02 Proteros, Llc Ion implantation uniformity correction using beam current control

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2636999A (en) * 1953-04-28 x x x x i
DE639469C (de) * 1934-12-20 1936-12-10 Fernseh Akt Ges Magnetisch-elektrisches Ablenksystem fuer Braunsche Roehren, insbesondere fuer Fernsehzwecke
US2272165A (en) * 1938-03-01 1942-02-03 Univ Leland Stanford Junior High frequency electrical apparatus
US2260041A (en) * 1939-03-22 1941-10-21 Gen Electric Electron microscope
US2469964A (en) * 1941-05-03 1949-05-10 Bell Telephone Labor Inc Electron discharge apparatus
US2551544A (en) * 1944-09-20 1951-05-01 Alfred O C Nicr Mass spectrometer
US2457495A (en) * 1944-12-18 1948-12-28 Sylvania Electric Prod Ultra high frequency tube
US2447260A (en) * 1945-06-21 1948-08-17 Research Corp Electron microspectroscope
US2429558A (en) * 1945-08-24 1947-10-21 Research Corp Electron beam monochromator
US2435386A (en) * 1946-07-27 1948-02-03 Rca Corp Electron diffraction camera
US2533687A (en) * 1949-05-27 1950-12-12 Quam Nichols Company Magnetic focusing device

Also Published As

Publication number Publication date
US2777958A (en) 1957-01-15
DE911878C (de) 1954-05-20
CH302299A (de) 1954-10-15
FR1058851A (fr) 1954-03-19
GB753562A (en) 1956-07-25

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