H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin-film techniques
H01C17/08—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin-film techniques by vapour deposition
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Apparatuses And Processes For Manufacturing Resistors
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