AU6784800A - Wafer holder assembly - Google Patents
Wafer holder assemblyInfo
- Publication number
- AU6784800A AU6784800A AU67848/00A AU6784800A AU6784800A AU 6784800 A AU6784800 A AU 6784800A AU 67848/00 A AU67848/00 A AU 67848/00A AU 6784800 A AU6784800 A AU 6784800A AU 6784800 A AU6784800 A AU 6784800A
- Authority
- AU
- Australia
- Prior art keywords
- holder assembly
- wafer holder
- wafer
- assembly
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/265—Bombardment with radiation with high-energy radiation producing ion implantation
Landscapes
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- High Energy & Nuclear Physics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (9)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US09376506 | 1999-08-18 | ||
US09/377,028 US6433342B1 (en) | 1999-08-18 | 1999-08-18 | Coated wafer holding pin |
US09376505 | 1999-08-18 | ||
US09/376,506 US6452195B1 (en) | 1999-08-18 | 1999-08-18 | Wafer holding pin |
US09/376,799 US6155436A (en) | 1999-08-18 | 1999-08-18 | Arc inhibiting wafer holder assembly |
US09377028 | 1999-08-18 | ||
US09376799 | 1999-08-18 | ||
US09/376,505 US6423975B1 (en) | 1999-08-18 | 1999-08-18 | Wafer holder for simox processing |
PCT/US2000/022677 WO2001013410A1 (en) | 1999-08-18 | 2000-08-17 | Wafer holder assembly |
Publications (1)
Publication Number | Publication Date |
---|---|
AU6784800A true AU6784800A (en) | 2001-03-13 |
Family
ID=27503145
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU67848/00A Abandoned AU6784800A (en) | 1999-08-18 | 2000-08-17 | Wafer holder assembly |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1208587A1 (en) |
JP (1) | JP2003531471A (en) |
KR (1) | KR20020041412A (en) |
AU (1) | AU6784800A (en) |
WO (1) | WO2001013410A1 (en) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB2390476B (en) | 2002-07-03 | 2005-08-03 | Applied Materials Inc | Improved method and apparatus for reducing cross contamination of species during ion implantation |
US6794662B1 (en) * | 2003-10-07 | 2004-09-21 | Ibis Technology Corporation | Thermosetting resin wafer-holding pin |
JP6037734B2 (en) * | 2012-09-07 | 2016-12-07 | 三菱重工工作機械株式会社 | Room temperature bonding apparatus and room temperature bonding method |
AT14861U1 (en) * | 2015-03-02 | 2016-07-15 | Plansee Se | ion implanter |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4410209A (en) * | 1982-03-11 | 1983-10-18 | Trapani Silvio P | Wafer-handling tool |
JPH02236940A (en) * | 1989-03-08 | 1990-09-19 | Mitsubishi Electric Corp | Ion implantation apparatus |
US5095300A (en) * | 1990-03-28 | 1992-03-10 | Nec Electronics Inc. | Device for sensing side positioning of wafers |
JPH0963531A (en) * | 1995-08-23 | 1997-03-07 | Nippon Steel Corp | Device for fixing member to be ion-implantated in ion implanter |
-
2000
- 2000-08-17 AU AU67848/00A patent/AU6784800A/en not_active Abandoned
- 2000-08-17 KR KR1020027002078A patent/KR20020041412A/en not_active Application Discontinuation
- 2000-08-17 WO PCT/US2000/022677 patent/WO2001013410A1/en not_active Application Discontinuation
- 2000-08-17 EP EP00955691A patent/EP1208587A1/en not_active Withdrawn
- 2000-08-17 JP JP2001517413A patent/JP2003531471A/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
WO2001013410A1 (en) | 2001-02-22 |
EP1208587A1 (en) | 2002-05-29 |
JP2003531471A (en) | 2003-10-21 |
WO2001013410A9 (en) | 2001-08-16 |
KR20020041412A (en) | 2002-06-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |