AU6726987A - Opto-electronic process for inspecting surfaces - Google Patents

Opto-electronic process for inspecting surfaces

Info

Publication number
AU6726987A
AU6726987A AU67269/87A AU6726987A AU6726987A AU 6726987 A AU6726987 A AU 6726987A AU 67269/87 A AU67269/87 A AU 67269/87A AU 6726987 A AU6726987 A AU 6726987A AU 6726987 A AU6726987 A AU 6726987A
Authority
AU
Australia
Prior art keywords
opto
electronic process
inspecting surfaces
inspecting
electronic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU67269/87A
Other languages
English (en)
Inventor
Wilfried Schoeps
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sin/schweiz Institut fur Nuklearforschung
Original Assignee
SCHWEIZ INST NUKLEAR SIN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SCHWEIZ INST NUKLEAR SIN filed Critical SCHWEIZ INST NUKLEAR SIN
Publication of AU6726987A publication Critical patent/AU6726987A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
AU67269/87A 1985-12-17 1986-12-15 Opto-electronic process for inspecting surfaces Abandoned AU6726987A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH5363/85 1985-12-17
CH536385A CH669663A5 (enExample) 1985-12-17 1985-12-17

Publications (1)

Publication Number Publication Date
AU6726987A true AU6726987A (en) 1987-07-15

Family

ID=4292308

Family Applications (1)

Application Number Title Priority Date Filing Date
AU67269/87A Abandoned AU6726987A (en) 1985-12-17 1986-12-15 Opto-electronic process for inspecting surfaces

Country Status (4)

Country Link
EP (1) EP0250490A1 (enExample)
AU (1) AU6726987A (enExample)
CH (1) CH669663A5 (enExample)
WO (1) WO1987003957A1 (enExample)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2626383B1 (fr) * 1988-01-27 1991-10-25 Commissariat Energie Atomique Procede de microscopie optique confocale a balayage et en profondeur de champ etendue et dispositifs pour la mise en oeuvre du procede
US5268747A (en) * 1988-10-30 1993-12-07 Schwizerische Eidgenossenschaft Paul Scherrer Institute Apparatus for the simultaneous non-contacting testing of a plurality of points on a test material, as well as the use thereof
WO1990008445A1 (fr) * 1989-01-19 1990-07-26 Tesler Vladimir E Systeme de television
DE10125751C2 (de) * 2001-05-18 2003-04-03 Willing Gmbh Dr Ing Leuchte zur Abmusterung von Flächen

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1534762A (fr) * 1967-05-18 1968-08-02 Cilas Procédé et dispositif de palpage optique
US3736065A (en) * 1972-05-09 1973-05-29 Philco Ford Corp Radiation sensitive means for detecting optical flaws in glass
CA1089551A (en) * 1978-06-27 1980-11-11 John M. Lucas Graininess sensor
DE3037622C2 (de) * 1980-10-04 1987-02-26 Theodor Prof. Dr.-Ing. 1000 Berlin Gast Einrichtung zur Bestimmung der Oberflächengüte
DE3428435A1 (de) * 1984-08-01 1986-02-06 Erwin Sick Gmbh Optik-Elektronik, 7808 Waldkirch Rauheitssonde

Also Published As

Publication number Publication date
CH669663A5 (enExample) 1989-03-31
WO1987003957A1 (fr) 1987-07-02
EP0250490A1 (de) 1988-01-07

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