AU6418790A - Device for electrically exciting a gas with microwaves - Google Patents

Device for electrically exciting a gas with microwaves

Info

Publication number
AU6418790A
AU6418790A AU64187/90A AU6418790A AU6418790A AU 6418790 A AU6418790 A AU 6418790A AU 64187/90 A AU64187/90 A AU 64187/90A AU 6418790 A AU6418790 A AU 6418790A AU 6418790 A AU6418790 A AU 6418790A
Authority
AU
Australia
Prior art keywords
microwaves
gas
electrically exciting
exciting
electrically
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU64187/90A
Inventor
Jurgen Klein
Peter Loosen
Silke Pfluger
Thomas Rettich
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Original Assignee
Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV filed Critical Fraunhofer Gesellschaft zur Forderung der Angewandten Forschung eV
Publication of AU6418790A publication Critical patent/AU6418790A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J65/00—Lamps without any electrode inside the vessel; Lamps with at least one main electrode outside the vessel
    • H01J65/04—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels
    • H01J65/042—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field
    • H01J65/044—Lamps in which a gas filling is excited to luminesce by an external electromagnetic field or by external corpuscular radiation, e.g. for indicating plasma display panels by an external electromagnetic field the field being produced by a separate microwave unit

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Lasers (AREA)
AU64187/90A 1989-10-07 1990-10-05 Device for electrically exciting a gas with microwaves Abandoned AU6418790A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE3933619 1989-10-07
DE19893933619 DE3933619C2 (en) 1989-10-07 1989-10-07 Devices for the electrical excitation of a gas with microwave energy

Publications (1)

Publication Number Publication Date
AU6418790A true AU6418790A (en) 1991-04-28

Family

ID=6391079

Family Applications (1)

Application Number Title Priority Date Filing Date
AU64187/90A Abandoned AU6418790A (en) 1989-10-07 1990-10-05 Device for electrically exciting a gas with microwaves

Country Status (3)

Country Link
AU (1) AU6418790A (en)
DE (1) DE3933619C2 (en)
WO (1) WO1991005450A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4113142A1 (en) * 1991-03-14 1992-09-17 Leybold Ag DEVICE FOR GENERATING GLIMMENT CHARGES
FR2694474B1 (en) * 1992-07-29 1994-10-14 Onera (Off Nat Aerospatiale) Microwave plasma reactor and deposition apparatus incorporating such a reactor.
US5914564A (en) * 1994-04-07 1999-06-22 The Regents Of The University Of California RF driven sulfur lamp having driving electrodes which face each other
DE19503205C1 (en) * 1995-02-02 1996-07-11 Muegge Electronic Gmbh Device for generating a plasma in low pressure container e.g. for hardware items surface treatment by plasma etching and plasma deposition
DE19739894C2 (en) * 1997-09-11 2001-07-05 Muegge Electronic Gmbh Plasma treatment device
GB0120993D0 (en) 2001-08-30 2001-10-24 Quay Technologies Pulsed UV light source
US8269190B2 (en) 2010-09-10 2012-09-18 Severn Trent Water Purification, Inc. Method and system for achieving optimal UV water disinfection

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2290126A1 (en) * 1974-10-31 1976-05-28 Anvar IMPROVEMENTS TO EXCITATION DEVICES, BY HF WAVES, OF A GAS COLUMN ENCLOSED IN A ENCLOSURE
US4359777A (en) * 1981-01-22 1982-11-16 The United States Of America As Represented By The Secretary Of The Army High efficiency transversely excited electrodeless gas lasers
US4802183A (en) * 1982-04-07 1989-01-31 Board Of Trustees Of The Leland Stanford Junior University Microwave excited excimer laser and method
DE3244391A1 (en) * 1982-12-01 1984-06-07 Leybold-Heraeus GmbH, 5000 Köln DEVICE FOR COATING SUBSTRATES BY PLASMAPOLYMERISATION
US4618477A (en) * 1985-01-17 1986-10-21 International Business Machines Corporation Uniform plasma for drill smear removal reactor
JPS61220487A (en) * 1985-03-27 1986-09-30 Mitsubishi Electric Corp Laser oscillator
FR2579855A1 (en) * 1985-03-28 1986-10-03 Centre Nat Rech Scient DEVICE FOR THE EXCITATION BY MICROWAVE WAVES OF A PLASMA IN A GAS COLUMN, ALLOWING IN PARTICULAR THE PRODUCTION OF AN ION LASER
CA1246762A (en) * 1985-07-05 1988-12-13 Zenon Zakrzewski Surface wave launchers to produce plasma columns and means for producing plasma of different shapes
DE3855896T2 (en) * 1987-01-26 1998-01-02 Mitsubishi Electric Corp Plasma device
DE3708314A1 (en) * 1987-03-14 1988-09-22 Deutsche Forsch Luft Raumfahrt MICROWAVE PUMPED HIGH PRESSURE GAS DISCHARGE LASER
DE3738921A1 (en) * 1987-05-09 1988-11-17 Fraunhofer Ges Forschung LASER AND METHOD FOR GENERATING LASER RADIATION
DD263648B5 (en) * 1987-08-31 1996-01-25 Buck Werke Gmbh Device for the generation of a microwave plasma with a large expansion and homogeneity

Also Published As

Publication number Publication date
DE3933619C2 (en) 1993-12-23
DE3933619A1 (en) 1991-04-18
WO1991005450A1 (en) 1991-04-18

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