FR2694474B1 - Microwave plasma reactor and deposition apparatus incorporating such a reactor. - Google Patents

Microwave plasma reactor and deposition apparatus incorporating such a reactor.

Info

Publication number
FR2694474B1
FR2694474B1 FR9209376A FR9209376A FR2694474B1 FR 2694474 B1 FR2694474 B1 FR 2694474B1 FR 9209376 A FR9209376 A FR 9209376A FR 9209376 A FR9209376 A FR 9209376A FR 2694474 B1 FR2694474 B1 FR 2694474B1
Authority
FR
France
Prior art keywords
reactor
deposition apparatus
microwave plasma
apparatus incorporating
plasma reactor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR9209376A
Other languages
French (fr)
Other versions
FR2694474A1 (en
Inventor
Jacques Bernard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Office National dEtudes et de Recherches Aerospatiales ONERA
Original Assignee
Office National dEtudes et de Recherches Aerospatiales ONERA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Office National dEtudes et de Recherches Aerospatiales ONERA filed Critical Office National dEtudes et de Recherches Aerospatiales ONERA
Priority to FR9209376A priority Critical patent/FR2694474B1/en
Publication of FR2694474A1 publication Critical patent/FR2694474A1/en
Application granted granted Critical
Publication of FR2694474B1 publication Critical patent/FR2694474B1/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H01J37/32211—Means for coupling power to the plasma
    • H01J37/32229—Waveguides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32192—Microwave generated discharge
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/24—Generating plasma
    • H05H1/46—Generating plasma using applied electromagnetic fields, e.g. high frequency or microwave energy

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electromagnetism (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical Vapour Deposition (AREA)
FR9209376A 1992-07-29 1992-07-29 Microwave plasma reactor and deposition apparatus incorporating such a reactor. Expired - Fee Related FR2694474B1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR9209376A FR2694474B1 (en) 1992-07-29 1992-07-29 Microwave plasma reactor and deposition apparatus incorporating such a reactor.

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR9209376A FR2694474B1 (en) 1992-07-29 1992-07-29 Microwave plasma reactor and deposition apparatus incorporating such a reactor.

Publications (2)

Publication Number Publication Date
FR2694474A1 FR2694474A1 (en) 1994-02-04
FR2694474B1 true FR2694474B1 (en) 1994-10-14

Family

ID=9432401

Family Applications (1)

Application Number Title Priority Date Filing Date
FR9209376A Expired - Fee Related FR2694474B1 (en) 1992-07-29 1992-07-29 Microwave plasma reactor and deposition apparatus incorporating such a reactor.

Country Status (1)

Country Link
FR (1) FR2694474B1 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2668676B2 (en) * 1986-06-06 1993-06-11 Univ Bordeaux 1 IMPROVED DEVICE FOR APPLYING MICROWAVE.
DE3712971A1 (en) * 1987-04-16 1988-11-03 Plasonic Oberflaechentechnik G Method and device for producing (generating) a plasma
JPH01150481A (en) * 1987-12-07 1989-06-13 Denki Kogyo Co Ltd Plasma torch
JPH03110798A (en) * 1989-09-25 1991-05-10 Ryohei Itaya Microwave plasma generating device
DE3933619C2 (en) * 1989-10-07 1993-12-23 Fraunhofer Ges Forschung Devices for the electrical excitation of a gas with microwave energy

Also Published As

Publication number Publication date
FR2694474A1 (en) 1994-02-04

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Legal Events

Date Code Title Description
ST Notification of lapse

Effective date: 20090331