AU578174B2 - Chemical vapor deposition method - Google Patents
Chemical vapor deposition methodInfo
- Publication number
- AU578174B2 AU578174B2 AU67063/86A AU6706386A AU578174B2 AU 578174 B2 AU578174 B2 AU 578174B2 AU 67063/86 A AU67063/86 A AU 67063/86A AU 6706386 A AU6706386 A AU 6706386A AU 578174 B2 AU578174 B2 AU 578174B2
- Authority
- AU
- Australia
- Prior art keywords
- vapor deposition
- chemical vapor
- deposition method
- chemical
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60-298044 | 1985-12-28 | ||
JP29804485 | 1985-12-28 |
Publications (2)
Publication Number | Publication Date |
---|---|
AU6706386A AU6706386A (en) | 1987-07-02 |
AU578174B2 true AU578174B2 (en) | 1988-10-13 |
Family
ID=33430386
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU67063/86A Expired AU578174B2 (en) | 1985-12-28 | 1986-12-30 | Chemical vapor deposition method |
Country Status (1)
Country | Link |
---|---|
AU (1) | AU578174B2 (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU6632186A (en) * | 1985-12-11 | 1987-06-18 | Canon Kabushiki Kaisha | Process for the preparation of image-reading photosensor |
AU6706186A (en) * | 1985-12-28 | 1987-07-02 | Canon Kabushiki Kaisha | Multilayer films by optical cvd |
AU6691886A (en) * | 1985-12-26 | 1987-07-02 | Canon Kabushiki Kaisha | Thin-film transistor |
-
1986
- 1986-12-30 AU AU67063/86A patent/AU578174B2/en not_active Expired
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
AU6632186A (en) * | 1985-12-11 | 1987-06-18 | Canon Kabushiki Kaisha | Process for the preparation of image-reading photosensor |
AU6691886A (en) * | 1985-12-26 | 1987-07-02 | Canon Kabushiki Kaisha | Thin-film transistor |
AU6706186A (en) * | 1985-12-28 | 1987-07-02 | Canon Kabushiki Kaisha | Multilayer films by optical cvd |
Also Published As
Publication number | Publication date |
---|---|
AU6706386A (en) | 1987-07-02 |
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