AU5499299A - Method and device for producing process gas-vapor mixtures - Google Patents

Method and device for producing process gas-vapor mixtures

Info

Publication number
AU5499299A
AU5499299A AU54992/99A AU5499299A AU5499299A AU 5499299 A AU5499299 A AU 5499299A AU 54992/99 A AU54992/99 A AU 54992/99A AU 5499299 A AU5499299 A AU 5499299A AU 5499299 A AU5499299 A AU 5499299A
Authority
AU
Australia
Prior art keywords
process gas
producing process
vapor mixtures
vapor
mixtures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU54992/99A
Inventor
Vladimir N. Linev
Anatoly I. Semenikov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU5499299A publication Critical patent/AU5499299A/en
Abandoned legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
    • C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemical Vapour Deposition (AREA)
AU54992/99A 1999-09-14 1999-09-14 Method and device for producing process gas-vapor mixtures Abandoned AU5499299A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/BY1999/000007 WO2001020057A1 (en) 1999-09-14 1999-09-14 Method and device for producing process gas-vapor mixtures

Publications (1)

Publication Number Publication Date
AU5499299A true AU5499299A (en) 2001-04-17

Family

ID=4083772

Family Applications (1)

Application Number Title Priority Date Filing Date
AU54992/99A Abandoned AU5499299A (en) 1999-09-14 1999-09-14 Method and device for producing process gas-vapor mixtures

Country Status (2)

Country Link
AU (1) AU5499299A (en)
WO (1) WO2001020057A1 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5674574A (en) * 1996-05-20 1997-10-07 Micron Technology, Inc. Vapor delivery system for solid precursors and method regarding same

Also Published As

Publication number Publication date
WO2001020057A1 (en) 2001-03-22

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase