AU5245400A - Sheet-shaped piezoelectric device, method for making same, and piezoelectric vibrator and piezoelectric sound generator using same - Google Patents

Sheet-shaped piezoelectric device, method for making same, and piezoelectric vibrator and piezoelectric sound generator using same

Info

Publication number
AU5245400A
AU5245400A AU52454/00A AU5245400A AU5245400A AU 5245400 A AU5245400 A AU 5245400A AU 52454/00 A AU52454/00 A AU 52454/00A AU 5245400 A AU5245400 A AU 5245400A AU 5245400 A AU5245400 A AU 5245400A
Authority
AU
Australia
Prior art keywords
piezoelectric
same
sheet
sound generator
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU52454/00A
Other languages
English (en)
Inventor
Jun Kuwata
Atsushi Omote
Futoshi Takeshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Publication of AU5245400A publication Critical patent/AU5245400A/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead based oxides
    • H10N30/8554—Lead zirconium titanate based
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/09—Forming piezoelectric or electrostrictive materials
    • H10N30/093—Forming inorganic materials
    • H10N30/097—Forming inorganic materials by sintering
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/85—Piezoelectric or electrostrictive active materials
    • H10N30/853—Ceramic compositions
    • H10N30/8548—Lead based oxides
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/877—Conductive materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Piezo-Electric Transducers For Audible Bands (AREA)
  • Physical Vapour Deposition (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
AU52454/00A 1999-06-08 2000-06-07 Sheet-shaped piezoelectric device, method for making same, and piezoelectric vibrator and piezoelectric sound generator using same Abandoned AU5245400A (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
JP11/160510 1999-06-08
JP16051099 1999-06-08
JP11/232937 1999-08-19
JP11232937A JP2001057449A (ja) 1999-06-08 1999-08-19 薄板圧電素子並びにそれを用いた圧電振動子及び圧電発音体
PCT/JP2000/003686 WO2000076007A1 (en) 1999-06-08 2000-06-07 Sheet-shaped piezoelectric device, method for making same, and piezoelectric vibrator and piezoelectric sound generator using same

Publications (1)

Publication Number Publication Date
AU5245400A true AU5245400A (en) 2000-12-28

Family

ID=26486993

Family Applications (1)

Application Number Title Priority Date Filing Date
AU52454/00A Abandoned AU5245400A (en) 1999-06-08 2000-06-07 Sheet-shaped piezoelectric device, method for making same, and piezoelectric vibrator and piezoelectric sound generator using same

Country Status (3)

Country Link
JP (1) JP2001057449A (ja)
AU (1) AU5245400A (ja)
WO (1) WO2000076007A1 (ja)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7522018B2 (en) * 2002-12-13 2009-04-21 Nxp B.V. Electro-acoustic resonator with a top electrode layer thinner than a bottom electrode layer
JP4665155B2 (ja) * 2004-10-22 2011-04-06 株式会社昭和真空 薄膜形成装置及びその方法

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
MY104019A (en) * 1988-05-27 1993-10-30 Mitsui Chemicals Inc Ferroelectric ceramic material.
MY104020A (en) * 1988-05-27 1993-10-30 Mitsui Chemicals Inc Ferroelectric ceramic material.
US5814923A (en) * 1994-12-27 1998-09-29 Seiko Epson Corporation Piezoelectric thin-film device, process for producing the same, and ink jet recording head using said device
EP0736915A1 (en) * 1995-04-03 1996-10-09 Seiko Epson Corporation Piezoelectric thin film, method for producing the same, and ink jet recording head using the thin film

Also Published As

Publication number Publication date
WO2000076007A1 (en) 2000-12-14
JP2001057449A (ja) 2001-02-27

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase