AU507455B2 - Fluorescent Xray spectrometer - Google Patents

Fluorescent Xray spectrometer

Info

Publication number
AU507455B2
AU507455B2 AU19912/76A AU1991276A AU507455B2 AU 507455 B2 AU507455 B2 AU 507455B2 AU 19912/76 A AU19912/76 A AU 19912/76A AU 1991276 A AU1991276 A AU 1991276A AU 507455 B2 AU507455 B2 AU 507455B2
Authority
AU
Australia
Prior art keywords
xray
spectrometer
fluorescent
xray spectrometer
fluorescent xray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU19912/76A
Other languages
English (en)
Other versions
AU1991276A (en
Inventor
E Bruning
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of AU1991276A publication Critical patent/AU1991276A/en
Application granted granted Critical
Publication of AU507455B2 publication Critical patent/AU507455B2/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J47/00—Tubes for determining the presence, intensity, density or energy of radiation or particles
    • H01J47/02—Ionisation chambers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
AU19912/76A 1975-11-25 1976-11-23 Fluorescent Xray spectrometer Expired AU507455B2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NLNL7513716 1975-11-25
NL7513716A NL7513716A (nl) 1975-11-25 1975-11-25 Roentgenfluorescentie spectrometer.

Publications (2)

Publication Number Publication Date
AU1991276A AU1991276A (en) 1978-06-01
AU507455B2 true AU507455B2 (en) 1980-02-14

Family

ID=19824912

Family Applications (1)

Application Number Title Priority Date Filing Date
AU19912/76A Expired AU507455B2 (en) 1975-11-25 1976-11-23 Fluorescent Xray spectrometer

Country Status (7)

Country Link
US (1) US4131794A (oth)
JP (1) JPS5265490A (oth)
AU (1) AU507455B2 (oth)
DE (1) DE2651645A1 (oth)
FR (1) FR2333239A1 (oth)
GB (1) GB1570595A (oth)
NL (1) NL7513716A (oth)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2907948C2 (de) * 1979-03-01 1983-04-07 Siemens AG, 1000 Berlin und 8000 München Röntgendiffraktometer mit hoher zeitlicher Auflösung
DE2925593A1 (de) * 1979-06-25 1981-01-15 Siemens Ag Einrichtung fuer die roentgenfluoreszenzanalyse
DE3125803A1 (de) * 1981-06-30 1983-01-13 Siemens AG, 1000 Berlin und 8000 München Kristall-roentgen-sequenzspektrometer
NL8300419A (nl) * 1983-02-04 1984-09-03 Philips Nv Roentgen analyse apparaat.
FI67956C (fi) * 1983-09-22 1985-06-10 Mexpert Oy Pao roentgendiffraktion sig grundande foerfarande och anordning foer maetning av spaenningar
JPS6122240A (ja) * 1984-07-11 1986-01-30 Rigaku Denki Kk 微小部ｘ線分析装置
JPS6122241A (ja) * 1984-07-11 1986-01-30 Rigaku Denki Kk Ｘ線分析装置
US5007072A (en) * 1988-08-03 1991-04-09 Ion Track Instruments X-ray diffraction inspection system
US5742658A (en) * 1996-05-23 1998-04-21 Advanced Micro Devices, Inc. Apparatus and method for determining the elemental compositions and relative locations of particles on the surface of a semiconductor wafer
US5912940A (en) * 1996-06-10 1999-06-15 O'hara; David Combination wavelength and energy dispersive x-ray spectrometer
US6005915A (en) * 1997-11-07 1999-12-21 Advanced Micro Devices, Inc. Apparatus and method for measuring the roughness of a target material surface based upon the scattering of incident X-ray photons
FR2914424B1 (fr) * 2007-03-30 2012-07-27 Centre Nat Rech Scient Dispositif d'analyse d'un echantillon par rayons x comprenant un systeme analyseur par diffraction filtrant en energie et en angle.
US7593509B2 (en) * 2007-09-27 2009-09-22 Varian Medical Systems, Inc. Analytical x-ray tube for close coupled sample analysis
US8537967B2 (en) * 2009-09-10 2013-09-17 University Of Washington Short working distance spectrometer and associated devices, systems, and methods

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2842670A (en) * 1955-02-23 1958-07-08 Jr La Verne S Birks Flat crystal fluorescent X-ray spectrograph
US3321624A (en) * 1963-04-05 1967-05-23 Hitachi Ltd X-ray spectrometer apparatus having a detector located within the circumference of the rowland circle
US3354308A (en) * 1965-04-30 1967-11-21 Philips Electronic Pharma Apparatus with means to measure the characteristic X-ray emission from and the density of a material
US3663812A (en) * 1969-02-27 1972-05-16 Mc Donnell Douglas Corp X-ray spectrographic means having fixed analyzing and detecting means
US4031396A (en) * 1975-02-28 1977-06-21 General Electric Company X-ray detector

Also Published As

Publication number Publication date
FR2333239A1 (fr) 1977-06-24
FR2333239B1 (oth) 1981-12-18
US4131794A (en) 1978-12-26
AU1991276A (en) 1978-06-01
NL7513716A (nl) 1977-05-27
DE2651645A1 (de) 1977-06-02
JPS5265490A (en) 1977-05-30
GB1570595A (en) 1980-07-02

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