AU4999600A - Optical endpoint detection during chemical mechanical planarization - Google Patents
Optical endpoint detection during chemical mechanical planarizationInfo
- Publication number
- AU4999600A AU4999600A AU49996/00A AU4999600A AU4999600A AU 4999600 A AU4999600 A AU 4999600A AU 49996/00 A AU49996/00 A AU 49996/00A AU 4999600 A AU4999600 A AU 4999600A AU 4999600 A AU4999600 A AU 4999600A
- Authority
- AU
- Australia
- Prior art keywords
- chemical mechanical
- mechanical planarization
- endpoint detection
- during chemical
- detection during
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/005—Control means for lapping machines or devices
- B24B37/013—Devices or means for detecting lapping completion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/04—Lapping machines or devices; Accessories designed for working plane surfaces
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/20—Sequence of activities consisting of a plurality of measurements, corrections, marking or sorting steps
- H01L22/26—Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US30799599A | 1999-05-10 | 1999-05-10 | |
US09307995 | 1999-05-10 | ||
PCT/US2000/012776 WO2000067951A1 (en) | 1999-05-10 | 2000-05-10 | Optical endpoint detection during chemical mechanical planarization |
Publications (1)
Publication Number | Publication Date |
---|---|
AU4999600A true AU4999600A (en) | 2000-11-21 |
Family
ID=23192076
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU49996/00A Abandoned AU4999600A (en) | 1999-05-10 | 2000-05-10 | Optical endpoint detection during chemical mechanical planarization |
Country Status (2)
Country | Link |
---|---|
AU (1) | AU4999600A (en) |
WO (1) | WO2000067951A1 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6930782B1 (en) | 2003-03-28 | 2005-08-16 | Lam Research Corporation | End point detection with imaging matching in semiconductor processing |
JP7023063B2 (en) * | 2017-08-08 | 2022-02-21 | 株式会社荏原製作所 | Substrate polishing equipment and method |
US11951588B2 (en) * | 2020-10-06 | 2024-04-09 | Ebara Corporation | Optical film-thickness measuring apparatus and polishing apparatus |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3313505B2 (en) * | 1994-04-14 | 2002-08-12 | 株式会社日立製作所 | Polishing method |
US5872633A (en) * | 1996-07-26 | 1999-02-16 | Speedfam Corporation | Methods and apparatus for detecting removal of thin film layers during planarization |
-
2000
- 2000-05-10 AU AU49996/00A patent/AU4999600A/en not_active Abandoned
- 2000-05-10 WO PCT/US2000/012776 patent/WO2000067951A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2000067951A9 (en) | 2002-07-11 |
WO2000067951A1 (en) | 2000-11-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
AU5480700A (en) | Optical view port for chemical mechanical planarization endpoint detection | |
AU7735400A (en) | Method for chemical mechanical polishing | |
AU6801300A (en) | Rotationally stabilized contact lenses | |
AU3897600A (en) | Method and apparatus for endpoint detection for chemical mechanical polishing | |
AU1074801A (en) | Virtual endpoint | |
AU6007699A (en) | Showerhead | |
AU3072501A (en) | Hydrogen-based ecosystem | |
AU5776099A (en) | Mobile robotic snake | |
AU4309601A (en) | Chemical-mechanical polishing method | |
AU7840200A (en) | Recyclable retaining ring assembly for a chemical mechanical polishing apparatus | |
AU4050200A (en) | Ferrofluidic finishing | |
AU2730000A (en) | Optical sensor | |
AU5719300A (en) | Cleaning means | |
AU1784001A (en) | Abrasives for chemical mechanical polishing | |
SG90707A1 (en) | Chemical mechanical polish (cmp) endpoint detection by colorimetry | |
AU2001253379A1 (en) | Methods of endpoint detection for wafer planarization | |
AU4999600A (en) | Optical endpoint detection during chemical mechanical planarization | |
AU4034200A (en) | Optical endpoint detection system for rotational chemical mechanical polishing | |
AU6008000A (en) | Chemical compounds-ii | |
AUPQ319799A0 (en) | Chemical methods | |
AUPQ009199A0 (en) | Wetsuit | |
AU3709800A (en) | Contact lenses | |
AU6006000A (en) | Chemical compounds-iii | |
AU2002347876A1 (en) | Chemical mechanical polishing endpoint detection | |
AU7707000A (en) | Underwater maneuvering device |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase |