AU457241B2 - Photoresist compositions - Google Patents

Photoresist compositions

Info

Publication number
AU457241B2
AU457241B2 AU31332/71A AU3133271A AU457241B2 AU 457241 B2 AU457241 B2 AU 457241B2 AU 31332/71 A AU31332/71 A AU 31332/71A AU 3133271 A AU3133271 A AU 3133271A AU 457241 B2 AU457241 B2 AU 457241B2
Authority
AU
Australia
Prior art keywords
photoresist compositions
photoresist
compositions
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU31332/71A
Other languages
English (en)
Other versions
AU3133271A (en
Inventor
MARSHALL ERNST YOST and RICHARD ARTHUR NEWCOMB KENNETH ROYAL DUNHAM
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eastman Kodak Co
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Publication of AU3133271A publication Critical patent/AU3133271A/en
Application granted granted Critical
Publication of AU457241B2 publication Critical patent/AU457241B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/075—Silicon-containing compounds
    • G03F7/0751—Silicon-containing compounds used as adhesion-promoting additives or as means to improve adhesion
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
    • C08K5/00—Use of organic ingredients
    • C08K5/16—Nitrogen-containing compounds
    • C08K5/34—Heterocyclic compounds having nitrogen in the ring

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
AU31332/71A 1970-07-17 1971-07-16 Photoresist compositions Expired AU457241B2 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US5597470A 1970-07-17 1970-07-17
US5597370A 1970-07-17 1970-07-17
USUS55974,5 1970-07-17
US11112171A 1971-01-29 1971-01-29
USUS111,121 1971-01-29

Publications (2)

Publication Number Publication Date
AU3133271A AU3133271A (en) 1973-01-18
AU457241B2 true AU457241B2 (en) 1975-01-23

Family

ID=27368944

Family Applications (1)

Application Number Title Priority Date Filing Date
AU31332/71A Expired AU457241B2 (en) 1970-07-17 1971-07-16 Photoresist compositions

Country Status (4)

Country Link
AU (1) AU457241B2 (fr)
BE (1) BE769898A (fr)
FR (1) FR2101626A5 (fr)
GB (1) GB1360217A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4950583A (en) * 1986-09-17 1990-08-21 Brewer Science Inc. Adhesion promoting product and process for treating an integrated circuit substrate therewith

Also Published As

Publication number Publication date
DE2135482B2 (de) 1973-09-13
GB1360217A (en) 1974-07-17
BE769898A (fr) 1971-11-16
DE2135482A1 (de) 1972-01-20
AU3133271A (en) 1973-01-18
FR2101626A5 (fr) 1972-03-31

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