AU4142600A - Production method for micro-machine - Google Patents

Production method for micro-machine

Info

Publication number
AU4142600A
AU4142600A AU41426/00A AU4142600A AU4142600A AU 4142600 A AU4142600 A AU 4142600A AU 41426/00 A AU41426/00 A AU 41426/00A AU 4142600 A AU4142600 A AU 4142600A AU 4142600 A AU4142600 A AU 4142600A
Authority
AU
Australia
Prior art keywords
micro
machine
production method
production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU41426/00A
Inventor
Masayoshi Esashi
Takao Murakoshi
Shigeru Nakamura
Nobuo Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokimec Inc
Ball Semiconductor Inc
Original Assignee
Tokimec Inc
Ball Semiconductor Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokimec Inc, Ball Semiconductor Inc filed Critical Tokimec Inc
Publication of AU4142600A publication Critical patent/AU4142600A/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/10—Details of semiconductor or other solid state devices to be connected
    • H01L2924/1015—Shape
    • H01L2924/1017—Shape being a sphere

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Micromachines (AREA)
AU41426/00A 1999-04-27 2000-04-27 Production method for micro-machine Abandoned AU4142600A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11/120260 1999-04-27
JP12026099 1999-04-27
PCT/JP2000/002739 WO2000065659A1 (en) 1999-04-27 2000-04-27 Production method for micro-machine

Publications (1)

Publication Number Publication Date
AU4142600A true AU4142600A (en) 2000-11-10

Family

ID=14781812

Family Applications (1)

Application Number Title Priority Date Filing Date
AU41426/00A Abandoned AU4142600A (en) 1999-04-27 2000-04-27 Production method for micro-machine

Country Status (3)

Country Link
AU (1) AU4142600A (en)
CA (1) CA2371669A1 (en)
WO (1) WO2000065659A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9572592B2 (en) 2012-05-31 2017-02-21 Ethicon Endo-Surgery, Llc Surgical instrument with orientation sensing

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3446244B2 (en) * 1993-05-20 2003-09-16 ソニー株式会社 Manufacturing method of micromachine
JPH09288124A (en) * 1996-04-22 1997-11-04 Shimadzu Corp Acceleration detection apparatus
JPH1096741A (en) * 1996-09-24 1998-04-14 Ikyo Kk Motion state detecting device
JPH10154820A (en) * 1996-11-25 1998-06-09 Murata Mfg Co Ltd Manufacture of vibrating element
US5955776A (en) * 1996-12-04 1999-09-21 Ball Semiconductor, Inc. Spherical shaped semiconductor integrated circuit
JP3537631B2 (en) * 1997-05-09 2004-06-14 日本電信電話株式会社 Micro-mechanical device and manufacturing method thereof

Also Published As

Publication number Publication date
WO2000065659A1 (en) 2000-11-02
CA2371669A1 (en) 2000-11-02

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase