AU2021102252A4 - A calibration method and device for the responsivity parameters of an array terahertz detector - Google Patents
A calibration method and device for the responsivity parameters of an array terahertz detector Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J1/00—Photometry, e.g. photographic exposure meter
- G01J1/02—Details
- G01J1/08—Arrangements of light sources specially adapted for photometry standard sources, also using luminescent or radioactive material
- G01J2001/083—Testing response of detector
Abstract
of Descriptions
The invention provides a calibration method and device for the responsivity
parameters of an array terahertz detector. The device of the present invention includes at
least five parts: a terahertz transmitting module, a terahertz receiving module, a
two-dimensional translation device, an optical lens group, a data acquisition processing
and a display module. The calibration method and device for the responsivity parameters
of an array terahertz detector of the present invention uses the calibration method of
standard single-pixel detector comparison, which can realize precise calibration of the
array terahertz detector and reduce the uncertainty of the value transmission. By adding
a surveillance detector in the wave path, the influence of the stability of the wave source
on the transmission result is eliminated, and the calibration result is more accurate. The
method and device for calibrating the responsivity parameters of the array terahertz
detector of the present invention uses a standard single-pixel detector comparison
calibration method, which can realize precise calibration of the array terahertz detector
and reduce the uncertainty of the value transmission. By adding a surveillance detector in
the wave path, the influence of the stability of the wave source on the transmission result
is eliminated, and the calibration result is more accurate.
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Figure 2
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Description
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Figure 2
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Descriptions
A calibration method and device for the responsivity parameters of an array terahertz detector
Technical Field The invention belongs to the technical field of test and measurement, and relates to a calibration method and device for the responsivity parameters of an array terahertz detector.
Background Technology Terahertz (THz, 1THz=Hz) radiation generally refers to the wavelength in the range of 30jm-3mm, and the frequency of electromagnetic radiation in the range of 0.1-1THz. It is a kind of wave between millimeter wave and infrared light in the electromagnetic radiation area. Terahertz, which combines the characteristics of the two disciplines of photonics and electronics, is not only in the fields of physics, chemistry, and biology, but also has extremely important application value and very huge potential applications in the fields of materials, astronomy, medicine, etc. For a long time, terahertz has lacked effective production and detection methods. Therefore, compared with traditional microwave technology and optical technology, people are relatively less aware of the nature of electromagnetic radiation in the terahertz band, which has led to a blank in the electromagnetic spectrum in the terahertz band. Therefore, one of the main reasons that limit the development and wide application of terahertz technology is the lack of effective measurement methods and measuring instruments. It is difficult to trace the value of terahertz measuring instruments, and the accuracy and validity of the measurement are difficult to evaluate. The responsivity parameter is a physical quantity that describes the photoelectric conversion capability of a device, and it is also a very important index that determines the performance of the array terahertz detector. In recent years, the calibration of terahertz detectors has attracted international attention. In 2009, Steiger and his colleagues at PTB carried out traceable measurements of terahertz radiation measurements on cryogenic radiometers, and then they combined terahertz radiation measurement dates back to the International System of Units (SI). Internationally, the traceability of the terahertz radiance at 2.5THz has been achieved for the first time, but the absorption rate of the cryoradiometer radiation absorption cavity in the terahertz band cannot be accurately evaluated. Therefore, only a combined uncertainty of 7.3% (including the factor k=1) is given. In 2011, John Lehman of the American Institute of Standards and Technology found that as the length of carbon nanotubes increases, the reflectivity decreases. The vertical growth of carbon nanotube arrays with a height of 1.5 mm achieves an absorption rate of 99% at a frequency of 0.76 THz. However, in the terahertz band, they only gave a measurement result at a frequency of 0.76THz. In 2013, Deng Yuqiang of the Chinese Academy of Metrology and others developed a hybrid coating. It has high absorptivity in a wide range of terahertz bands and is easy to prepare. A standard detector made of this coating as an absorbing material is beneficial to trace terahertz radiation back to SI. At present, the measurement of terahertz detectors has limitations, and the measurement of terahertz detectors mostly uses standard light source calibration methods. Because of the high uncertainty of the light source itself, and it is easy to introduce some uncertainty factors that cannot be accurately measured during the calibration process. Therefore, in order to further improve the calibration accuracy, it is necessary to provide a calibration method and device for the responsivity parameters of an array terahertz detector using the standard single-pixel detector contrast calibration method.
Invention Summary In view of the deficiencies of the background technology, the purpose of the present invention is to provide a calibration method and device for the responsivity parameters of an array terahertz detector, which can achieve precise calibration of the array terahertz detector and reduce the uncertainty of the value transmission. To achieve the above objective, the present invention provides a calibration method and device for the responsivity parameters of an array terahertz detector. A calibration device for the responsivity parameters of an array terahertz detector includes at least five parts: a terahertz transmitting module, a terahertz receiving module, a two-dimensional translation device, an optical lens group, a data acquisition processing and a display module. The terahertz transmitting module includes at least a single-frequency terahertz source and a driving power source, and the single-frequency terahertz source is connected to the driving power source, and it is used to drive the single-frequency terahertz source under the driving power source. Single-frequency terahertz waves are radiated. The terahertz receiving module includes at least a standard single-pixel detector, an array detector to be tested and a surveillance detector. The standard single-pixel detector is manufactured by using the SiC particle hybrid coating with broadband and high absorptivity in the terahertz band independently developed by the Chinese Academy of Metrology as an absorbing material, which is used as a measurement standard to realize the value traceability. The surveillance detector performs simultaneous measurement with the standard single-pixel detector and the array detector to be tested respectively, so as to eliminate the influence of the stability of the terahertz wave source on the transmission result. The two-dimensional translation device at least includes a precision translation stage and a plurality of clamps, and the precision translation stage and the clamps are used to clamp the standard single-pixel detector and the array detector to be tested. The computer controls the standard single-pixel detector and the array detector to be tested to switch, so that the two detectors are moved into the wave path respectively. The optical lens group includes at least a set of parabolic mirrors, a beam splitter and a rectangular aperture. The parabolic mirror is placed on one side of the single-frequency terahertz source, and is used to transform the divergent terahertz light into parallel light. Another piece of the parabolic reflector is placed behind the beam splitter for converging parallel terahertz light. The rectangular aperture is used to pass light and make the single-frequency terahertz wave form a rectangular light spot. The data acquisition processing and display module includes at least a measurement signal amplifying circuit and an oscilloscope, and the measurement signal amplifying circuit is used to amplify the voltage value output by the detector. The oscilloscope is respectively connected with the driving power supply, the standard single-pixel detector, the array detector to be tested and the surveillance detector, which is used for displaying and reading signals. Optionally, the precision translation stage is a precision electronically controlled translation stage, and computer software can be used to control the displacement of the translation stage. Optionally, the parabolic mirror is a combination of a set of off-axis parabolic mirrors, which includes at least two off-axis parabolic mirrors. Optionally, the oscilloscope is a digital oscilloscope and includes at least four measurable channels. The present invention also provides a calibration method and device for the responsivity parameters of an array terahertz detector using the above device, which at least includes the following steps: Si: Turn on the driving power supply to make its output voltage reach a stable value, and connect it to the single-frequency terahertz source. After the radiated single-frequency terahertz wave is converted into parallel light by the parabolic mirror, the beam is split by the beam splitter, part of the wave path is converged by the parabolic mirror to enter the surveillance detector, and part of the wave path is irradiated on the receiving surface of the translation stage through the rectangular aperture. The standard single-pixel detector and the array detector to be tested are clamped on the precision translation stage, and the switching of the detector on the precision translation stage is controlled by a computer, so that the two detectors can be moved into the wave path separately. S2: Calibrate the standard single-pixel detector with a helium-neon laser at a certain frequency point f to obtain the responsivity RTHz of the standard single-pixel detector. The standard single-pixel detector is moved into the wave path. After the standard single-pixel detector and the surveillance detector pass through the amplifying circuit, signal collection is performed at the same time. When the signal is collected, the electrical signal of the standard single-pixel detector is UO. At this time, when the signal is collected, the electrical signal of the surveillance detector is UMO. S3: Obtain the output voltage Uij of each unit of the light spot by the right-angle knife edge method. At the same time, the electrical signal Uij of the surveillance detector when the output voltage of each unit is obtained, the corresponding input power Pij of each unit of the light spot is:
U. UMij R. = - i RrHz UMO
By fitting the input power of each unit, the power distribution of the rectangular spot can be obtained. S4: Move the array detector to be tested into the wave path, and the array detector to be tested and the surveillance detector perform signal acquisition at the same time after passing through the amplifying circuit. If the size of the array detector to be tested is X X Y , the electrical signal obtained when each pixel of the detector to be tested performs signal collection is Uxy, and the power level corresponding to the pixel on the rectangular spot is Pxy. At this time, the electrical signal when the surveillance detector performs signal collection is UMxy, and the responsivity Rxy of each pixel of the array detector to be tested is: Uxy . UMxy xy UMO Through the responsivity of each pixel, the average responsivity R of the array detector to be tested can be obtained:
R= -R (m,n) X*•ym=1 n=1 The calibration of the responsivity is completed and the uncertainty evaluation is performed. As mentioned above, due to the high uncertainty of the traditional standard light source calibration method itself, it is easy to introduce some errors such as uncertainty factors that cannot be accurately measured during the calibration process. The method and device for calibrating the responsivity parameters of the array terahertz detector of the present invention uses the calibration method of standard single-pixel detector contrast, which can realize precise calibration of the array terahertz detector and reduce the uncertainty of the value transmission. In addition, the position of the standard single-pixel detector should be determined to ensure that the beam spot at the same position is received and the center of the wave path is on the same horizontal line. After preheating and other processing, the signal is collected, the signal of the designated frequency band is measured, and the average value is collected multiple times to eliminate random errors in the measurement. Then, move the array detector to be tested into the wave path, and also collect the signal on the designated frequency band. The main factors that affect the responsivity test of array detectors include wave source power stability, interference between pixels, detector positioning, random errors and system noise. By adding a surveillance detector to the wave path, the influence of the stability of the wave source on the transmission result can be eliminated, and the calibration result can be more accurate.
Brief Description of Drawings Figure 1 is a flow chart of the calibration method and device for the responsivity parameters of an array terahertz detector of the present invention. Figure 2 is a schematic diagram of structure and light path of the calibration method and device for the responsivity parameters of an array terahertz detector of the present invention. Figure 3 is a schematic diagram of the standard single-pixel detector mounted on a two-dimensional translation device and the array detector to be tested 8. Component label description 1 Terahertz transmitter module 2 Parabolic mirror 3 Parabolic mirror 4 Beam splitter 5 Rectangular aperture 6 Surveillance detector 7 Standard single-pixel detector 8 Array detector to be tested 9 Two-dimensional translation device
Detailed Description of the Presently Preferred Embodiments The present invention will be further explained below in conjunction with the drawings. As shown in Figure 1, the calibration device for the responsivity parameters of an array terahertz detector includes five parts: a terahertz transmitting module, a terahertz receiving module, a two-dimensional translation device, an optical lens group, a data acquisition processing and a display module. Referring to Figure 2, the terahertz transmitter module 1 at least includes: a driving power supply, a single-frequency terahertz source; turn on the driving power, connect the driving power to the oscilloscope, and observe whether the voltage value displayed in the oscilloscope is stable after the driving power is warmed up. After stabilization, connect the driving power supply to a single-frequency terahertz source to radiate single-frequency terahertz light with a frequency of f and the single-frequency terahertz light with a frequency off enters the optical lens group, which includes at least two parabolic mirrors 2, 3 and beam splitter 4, rectangular aperture 5. After the single-frequency terahertz light with frequencyfis converted into parallel light by the parabolic mirror 2, it is split by the beam splitter 4 and enters the terahertz receiving module. The terahertz receiving module includes at least a surveillance detector 6, a standard single-pixel detector 7 and array detector to be tested 8. Calibrate the standard single-pixel detector 7 with a helium-neon laser at the frequency point f to obtain the responsivity RTHz of the standard detector. After the single-frequency terahertz light with frequency f is split by the beam splitter, a part of it passes through the rectangular aperture 5 and then enters the two--dimensional translation device 9, and a part of the single-frequency terahertz light passes through the parabolic mirror 3 and enters the surveillance detector. The standard single-pixel detector 7 and the array detector to be tested 8 are clamped by the fixture in the two--dimensional translation device 9. The two--dimensional translation device 9 at least includes an electronically controlled precision translation stage and a fixture, and the switching of the detector on the two--dimensional translation device 9 is controlled by a computer, see Figure 3. Optionally, the fixture for holding the standard single-pixel detector 7 and the array detector to be tested 8 can be fixed on the same vertical line of the translation table, and the vertical distance between the two fixtures is H. The vertical distance between the standard single-pixel detector 7 and the fixture is hi, and the vertical distance between the array detector to be tested 8 and the fixture is h2. The displacement of the electronically controlled precision translation stage is controlled by software to adjust the movement of the standard single-pixel detector 7, and the standard single-pixel detector 7 is connected with an oscilloscope. When the voltage value displayed in the oscilloscope reaches the peak value and is stable, it can be considered that the standard single-pixel detector 7 has moved into the terahertz optical wave path. At this time, the voltage value UTHz is recorded, and the energy distribution of the rectangular spot is obtained by the right-angle knife-edge method. The array detector to be tested 8 on the electronically controlled precision translation stage is controlled by software to move in the vertical direction (H+h1 -h 2), the array detector to be tested 8 is moved into the terahertz wave path, and the oscilloscope is sequentially connected to each pixel of the the array detector to be tested 8. After confirming that the voltage value displayed in the oscilloscope is stable, record the voltage value Uxy. After the single-frequency terahertz light with frequencyfis split by the beam splitter, the other part enters the surveillance detector, and the surveillance detector 6 is connected with an oscilloscope. The angle direction and displacement of the surveillance detector 6 is adjusted to make the voltage value displayed in the oscilloscope reach the peak value and be stable. When the electronically controlled precision translation stage adjusts the standard single-pixel detector 7 to enter the wave path, the voltage value of the surveillance detector 6 at this time is recorded as Umij. The output voltage Uij of each unit of the light spot is obtained by the right-angle knife-edge method, and the corresponding input power Pij of each unit of the light spot is:
P. U.ij UMij iHz UMO When the electronically controlled precision translation stage adjusts the array detector to be tested 8 to enter the wave path, the electrical signal obtained when each pixel of the detector to be tested performs signal collection is Uxy, and the corresponding power of the pixel on the rectangular spot is Pxy. At this time, the voltage value of the surveillance detector 6 is Uxy. The main factors affecting the responsivity test of the detector include the stability of the wave source power and the uniformity of the beam spot. By adding a monitoring detector to the wave path, the influence of the stability of the wave source on the transmission result can be eliminated, and the calibration result can be more accurate. The above values are substituted into the calculation formula
Uxy_ . UMxy xy MO
Through the responsivity of each pixel, the average responsivityR of the array detector to be tested can be obtained:
R = R (m,n) X' Y m=1 n=1 The calibration of the responsivity is completed and the uncertainty evaluation is performed. As mentioned above, because the traditional standard light source calibration method itself has high uncertainty, and it is easy to introduce some uncertain factors and other errors that cannot be accurately measured during the calibration process, the calibration method and device for the responsivity parameters of an array terahertz detector of the invention adopts the invention adopts the contrast calibration method of the standard single-pixel detector, which can realize the precise calibration of the array terahertz detector, so as to reduce the uncertainty of value transmission. As the terahertz technology has shown great potential in testing biological tissues, testing the composition of drugs, testing food safety, preventing major diseases, monitoring environmental quality, safety inspections, military exploration and astronomy, the present invention has certain industrial use value.
Claims (6)
1. A calibration method and device for the responsivity parameters of an array terahertz detector includes at least a terahertz transmitting module, a terahertz receiving module, a two-dimensional translation device, an optical lens group, a data acquisition processing and a display module, which is characterized in that: The terahertz transmitting module includes at least a single-frequency terahertz source and a driving power source, and the single-frequency terahertz source is connected to the driving power source. The single-frequency terahertz source radiates a single-frequency terahertz wave driven by the driving power source. The terahertz receiving module includes at least a standard single-pixel detector, an array detector to be tested and a surveillance detector. The standard single-pixel detector is used for the measurement standard to realize the value traceability, and the surveillance detector is used for eliminating the influence of the stability of the terahertz wave source on the transmission result. The two-dimensional translation device at least includes a precision translation stage and a plurality of clamps, and the precision translation stage and the clamps are used to clamp the standard single-pixel detector and the array detector to be tested. The computer controls the standard single-pixel detector and the array detector to be tested to switch, so that the two detectors are moved into the wave path respectively. The optical lens group includes at least a set of parabolic mirrors, a beam splitter and a rectangular aperture. The parabolic mirror is placed on one side of the single-frequency terahertz source, and is used to transform the divergent terahertz light into parallel light. Another piece of the parabolic reflector is placed behind the beam splitter for converging parallel terahertz light. The rectangular aperture is used to pass light and make the single-frequency terahertz wave form a rectangular light spot. The data acquisition processing and display module includes at least a measurement signal amplifying circuit and an oscilloscope, and the measurement signal amplifying circuit is used to amplify the voltage value output by the detector. The oscilloscope is respectively connected with the driving power supply, the standard single-pixel detector, the array detector to be tested and the surveillance detector, which is used for displaying and reading signals.
2. The calibration method and device for the responsivity parameters of an array terahertz detector according to Claim 1, which is characterized in that the surveillance detector needs to be separately connected to the standard single-pixel detector and the array to be tested. The detector performs measurements at the same time.
3. The calibration method and device for the responsivity parameters of an array terahertz detector according to Claim 1, which is characterized in that the parabolic reflector is an off-axis parabolic reflector.
4. A method for calibrating the responsivity parameters of an array terahertz detector uses the device as claimed in Claim 1, which is characterized in that it comprises at least the following steps, Si: Turn on the driving power supply to make its output voltage reach a stable value, and connect it to the single-frequency terahertz source. After the radiated single-frequency terahertz wave is converted into parallel light by the parabolic mirror, the beam is split by the beam splitter, part of the wave path is converged by the parabolic mirror to enter the surveillance detector, and part of the wave path is incident on the receiving surface of the precision translation stage through the rectangular aperture. The standard single-pixel detector and the array detector to be tested are clamped on the precision translation stage by a clamp, and the switching of the detector on the precision translation stage is controlled by a computer, so that the two detectors can be moved into the wave path separately. S2: Calibrate the standard single-pixel detector with a helium-neon laser at a certain frequency point f to obtain the responsivity RTHz of the standard single-pixel detector. The standard single-pixel detector is moved into the wave path. After the standard single-pixel detector and the surveillance detector pass through the amplifying circuit, signal collection is performed at the same time. When the signal is collected, the electrical signal of the standard single-pixel detector is Uo. At this time, when the signal is collected, the electrical signal of the surveillance detector is UMO. S3: Obtain the output voltage Ujj of each unit of the light spot by the right-angle knife edge method. At the same time, the electrical signal UMij of the surveillance detector when the output voltage of each unit is obtained, the corresponding input power Pij of each unit of the light spot is: U. Um. RrHz UMO By fitting the input power of each unit, the power distribution of the rectangular spot can be obtained.
S4: Move the array detector to be tested into the wave path, and the array detector to be tested and the surveillance detector perform signal acquisition at the same time after passing through the amplifying circuit. If the size of the array detector to be tested is X X Y , the electrical signal obtained when each pixel of the detector to be tested performs signal collection is Uxy, and the power level corresponding to the pixel on the rectangular spot is Pxy. At this time, the electrical signal when the surveillance detector performs signal collection is UMxy, and the responsivity Rxy of each pixel of the array detector to be tested is:
_U yU Y P U xy MO Through the responsivity of each pixel, the average responsivity Rof the array detector to be tested can be obtained:
R= -YZR(m,n) X*•ym=1 n=1 The calibration of the responsivity is completed and the uncertainty evaluation is performed.
5. The method according to Claim 4 is characterized in that: the positions of the standard single-pixel detector and the array detector to be tested should be determined to ensure that the spot at the same position is received and the center of the detector is on the same horizontal line.
6. The method according to Claim 4 is characterized in that: signal acquisition should be performed after the preheating treatment and after the output is stable, the output signal of the designated detector is measured, and the average value is collected multiple times to eliminate random errors in the measurement.
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