AU2019101075A4 - A calibration method and device for responsivity parameters of a single-pixel field effect self-mixing terahertz detector - Google Patents

A calibration method and device for responsivity parameters of a single-pixel field effect self-mixing terahertz detector Download PDF

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AU2019101075A4
AU2019101075A4 AU2019101075A AU2019101075A AU2019101075A4 AU 2019101075 A4 AU2019101075 A4 AU 2019101075A4 AU 2019101075 A AU2019101075 A AU 2019101075A AU 2019101075 A AU2019101075 A AU 2019101075A AU 2019101075 A4 AU2019101075 A4 AU 2019101075A4
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detector
terahertz
standard
tested
frequency
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AU2019101075A
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Jinhui CAI
Bo FANG
Yanjiao GAO
Minrong XIA
Le ZHANG
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Hangzhou Dahua Apparatus Manutacture Co Ltd
China Jiliang University
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Hangzhou Dahua Apparatus Manutacture Co Ltd
China Jiliang University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4228Photometry, e.g. photographic exposure meter using electric radiation detectors arrangements with two or more detectors, e.g. for sensitivity compensation
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/02Details
    • G01J1/0295Constructional arrangements for removing other types of optical noise or for performing calibration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00Photometry, e.g. photographic exposure meter
    • G01J1/42Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/44Electric circuits

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Abstract The invention provides a calibration method and device for responsivity parameters of a single-pixel field effect self-mixing terahertz detector. The said device of the invention at least comprises six parts, namely a terahertz source module, a detector module, a translation table and fixture device, an optical lens group, a data acquisition processing module, a display module and the like. As the traditional standard light source calibration method has high uncertainty, and errors such as uncertainty factors which cannot be accurately measured are easily introduced in the calibration process, the calibration method and the device for the responsivity parameter of the single-pixel field effect self-mixing terahertz detector can realize precise calibration on the single-pixel terahertz detector by using the calibration method compared with the standard detector, and reduce the uncertainty of value transmission. By adding a monitoring detector to the wave path, the influence of the wave source stability on the transmission result is eliminated, and the calibration result is more accurate. With the increasingly wide application of terahertz detector devices in many fields such as high-speed broadband communication, functional material development, biomedical imaging, airport and port security check, illegal cooking oil detection, hazardous chemical monitoring and early warning, the terahertz detector device has certain industry utilization value. Opticalltens Translation table Standard and fixture device Terahertz detector source module Detector to be tested Surveillance detector Data Interface Intefaceacquisition display module 4 acsin and processing module Figure 1 -----, L . _ Figure 2

Description

A CALIBRATION METHOD AND DEVICE FOR RESPONSIVITY PARAMETERS OF A SINGLE-PIXEL FIELD EFFECT SELFMIXING TERAHERTZ DETECTOR
Field of the Invention
The invention belongs to the technical field of testing and metering, and relates to a calibration method and a calibration device for response parameters of a single-pixel field effect self-mixing terahertz detector.
Background of the Invention
Terahertz, which lies between infrared and microwave frequency bands, is a bridge connecting electronics and photonics, and has important application value and potential in many fields such as information science, material science, biochemistry, etc. In recent years, it has been widely used in many fields such as high-speed broadband communication, functional material development, biomedical imaging, airport and port security check, illegal cooking oil detection, hazardous chemicals monitoring and early warning, etc. The high-speed and high-sensitivity performance of room temperature, high-speed and high-sensitivity single-pixel field effect selfmixing terahertz detectors have been experimentally verified in the fast terahertz imager of the 50th Institute of China Electronic Technology Group Corporation and the terahertz communication demonstration system of Chengdu Electronic Technology University. Its comprehensive index is superior to commercial terahertz detectors such as pyroelectricity and Golay. However, due to the lack of effective measuring methods and instruments, it is difficult to trace the measurement values of terahertz measuring instruments, and it is difficult to evaluate the measurement
2019101075 18 Sep 2019 accuracy and effectiveness, which limits the development and wide application of terahertz technology.
The responsivity parameter is a physical quantity that describes the photoelectric conversion capability of the device, and is also a very important index that determines the performance of a single-pixel terahertz detector. In recent years, the calibration of terahertz detectors has attracted international attention. In 2009, Andreas Steiger of PhysikalischTechnische Bundesanstalt (PTB) and others traced the terahertz radiation value to the spectral radiation cryogenic radiometer, which is the first time in the world to trace the terahertz radiation value at 2.5THz frequency. However, the cavity absorptivity of the radiation absorption cavity of cryogenic radiometer in terahertz band cannot be accurately evaluated, so only 7.3% of the combined uncertainty (including factor k=l) is given. In 2011, John Lehman of the National Institute of Standards and Technology (NIST) and others realized 99% absorptivity at 0.76THz frequency using a 1.5mm high vertically grown carbon nanotube array. However, in terahertz band, they only give the measurement results at 0.76THz frequency. In addition, the preparation process of carbon nanotubes is complicated and easy to carbonize, which limits the application of this material. In 2013, the National Institute of Metrology (NIM) developed a hybrid coating, which has high absorption rate in the wide terahertz band and is easy to prepare. The standard detector made of this coating as an absorption material is conducive to tracing the terahertz radiation value to international units.
At present, the measurement of terahertz detectors has limitations. The measurement of terahertz detectors mostly adopts standard light source calibration method, which has high uncertainty and is easy to
2019101075 18 Sep 2019 introduce some uncertainty factors that cannot be accurately measured in the calibration process. Therefore, in order to further improve the calibration accuracy, it is necessary to provide a calibration method and device for responsivity parameters of single-pixel field effect self-mixing terahertz detectors using standard detector comparison calibration method. Description of the Invention
Aiming at the shortage of the background technology, the invention aims to provide a calibration method and a calibration device for response parameters of a single-pixel field effect self-mixing terahertz detector, which can realize precise calibration on the single-pixel field effect selfmixing terahertz detector and reduce the uncertainty of value transfer.
In order to achieve the above purpose, the present invention provides a calibration method and device for responsivity parameters of a singlepixel field effect self-mixing terahertz detector:
The invention at least comprises six parts, namely a terahertz source module, a detector module, a translation table and a fixture device, an optical lens group, a data acquisition processing module, a display module and the like.
The said terahertz source module at least comprises a singlefrequency terahertz source, a frequency multiplier and a driving power supply, and the said single-frequency terahertz source is connected with the said driving power supply and is used for radiating single-frequency terahertz light from the said single-frequency terahertz source under the driving of the said driving power supply. The said frequency multiplier is used for changing the signal frequency of a single-frequency terahertz source by an integer multiple.
2019101075 18 Sep 2019
The said detector module at least comprises a standard detector, a detector to be tested and a surveillance detector, wherein the said standard detector is manufactured by taking SiC particle mixed coating with broadband absorption and high absorptivity in terahertz wave band independently developed by China Institute of Metrology as an absorption material, and is used as a measurement standard to realize quantity traceability. The said surveillance detector performs simultaneous measurement with the said standard detector and the detector to be tested, respectively, to eliminate the influence of terahertz wave source stability on transmission results.
The said translation table and fixture device at least comprises a precision translation table and a fixture, wherein the said precision translation table and the fixture are used for clamping the said standard detector and the said detector to be tested, and the said standard detector and the said detector to be tested are controlled by a computer to perform displacement switching, so that the two detectors move into wave paths respectively.
The said optics and lens group at least comprises a group of polyethylene optical mirrors and a beam splitter, and the said polyethylene optical mirrors are arranged on one side of the said single-frequency terahertz source and are used for converging terahertz light.The said beam splitter is used for splitting single-frequency terahertz light, one beam path enters a surveillance detector , the other beam path irradiates a translation table, the displacement table is controlled to switch by a computer, and the wave paths enter a standard detector and a detector to be tested respectively.
The said data acquisition and processing module at least comprises a measurement signal amplification circuit and an oscilloscope, wherein the
2019101075 18 Sep 2019 said measurement signal amplification circuit is used for amplifying a voltage value output by a detector; the said oscilloscope is respectively connected with the said driving power supply, the said standard detector, the said detector to be tested and the said surveillance detector for displaying and reading signals.
Optionally, the said precision translation stage is a precision electronic control translation stage, and the displacement of the translation stage can be controlled by computer SC 300 software.
Optionally, the said polyethylene optical mirror is a combination of a group of polyethylene lenses, including at least two polyethylene lenses.
Optionally, the said oscilloscope is a digital oscilloscope and includes at least three measurable channels.
The invention also provides a calibration method for the response parameter of the single-pixel terahertz detector by adopting the device, which at least comprises the following steps:
S1: Turn on the said drive power supply to stabilize its output voltage at 9.5 V, connect it with the said single-frequency terahertz source, after the radiated single-frequency terahertz light is converged by the said polyethylene optical mirror, split the beam through the said beam splitter, and part of the wave path enters the said surveillance detector. A part of the light is irradiated on the receiving surface of the said translation stage, the said standard detector and the said detector to be tested are clamped on the said translation stage, and the displacement switching of the detectors on the said translation stage is controlled by a computer, so that the two detectors can move into wave paths respectively;
S2: The said standard detector is calibrated by a He-Ne laser at a certain
2019101075 18 Sep 2019 frequency point f to obtain the responsivity /?Tiiz of the standard detector. Move the said standard detector into the wave path, and perform signal acquisition on the standard detector and the surveillance detector simultaneously after passing through the test signal amplification circuit. The electrical signal when the standard detector performs signal acquisition is CTh· At this time, the electrical signal when the surveillance detector performs signal acquisition is Umthz·
S3: Moving the said detector to be tested into a wave path, performing signal acquisition on the detector to be tested and the surveillance detector simultaneously after passing through a test signal amplification circuit, and obtaining that the electric signal when the detector to be tested performs signal acquisition is Cft.At this time, when the electric signal of the surveillance detector during signal acquisition is Cmx, the responsivity /?x of the detector to be tested is
C/x
Rx = . R THz
U THz
U MTHz
Complete the calibration of responsiveness.
As said above, since the traditional standard light source calibration method has high uncertainty, and errors such as uncertainty factors which cannot be accurately measured are easily introduced in the calibration process, the calibration method and the device for the responsivity parameter of the single-pixel field effect self-mixing terahertz detector of the invention can realize precise calibration on the single-pixel terahertz
2019101075 18 Sep 2019 detector by using the calibration method compared with the standard detector, and reduce the uncertainty of value transmission. In addition, the position of the standard detector should be determined to ensure that the beam spot at the same position is received and the wave path center is at the same horizontal line. After pre-heating and other processing, signal acquisition is carried out, signals in designated frequency bands are measured, and average values are acquired for many times to eliminate random errors in measurement. Then the detector to be measured is moved into the wave path, and signals are also collected on the designated frequency band. The main factors that affect the detector responsivity test include wave source power stability, beam spot uniformity, detector positioning, random error and system noise, etc. By adding a surveillance detector to the wave path, the influence of the wave source stability on the transmission result can be eliminated, and the calibration result is more accurate.
Brief Introduction of the Drawings
Fig. 1 is a flowchart of a calibration method and a device calibration method for responsivity parameters of a single-pixel field effect selfmixing terahertz detector according to the present invention.
Fig. 2 is a schematic diagram of the structure and optical path of the calibration method and device for responsivity parameters of the singlepixel field effect self-mixing terahertz detector of the present invention.
Fig. 3 is a mechanical diagram of the translation table and fixture device clamping the standard detector and detector to be tested.
Description of designator
Terahertz source module
2019101075 18 Sep 2019
Driving power supply
Single-frequency terahertz source
Frequency multiplier
Detector module
Standard detector
Detector to be tested
Surveillance Detector
Translation table and fixture device
Optical Lens Group
Computer
Oscilloscope
Detailed Description of the Preferred Embodiments
The present invention will be further described below with reference to the accompanying drawings.
As shown in Fig. 1, the calibration method and device for the responsivity parameter of the single-pixel field effect self-mixing terahertz detector comprise a terahertz source module, a detector module, a translation table and fixture device, an optical lens group, a data acquisition processing module and a display module. Referring to Fig. 2, the terahertz source module 1 at least includes a driving power supply 11, a singlefrequency terahertz source 12, and a frequency multiplier 13. Turning on the driving power supply 11, connecting the driving power supply 11 to the oscilloscope, observing whether the voltage value displayed in the oscilloscope is stable at 9.5 V after the driving power supply 11 is preheated,
2019101075 18 Sep 2019 connecting the driving power supply 11 to the single-frequency terahertz source 12 and connecting the single-frequency terahertz source 12 to the frequency multiplier 13 after the voltage value is stable, radiating singlefrequency terahertz light with frequency f, and allowing the singlefrequency terahertz light with frequency /to enter the optics and lens group 4, wherein the optics and lens group 4 at least comprises more than two polyethylene optical lenses and beam splitters; The single-frequency terahertz light with frequency f is converged by the said polyethylene optical mirror and then split into a detector module 2 through the said beam splitter, wherein the detector module 2 at least comprises a standard detector 21, a detector to be tested 22 and a surveillance detector 23, and the standard detector 21 is calibrated by a helium neon laser at the frequency point f to obtain the responsivity /?Tiiz of the standard detector; A part of single-frequency terahertz light with frequency f enters a translation table and a clamp device after being split by a beam splitter, wherein a standard detector 21 and a detector to be tested 22 are clamped by the translation table and the clamp device 3, the translation table and the clamp device 3 at least comprise an electric control precision translation table and a clamp, displacement switching of the detector on the translation table and the clamp device 3 is controlled by a computer, Referring to the mechanical diagram of the translation table and fixture device clamping the standard detector 21 and detector to be tested 22 in Fig. 3, alternatively, the fixture clamping the standard detector 21 and detector to be tested 22 can be fixed on the same vertical line of the translation table, the vertical distance between the two fixtures is H, and the vertical distance between the standard detector 21 and the fixture is Ay.The vertical distance between the detector to be tested 22 and the fixture is /. the software SC 300 controls the displacement of the electronic control precision translation stage to
2019101075 18 Sep 2019 adjust the movement of the standard detector 21, and the oscilloscope 6 is connected with the standard detector 21. when the voltage value displayed in the oscilloscope 6 reaches the peak value and is stable, the standard detector 21 can be considered to have moved into the terahertz optical path, and the voltage value ΤΤηζ is recorded at this time. The software SC 300 controls the detector to be tested 22 on the electronic control precision translation stage to move in the vertical direction (H+hi-hz), moves the detector to be tested 22 into the terahertz wave path, and connects the detector to be tested 22 with the oscilloscope 6 to confirm that the voltage value displayed in the oscilloscope 6 reaches the peak value and stabilize or adjust the displacement of the electronic control precision translation stage again until the voltage value displayed in the oscilloscope 6 reaches the peak value and is stable, then record the voltage value t/x. The singlefrequency terahertz light with frequency f enters the surveillance detector after being split by the beam splitter, the oscilloscope 6 is connected with the surveillance detector 23, and the angular direction and displacement of the surveillance detector 23 are adjusted so that the voltage value displayed in the oscilloscope 6 reaches a peak value and is stable. When the electronic control precision translation stage adjusts the standard detector 21 to enter the wave path, the voltage value of the surveillance detector 23 is recorded as Umthz at this time, when the electronic control precision translation stage adjusts the detector to be tested 22 to enter the wave path, the voltage value of the surveillance detector 23 is recorded as Umx at this time, the main factors that affect the detector response test include the power stability of the wave source, beam spot uniformity, etc. By adding a surveillance detector to the wave path, the influence of the wave source stability on the transmission result can be eliminated, and the calibration result is more accurate.
2019101075 18 Sep 2019
Substituting the above values into the calculation formula
Ux = .7?thz
C/THz [/mt Hz
Complete the calibration of responsiveness.
As said above, since the traditional standard light source calibration method has high uncertainty, and errors such as uncertainty factors which cannot be accurately measured are easily introduced in the calibration process, the calibration method and the device for the responsivity parameter of the single-pixel field effect self-mixing terahertz detector of the invention can realize precise calibration on the single-pixel terahertz detector by using the calibration method compared with the standard detector, and reduce the uncertainty of value transmission. With the increasingly wide application of terahertz detector devices in many fields such as high-speed broadband communication, functional material development, biomedical imaging, airport and port security check, illegal cooking oil detection, hazardous chemical monitoring and early warning, the terahertz detector device has certain industrial utilization value.

Claims (7)

1 .A calibration device for response parameters of a single-pixel field effect self-mixing terahertz detector at least comprises six parts, namely a terahertz source module, a detector module, a translation table and fixture device, an optical lens group, a data acquisition processing module, a display module and the like.
The said terahertz source module at least comprises a singlefrequency terahertz source, a frequency multiplier and a driving power supply, and the said single-frequency terahertz source is connected with the said driving power supply. And is use for radiating single-frequency terahertz light from that said single-frequency terahertz source unde the driving of the said driving power supply. Said Frequency multiplier is used to change the signal frequency of a single-frequency terahertz source by an integer multiple.
The said detector module at least comprises a standard detector, a detector to be tested and a surveillance detector, wherein the said standard detector is used as a measurement standard to realize traceability of values. Said surveillance detector is used to eliminate the influence of terahertz wave source stability on transmission results.
The said translation table and fixture device at least comprises a precision translation table and a fixture, wherein the said precision translation table and the fixture are used for clamping the said standard detector and the said detector to be tested, and the said standard detector and the said detector to be tested are controlled by a computer to perform displacement switching, so that the two detectors move into wave paths respectively.
2019101075 18 Sep 2019
The said optics and lens group at least comprises a group of polyethylene optical mirrors and a beam splitter, wherein the said polyethylene optical mirrors are arranged on one side of the said singlefrequency terahertz source and are used for converging terahertz light. The said beam splitter is used for splitting single-frequency terahertz light.
The said data acquisition and processing module at least comprises a measurement signal amplification circuit and an oscilloscope, wherein the said measurement signal amplification circuit is used for amplifying the voltage value output by the detector; and the said oscilloscope is respectively connected with the said driving power supply, the said standard detector, the said detector to be tested and the said surveillance detector for displaying and reading signals.
2. A device for calibrating response parameters of a single-pixel field effect self-mixing terahertz detector according to claim 1 is characterized in that the said surveillance detector needs to measure simultaneously with the said standard detector and the said detector to be tested respectively.
3. A device for calibrating response parameters of a single-pixel field effect self-mixing terahertz detector according to claim 1 said is characterized in that the said precision translation stage is a precision electronic control translation stage, and displacement control of the translation stage can be performed by computer SC 300 software.
4. According to claim 1, the said device for calibrating the responsivity parameter of the single-pixel field effect self-mixing terahertz detector is characterized in that the said polyethylene optical mirror is a combination of a group of polyethylene lenses.
5. A calibration method for responsivity parameters of a single-pixel field effect self-mixing terahertz detector using the lsaid device according to
2019101075 18 Sep 2019 claim 1, characterized by comprising at least the following steps
S1: Turn on the said drive power supply to stabilize its output voltage at 9.5 V, connect it with the said single-frequency terahertz source, after the radiated single-frequency terahertz light is converged by the said polyethylene optical mirror, split the beam through the said beam splitter, and part of the wave path enters the said surveillance detector. Apart of the light is irradiated on the receiving surface of the said translation stage, the said standard detector and the said detector to be tested are clamped on the said translation stage, and the displacement switching of the detectors on the said translation stage is controlled by a computer, so that the two detectors can move into wave paths respectively;
S2: The said standard detector is calibrated by a He-Ne laser at a certain frequency point f to obtain the responsivity RTHz of the standard detector.The said standard detector is moved into the wave path, and the standard detector and the surveillance detector are simultaneously subjected to signal acquisition after passing through an amplification circuit. The electrical signal when the standard detector performs signal acquisition is UTHz. At this time, the electrical signal when the surveillance detector performs signal acquisition is UMTHz.
S3: Moving the said detector to be tested into a wave path, performing signal acquisition on the detector to be tested and the surveillance detector simultaneously after passing through an amplification circuit, and obtaining that the electric signal when the detector to be tested performs signal acquisition is Ux. At this time, when the surveillance detector performs signal acquisition, the electrical signal is UMx, and the responsivity Rx of the detector to be tested is
Ux
Rx = __R THz
U THz
U MTHz
2019101075 18 Sep 2019
Complete the calibration of responsiveness.
6. The said method according to claim 6 is characterized in that the positions of the said standard detector and the said detector to be tested shall be determined to ensure that the beam spot at the same position is received and the wave path center is at the same horizontal line.
7. The said method according to claim 6 is characterized in that signal acquisition shall be carried out after pre-heating and other processing, signals in designated frequency bands shall be measured, and the average value shall be acquired for many times to eliminate random errors in measurement.
AU2019101075A 2019-09-18 2019-09-18 A calibration method and device for responsivity parameters of a single-pixel field effect self-mixing terahertz detector Ceased AU2019101075A4 (en)

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