CN111157487A - Terahertz spectrum and imaging rapid synchronous detection device based on double optical paths - Google Patents
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- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
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- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
- G01N21/3586—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation by Terahertz time domain spectroscopy [THz-TDS]
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N2021/3595—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using FTIR
Abstract
The invention discloses a terahertz spectrum and imaging rapid synchronous detection device based on double light paths, which consists of an x-z plane light path and a y-z plane light path, wherein the two plane light paths share a focus and are mutually vertical; placing a sample to be detected at a confocal position of two parts of planar light paths, wherein the x-z planar light path is used as a terahertz spectrum detection system, and the y-z planar light path is used as a terahertz imaging detection system; the terahertz imaging detection system performs reflective rapid scanning imaging on a sample to be detected to obtain image information of the sample to be detected; according to the intensity information of all pixel points in the image, selecting an abnormal value of the intensity information in the image as an interested area, and taking the interested area as a position point to be measured for spectral measurement; and displacing the position point to be detected to the confocal point by using an x-y scanning platform, suspending the terahertz imaging detection system, starting the terahertz spectrum detection system, and obtaining the terahertz spectrum information of the position point to be detected.
Description
Technical Field
The invention relates to the field of terahertz spectrum imaging, in particular to a terahertz spectrum and imaging fast synchronous detection device based on double optical paths.
Background
Terahertz (Terahertz, abbreviated as THz, 1THz ═ 1012Hz) waves refer to electromagnetic waves having frequencies in the range of 0.1THz-10 THz,the wavelength range is 0.03mm to 3mm, and the electromagnetic spectrum region between far infrared light and microwave. It has many unique properties such as transient, broadband, low energy, etc. Therefore, the terahertz wave spectrum technology has great application prospect and value in the fields of life science, medical detection and the like.
Terahertz wave imaging techniques can be divided into continuous terahertz wave imaging and pulsed terahertz wave imaging, depending on the kind of terahertz radiation source. The continuous terahertz wave imaging technology generally performs imaging by detecting intensity information of terahertz waves. The method has the remarkable advantages of high imaging speed, high resolution and the like. However, the method can only obtain the intensity information of each pixel point in the image, and cannot simultaneously obtain the spectrum information of the sample. In order to obtain spectral information of a specific area of a sample, terahertz spectrum detection needs to be separately performed after imaging is finished.
The imaging technology based on the pulse terahertz wave generally utilizes a terahertz time-domain spectroscopy (TDS) system to perform scanning imaging. TDS adopts a coherent detection method, and amplitude and phase information of a target to be detected can be obtained by acquiring a time domain waveform of signal light, so that spectral parameters such as refractive index and absorption coefficient of the target are obtained. Based on a pulse terahertz imaging detection system, the time for completing measurement of one pixel point in a sample needs at least more than 10 seconds. In order to realize terahertz imaging of a sample with a length and a width of 1cm, if the scanning step length is set to 200 μm, the scanning time often takes more than 1 h. The imaging speed is very slow, and the rapid measurement of the sample cannot be realized. In order to increase the imaging speed, the imaging range can be sacrificed or the scanning step length can be reduced to reduce the measurement resolution precision. Meanwhile, the imaging resolution is poor due to the fact that the light spot of the pulse terahertz wave is large.
Therefore, it is highly desirable to invent a novel terahertz spectral imaging device which has fast imaging speed and high resolution and can synchronously acquire spectral information of a target to be detected.
Disclosure of Invention
The invention provides a terahertz spectrum and imaging fast synchronous detection device based on double optical paths, which can simultaneously obtain the spectrum and imaging information of a sample to be detected, has high imaging speed and high resolution, and is described in detail as follows:
a terahertz spectrum and imaging fast synchronous detection device based on double light paths is composed of an x-z plane light path and a y-z plane light path, wherein the two plane light paths share a focus and are mutually vertical;
placing a sample to be detected at a confocal position of two parts of planar light paths, wherein the x-z planar light path is used as a terahertz spectrum detection system, and the y-z planar light path is used as a terahertz imaging detection system;
the terahertz imaging detection system performs reflective rapid scanning imaging on a sample to be detected to obtain image information of the sample to be detected; according to the intensity information of all pixel points in the image, selecting an abnormal value of the intensity information in the image as an interested area, and taking the interested area as a position point to be measured for spectral measurement;
and displacing the position point to be detected to the confocal point by using an x-y scanning platform, suspending the terahertz imaging detection system, starting the terahertz spectrum detection system, and obtaining the terahertz spectrum information of the position point to be detected.
Further, the apparatus further comprises: and selecting a certain partial area as a position point to be measured for spectral measurement according to subjective intention.
Further, the terahertz spectrum detection system comprises:
the pulse terahertz wave radiation source is a terahertz photoconductive radiation source; the terahertz waves are converted into parallel light from divergent light through the first terahertz off-axis parabolic mirror; the terahertz waves are changed into convergent light from parallel light through a second terahertz off-axis paraboloidal mirror, and are focused and incident to the surface of the sample to be measured in a 30-degree direction;
the reflected signal is changed into parallel light for transmission after passing through a third terahertz off-axis polished mirror; after passing through the fourth terahertz off-axis parabolic mirror, the terahertz waves are changed from parallel light into convergent light, the energy of the convergent light is collected by the pulse terahertz wave detector, and information of the sample to be detected, which is detected by the pulse terahertz wave detector, is input into the terahertz spectrum analysis system to obtain the spectrum information of the sample to be detected.
Wherein, terahertz imaging detecting system includes:
the continuous terahertz wave radiated by the continuous terahertz radiation source is modulated by the chopper and reflected by the first terahertz plane mirror and then enters the surface of the terahertz spectroscope, the terahertz spectroscope divides the terahertz wave into two paths, and one path of reflected light enters the first terahertz Golay detector and serves as a reference signal; the other path of transmitted light is used for reflective scanning imaging;
after the terahertz waves pass through the fifth terahertz off-axis parabolic mirror, the terahertz waves are changed into convergent light from parallel light and are focused and incident to the surface of the sample to be measured in a 30-degree direction; the terahertz waves are reflected by the surface of the sample to be detected and then are incident on the sixth off-axis parabolic mirror, the terahertz waves are converted from divergent light into parallel light for transmission, after the terahertz waves pass through the seventh off-axis parabolic mirror, the parallel light is converted into convergent light, the energy of the convergent light is collected by the second terahertz Golay detector and is input into the imaging analysis system, and the image information of the sample to be detected is obtained.
The technical scheme provided by the invention has the beneficial effects that:
1. the terahertz spectrum and the imaging information of the sample to be detected can be obtained simultaneously, and the defect that only single detection of terahertz spectrum or imaging can be realized in the traditional continuous terahertz wave imaging system and the traditional terahertz time-domain spectroscopy system is overcome;
2. in the aspect of imaging detection, the terahertz imaging detection with high resolution, high speed and high efficiency can be realized; in the aspect of spectrum detection, the region of interest in the sample can be rapidly and accurately subjected to spectrum detection;
3. the measuring module of the invention adopts two parts of orthogonal light paths, the space required by the whole system is small, and the integration and miniaturization of the system are convenient to realize.
Drawings
FIG. 1 is a schematic structural diagram of a dual-optical-path-based terahertz spectrum and imaging fast synchronous detection device;
FIG. 2 is a schematic diagram of an optical path of a pulse terahertz wave spectrum detection system;
FIG. 3 is a schematic diagram of an optical path of the continuous terahertz wave imaging detection system.
In the drawings, the components represented by the respective reference numerals are listed below:
1: a pulsed terahertz wave radiation source; 2: a first terahertz off-axis parabolic mirror;
3: a second terahertz off-axis parabolic mirror; 4: a sample to be tested;
5: a third terahertz off-axis parabolic mirror; 6: a fourth terahertz off-axis parabolic mirror;
7: a pulse type terahertz wave detector; 8: a terahertz wave spectroscopic analysis system;
9: an x-direction displacement stage; 10: a y-direction displacement stage;
11: a continuous terahertz wave radiation source; 12: a chopper;
13: a first terahertz plane mirror; 14: a terahertz spectroscope;
15: a first terahertz Golay detector; 16: a fifth terahertz off-axis parabolic mirror;
17: a sixth terahertz off-axis parabolic mirror; 18: a seventh terahertz off-axis parabolic mirror;
19: a second terahertz Golay detector; 20: an imaging analysis system.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention are described in further detail below.
Example 1
In order to achieve the purpose, the technical scheme of the invention is as follows:
referring to fig. 1, the terahertz spectrum and imaging fast synchronous detection device based on the dual optical paths is composed of an x-z plane optical path and a y-z plane optical path, and the two plane optical paths share a focus and are perpendicular to each other. The sample 4 to be measured is placed in the confocal position of the two planar light paths. The X-z plane optical path is a terahertz spectrum detection system, and the Y-z plane optical path is a terahertz imaging detection system.
Referring to fig. 2, on an x-z plane light path, the terahertz time-domain spectroscopy apparatus (composed of a pulsed terahertz radiation source 1 and a pulsed terahertz detector 7), 4 terahertz off-axis parabolic mirrors (a first to a fourth terahertz off-axis parabolic mirrors), and a terahertz wave spectrum analysis system 8 are provided. The pulse type terahertz wave radiation source 1 is a terahertz photoconductive radiation source; the terahertz waves are converted into parallel light from divergent light through the first terahertz off-axis parabolic mirror 2; the terahertz waves pass through the second terahertz off-axis parabolic mirror 3, become converged light from parallel light, and are focused and incident on the surface of the sample 4 to be measured in the direction of 30 degrees. At this time, the terahertz wave interacts with the sample 4 to be measured. The reflected signal becomes parallel light to be transmitted after passing through the third terahertz off-axis parabolic mirror 5; after passing through the fourth terahertz off-axis parabolic mirror 6, the terahertz waves are changed into convergent light from parallel light, and the energy of the convergent light is collected by the pulse terahertz wave detector 7. The information of the sample 4 to be detected, which is detected by the pulse terahertz wave detector 7, is input into the terahertz spectrum analysis system 8, and the spectrum information of the sample 4 to be detected can be directly obtained through the existing known Fourier spectrum transformation formula according to the changes of the phase and amplitude of the terahertz time-domain pulse waveform.
Referring to fig. 3, on a y-z plane light path, an imaging detection light path is composed of a continuous terahertz wave radiation source 11, a chopper 12, a first terahertz plane mirror 13, a fifth terahertz off-axis parabolic mirror 16, a terahertz spectroscope 14, a sixth terahertz off-axis parabolic mirror 17, two terahertz Golay detectors (15 and 19), and an imaging analysis system 20. The continuous terahertz waves radiated by the continuous terahertz radiation source 11 are modulated by the chopper 12 and reflected by the first terahertz plane mirror 13, and then are incident on the surface of the terahertz spectroscope 14. The terahertz spectroscope 14 divides the terahertz wave into two paths, wherein one path of reflected light is incident into the first terahertz Golay detector 15 and is used as a reference signal; and the other path of transmitted light is used for reflective scanning imaging.
After the terahertz waves pass through the fifth terahertz off-axis parabolic mirror 16, the terahertz waves are changed into convergent light from parallel light, and are focused and incident on the surface of the sample 4 to be measured in a 30-degree direction. At this time, the continuous terahertz wave interacts with the sample 4 to be measured. The terahertz wave is reflected by the surface of the sample 4 to be detected and then is incident on the sixth off-axis parabolic mirror 17, and at the moment, the terahertz wave is converted from divergent light to parallel light for transmission. After passing through the seventh terahertz off-axis parabolic mirror 18, the terahertz waves are changed from parallel light into convergent light, and the energy of the convergent light is collected by a second terahertz Golay detector 19. The information of the sample to be measured collected by the detector is input into the imaging analysis system 20, and the image information of the sample to be measured 4 is finally obtained according to the algorithms of point-by-point restoration of the intensity value, image denoising, normalization processing and the like.
In practical application, the sample 4 to be measured is tightly attached to the surface of the reflecting window, the reflecting window is arranged on the objective table, and the objective table is connected to the x and y scanning mobile platform. In addition, the detection surface of the sample 4 to be detected is located at the confocal point of the dual optical path detection system. The x and y scanning mobile platform of the sample 4 to be measured is accurately controlled by setting the scanning range and the step length in Labview software, so that the high-precision scanning measurement of the sample 4 to be measured is realized.
When the system is in operation, the terahertz imaging detection system (namely, the y-z plane optical path) is used for carrying out reflective rapid scanning imaging on the sample 4 to be detected, and image information of the sample 4 to be detected is obtained. And selecting an abnormal value of the intensity information in the image as an interested area according to the intensity information of all pixel points in the image. The invention takes the interested area as the position point to be measured of the spectral measurement, or selects a certain partial area as the position point to be measured of the spectral measurement according to the subjective intention. The position to be detected is displaced to the confocal point by using the x-y scanning platform, the terahertz imaging detection system is suspended at the moment, the terahertz spectrum detection system (namely, the x-z plane light path) is started, and terahertz spectrum information of the position point to be detected can be obtained. Subsequently, the spectral measurement of the next point to be measured can be selected to continue, or the continuous terahertz wave imaging scanning is completed, or the measurement is finished.
The pulsed terahertz wave radiation source 1 and the pulsed terahertz wave receiver 7, which are both of the photoconductive antenna structure and are of the type TAS7500TS (Advantest), are used for generating and receiving pulsed terahertz waves, or other spectroscopic devices capable of performing the same function. The frequency measurement range is 0.1THz-4 THz, the frequency resolution is 3.8GHz, and the sampling time interval of the time domain signal is 0.002 ps.
Terahertz spectroscopic analysis system 8, which is of the type TAS7500TS (Advantest), or other spectroscopic analysis system capable of performing the same function. The terahertz spectrum information of the sample 4 to be detected can be obtained through the Fourier spectrum transformation in the prior known technology according to the change of the phase and the amplitude of the terahertz time-domain pulse waveform.
In the specific implementation process, gold films are plated on the surfaces of the first terahertz off-axis parabolic mirror 2, the fourth terahertz off-axis parabolic mirror 6 and the seventh terahertz off-axis parabolic mirror 18, the reflection angle is 90 degrees, the focal length is 150mm, and the terahertz off-axis parabolic mirror is used for changing the transmission direction of terahertz light beams. Aspheric convex lenses may be used instead.
In the specific implementation, gold films are plated on the surfaces of the second terahertz off-axis parabolic mirror 3 and the fifth terahertz off-axis parabolic mirror 16, the reflection angle is 30 degrees, the focal length is 50.8mm, and the terahertz off-axis parabolic mirrors are used for focusing terahertz beams. Aspheric convex lenses may be used instead.
The surfaces of the fourth terahertz off-axis parabolic mirror 6 and the sixth terahertz off-axis parabolic mirror 18 are plated with gold films, the reflection angle is 30 degrees, the focal length is 150mm, and the terahertz off-axis parabolic mirrors are used for collecting terahertz beams obtained by detection after being reflected by the sample to be detected 4. Aspheric convex lenses may be used instead.
Further, the chopping frequency of the chopper 12 needs to be set according to the repetition frequency response characteristic of the terahertz detector.
And a gold film is plated on the surface of the first terahertz plane mirror 13 and is used for changing the optical path direction of terahertz waves.
The terahertz spectroscope 14 is used for dividing terahertz waves into two paths, wherein one path of reflected light enters the first terahertz detector 15, and the other path of transmitted light is used for reflective imaging. The detection result is input into a computer system and used for reducing the influence of the power fluctuation of the terahertz radiation source on imaging.
In a specific implementation, the first terahertz Golay detector and the second terahertz Golay detector are both (GC-1P, TYDEX), and other suitable terahertz waveband detectors can be used.
The terahertz imaging analysis system 20 can collect intensity information at a corresponding position of the sample 4 to be detected, and further obtain complete terahertz image information of the sample 4 to be detected. And the scanning step length can be set according to the actual imaging requirement, and the x-direction and y-direction scanning platforms can be accurately controlled through the control of the conventional known Labview software.
The reflective window is a 0.5mm thick quartz plate with a length and width determined according to experimental requirements. When a liquid sample or biological tissue is measured, a reflecting window needs to be added, and a sample 4 to be measured is tightly attached to the surface of the reflecting window; when measuring solid, powder and other materials, the reflective window may not be added.
The sample 4 to be measured is attached to the lower surface of the reflecting window, the reflecting window is arranged on the objective table, and the objective table is connected to the x and y displacement platforms 9 and 10. In addition, the detection surface of the sample 4 to be measured is located at the confocal point of the dual optical path system. Along with the movement of the x and y scanning moving platform, the high-precision scanning measurement of the sample is realized.
When the whole device operates, firstly, the continuous terahertz wave imaging system performs reflective fast scanning imaging on the sample 4 to be detected, and complete image information of the sample 4 to be detected or an interested area in the sample 4 to be detected is obtained. At this time, the terahertz imaging detection system can be suspended and started. At this time, terahertz spectrum information of the position point of the sample 4 to be measured can be obtained. After the spectral information of the corresponding position point is obtained, continuous terahertz wave imaging scanning can be selected to be continuously completed, or the measurement is finished.
In the embodiment of the present invention, except for the specific description of the model of each device, the model of other devices is not limited, as long as the device can perform the above functions.
Those skilled in the art will appreciate that the drawings are only schematic illustrations of preferred embodiments, and the above-described embodiments of the present invention are merely provided for description and do not represent the merits of the embodiments.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (4)
1. A terahertz spectrum and imaging rapid synchronous detection device based on double light paths is characterized in that the detection device is composed of an x-z plane light path and a y-z plane light path, and the two parts of plane light paths share a focus and are mutually vertical;
placing a sample to be detected at a confocal position of two parts of planar light paths, wherein the x-z planar light path is used as a terahertz spectrum detection system, and the y-z planar light path is used as a terahertz imaging detection system;
the terahertz imaging detection system performs reflective rapid scanning imaging on a sample to be detected to obtain image information of the sample to be detected; according to the intensity information of all pixel points in the image, selecting an abnormal value of the intensity information in the image as an interested area, and taking the interested area as a position point to be measured for spectral measurement;
and displacing the position point to be detected to the confocal point by using an x-y scanning platform, suspending the terahertz imaging detection system, starting the terahertz spectrum detection system, and obtaining the terahertz spectrum information of the position point to be detected.
2. The dual-optical-path-based terahertz spectroscopy and imaging fast synchronous detection device according to claim 1, further comprising: and selecting a certain partial area as a position point to be measured for spectral measurement according to subjective intention.
3. The dual-optical-path-based terahertz spectrum and imaging fast synchronous detection device according to claim 1, wherein the terahertz spectrum detection system comprises:
the pulse terahertz wave radiation source is a terahertz photoconductive radiation source; the terahertz waves are converted into parallel light from divergent light through the first terahertz off-axis parabolic mirror; the terahertz waves are changed into convergent light from parallel light through a second terahertz off-axis paraboloidal mirror, and are focused and incident to the surface of the sample to be measured in a 30-degree direction;
the reflected signal is changed into parallel light for transmission after passing through a third terahertz off-axis polished mirror; after passing through the fourth terahertz off-axis parabolic mirror, the terahertz waves are changed from parallel light into convergent light, the energy of the convergent light is collected by the pulse terahertz wave detector, and information of the sample to be detected, which is detected by the pulse terahertz wave detector, is input into the terahertz spectrum analysis system to obtain the spectrum information of the sample to be detected.
4. The dual-optical-path-based terahertz spectrum and imaging fast synchronous detection device according to claim 1, wherein the terahertz imaging detection system comprises:
the continuous terahertz wave radiated by the continuous terahertz radiation source is modulated by the chopper and reflected by the first terahertz plane mirror and then enters the surface of the terahertz spectroscope, the terahertz spectroscope divides the terahertz wave into two paths, and one path of reflected light enters the first terahertz Golay detector and serves as a reference signal; the other path of transmitted light is used for reflective scanning imaging;
after the terahertz waves pass through the fifth terahertz off-axis parabolic mirror, the terahertz waves are changed into convergent light from parallel light and are focused and incident to the surface of the sample to be measured in a 30-degree direction; the terahertz waves are reflected by the surface of the sample to be detected and then are incident on the sixth off-axis parabolic mirror, the terahertz waves are converted from divergent light into parallel light for transmission, after the terahertz waves pass through the seventh off-axis parabolic mirror, the parallel light is converted into convergent light, the energy of the convergent light is collected by the second terahertz Golay detector and is input into the imaging analysis system, and the image information of the sample to be detected is obtained.
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| CN114166791A (en) * | 2021-08-12 | 2022-03-11 | 博微太赫兹信息科技有限公司 | Terahertz time-domain spectrum probe device for biomedical imaging and time-domain spectrometer |
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