AU2008903914A0 - Chemical Vapor Deposition Reactor and Method - Google Patents

Chemical Vapor Deposition Reactor and Method

Info

Publication number
AU2008903914A0
AU2008903914A0 AU2008903914A AU2008903914A AU2008903914A0 AU 2008903914 A0 AU2008903914 A0 AU 2008903914A0 AU 2008903914 A AU2008903914 A AU 2008903914A AU 2008903914 A AU2008903914 A AU 2008903914A AU 2008903914 A0 AU2008903914 A0 AU 2008903914A0
Authority
AU
Australia
Prior art keywords
vapor deposition
chemical vapor
deposition reactor
reactor
chemical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2008903914A
Inventor
Gang Li
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Li Gang Dr
Original Assignee
Li Gang Dr
Filing date
Publication date
Application filed by Li Gang Dr filed Critical Li Gang Dr
Publication of AU2008903914A0 publication Critical patent/AU2008903914A0/en
Priority to AU2009202611A priority Critical patent/AU2009202611B2/en
Abandoned legal-status Critical Current

Links

AU2008903914A 2008-07-31 2008-07-31 Chemical Vapor Deposition Reactor and Method Abandoned AU2008903914A0 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2009202611A AU2009202611B2 (en) 2008-07-31 2009-06-30 Chemical Vapor Deposition Reactor and Method

Publications (1)

Publication Number Publication Date
AU2008903914A0 true AU2008903914A0 (en) 2008-08-21

Family

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