AU2005902865A0 - Method and apparatus for hydrogenation of thin film silicon on glass - Google Patents

Method and apparatus for hydrogenation of thin film silicon on glass

Info

Publication number
AU2005902865A0
AU2005902865A0 AU2005902865A AU2005902865A AU2005902865A0 AU 2005902865 A0 AU2005902865 A0 AU 2005902865A0 AU 2005902865 A AU2005902865 A AU 2005902865A AU 2005902865 A AU2005902865 A AU 2005902865A AU 2005902865 A0 AU2005902865 A0 AU 2005902865A0
Authority
AU
Australia
Prior art keywords
hydrogenation
glass
thin film
film silicon
silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2005902865A
Inventor
Paul Alan Basore
Mark Keevers
Adrian Turner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CSG Solar AG
Original Assignee
CSG Solar AG
Filing date
Publication date
Application filed by CSG Solar AG filed Critical CSG Solar AG
Publication of AU2005902865A0 publication Critical patent/AU2005902865A0/en
Priority to AU2006254734A priority Critical patent/AU2006254734A1/en
Priority to EP06741169A priority patent/EP1886339A4/en
Priority to PCT/AU2006/000752 priority patent/WO2006128247A1/en
Priority to JP2008513870A priority patent/JP2008546191A/en
Priority to US11/915,918 priority patent/US8039051B2/en
Priority to CNB2006800186521A priority patent/CN100547726C/en
Abandoned legal-status Critical Current

Links

AU2005902865A 2005-06-03 2005-06-03 Method and apparatus for hydrogenation of thin film silicon on glass Abandoned AU2005902865A0 (en)

Priority Applications (6)

Application Number Priority Date Filing Date Title
AU2006254734A AU2006254734A1 (en) 2005-06-03 2006-06-02 Method and apparatus for hydrogenation of thin film silicon on glass
EP06741169A EP1886339A4 (en) 2005-06-03 2006-06-02 Method and apparatus for hydrogenation of thin film silicon on glass
PCT/AU2006/000752 WO2006128247A1 (en) 2005-06-03 2006-06-02 Method and apparatus for hydrogenation of thin film silicon on glass
JP2008513870A JP2008546191A (en) 2005-06-03 2006-06-02 Thin-film silicon-on-glass hydrogenation apparatus and method
US11/915,918 US8039051B2 (en) 2005-06-03 2006-06-02 Method and apparatus for hydrogenation of thin film silicon on glass
CNB2006800186521A CN100547726C (en) 2005-06-03 2006-06-02 Be used to make the method and apparatus of thin film silicon hydrogenation on glass

Publications (1)

Publication Number Publication Date
AU2005902865A0 true AU2005902865A0 (en) 2005-06-16

Family

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