AU2003304247A1 - Pulsed ion beam control of solid state features - Google Patents

Pulsed ion beam control of solid state features

Info

Publication number
AU2003304247A1
AU2003304247A1 AU2003304247A AU2003304247A AU2003304247A1 AU 2003304247 A1 AU2003304247 A1 AU 2003304247A1 AU 2003304247 A AU2003304247 A AU 2003304247A AU 2003304247 A AU2003304247 A AU 2003304247A AU 2003304247 A1 AU2003304247 A1 AU 2003304247A1
Authority
AU
Australia
Prior art keywords
solid state
ion beam
beam control
pulsed ion
state features
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003304247A
Other languages
English (en)
Inventor
Jene A. Golovchenko
Jiali Li
Derek M. Stein
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Harvard College
Original Assignee
Harvard College
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Harvard College filed Critical Harvard College
Publication of AU2003304247A1 publication Critical patent/AU2003304247A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
    • G01N33/483—Physical analysis of biological material
    • G01N33/487—Physical analysis of biological material of liquid biological material
    • G01N33/48707—Physical analysis of biological material of liquid biological material by electrical means
    • G01N33/48721—Investigating individual macromolecules, e.g. by translocation through nanopores
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
    • B81C1/00626—Processes for achieving a desired geometry not provided for in groups B81C1/00563 - B81C1/00619
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C99/00—Subject matter not provided for in other groups of this subclass
    • B81C99/0035—Testing
    • B81C99/004—Testing during manufacturing

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Biomedical Technology (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Geometry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Hematology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Urology & Nephrology (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Biophysics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Nanotechnology (AREA)
  • Physical Vapour Deposition (AREA)
  • Micromachines (AREA)
AU2003304247A 2002-10-29 2003-10-28 Pulsed ion beam control of solid state features Abandoned AU2003304247A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US42190802P 2002-10-29 2002-10-29
US60/421,908 2002-10-29
PCT/US2003/034192 WO2005000732A1 (en) 2002-10-29 2003-10-28 Pulsed ion beam control of solid state features

Publications (1)

Publication Number Publication Date
AU2003304247A1 true AU2003304247A1 (en) 2005-01-13

Family

ID=33551199

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003304247A Abandoned AU2003304247A1 (en) 2002-10-29 2003-10-28 Pulsed ion beam control of solid state features

Country Status (4)

Country Link
EP (1) EP1560786A1 (ja)
JP (1) JP2006509645A (ja)
AU (1) AU2003304247A1 (ja)
WO (1) WO2005000732A1 (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
LT5698B (lt) 2008-12-30 2010-11-25 Kauno technologijos universitetas Žmogaus funkcionalumo kontrolės sistema
CA2781581C (en) 2009-12-01 2018-03-06 Oxford Nanopore Technologies Limited Biochemical analysis instrument
EP2622343B1 (en) 2010-10-01 2016-01-20 Oxford Nanopore Technologies Limited Biochemical analysis apparatus using nanopores

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003502166A (ja) * 1999-06-22 2003-01-21 プレジデント・アンド・フェローズ・オブ・ハーバード・カレッジ 固体状態の次元的特徴の制御

Also Published As

Publication number Publication date
EP1560786A1 (en) 2005-08-10
WO2005000732A1 (en) 2005-01-06
JP2006509645A (ja) 2006-03-23

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase