AU2003300A - Drill and drilling method, stage working method, and method of manufacturing exposure device - Google Patents

Drill and drilling method, stage working method, and method of manufacturing exposure device

Info

Publication number
AU2003300A
AU2003300A AU20033/00A AU2003300A AU2003300A AU 2003300 A AU2003300 A AU 2003300A AU 20033/00 A AU20033/00 A AU 20033/00A AU 2003300 A AU2003300 A AU 2003300A AU 2003300 A AU2003300 A AU 2003300A
Authority
AU
Australia
Prior art keywords
drill
exposure device
drilling
stage working
manufacturing exposure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU20033/00A
Inventor
Shigeru Hanai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Publication of AU2003300A publication Critical patent/AU2003300A/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D1/00—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor
    • B28D1/02—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing
    • B28D1/04—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing with circular or cylindrical saw-blades or saw-discs
    • B28D1/041—Working stone or stone-like materials, e.g. brick, concrete or glass, not provided for elsewhere; Machines, devices, tools therefor by sawing with circular or cylindrical saw-blades or saw-discs with cylinder saws, e.g. trepanning; saw cylinders, e.g. having their cutting rim equipped with abrasive particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23B—TURNING; BORING
    • B23B51/00—Tools for drilling machines
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/10—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with cooling provisions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/14—Zonally-graded wheels; Composite wheels comprising different abrasives
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/18—Wheels of special form
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B28—WORKING CEMENT, CLAY, OR STONE
    • B28D—WORKING STONE OR STONE-LIKE MATERIALS
    • B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
    • B28D5/02—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills
    • B28D5/021—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by rotary tools, e.g. drills by drilling

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Mining & Mineral Resources (AREA)
  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Drilling Tools (AREA)
  • Polishing Bodies And Polishing Tools (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
AU20033/00A 1999-01-21 2000-01-13 Drill and drilling method, stage working method, and method of manufacturing exposure device Abandoned AU2003300A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP11/12916 1999-01-21
JP11012916A JP2000210874A (en) 1999-01-21 1999-01-21 Drill and processing method, stage processing method and manufacture of exposure device
PCT/JP2000/000122 WO2000043180A1 (en) 1999-01-21 2000-01-13 Drill and drilling method, stage working method, and method of manufacturing exposure device

Publications (1)

Publication Number Publication Date
AU2003300A true AU2003300A (en) 2000-08-07

Family

ID=11818683

Family Applications (1)

Application Number Title Priority Date Filing Date
AU20033/00A Abandoned AU2003300A (en) 1999-01-21 2000-01-13 Drill and drilling method, stage working method, and method of manufacturing exposure device

Country Status (4)

Country Link
JP (1) JP2000210874A (en)
AU (1) AU2003300A (en)
TW (1) TW425328B (en)
WO (1) WO2000043180A1 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007211259A (en) * 2004-02-20 2007-08-23 Yoshinobu Kobayashi Method of molding metal powder and working tool molded by the molding method
JP4693479B2 (en) * 2005-04-28 2011-06-01 セントラル硝子株式会社 Glass substrate drill
FR2955510B1 (en) * 2010-01-26 2012-04-20 Snecma TOOL AND METHOD FOR ULTRASOUND DRILLING OF CERAMIC MATRIX COMPOSITE MATERIALS
WO2012046751A1 (en) * 2010-10-06 2012-04-12 国立大学法人徳島大学 Drill
JP5890699B2 (en) * 2012-02-09 2016-03-22 株式会社アライドマテリアル Superabrasive tool for drilling and drilling method using the same
FR2994871B1 (en) * 2012-09-05 2015-05-01 Snecma CYLINDRICAL DRILLING TOOL, IN PARTICULAR FOR ORGANIC MATRIX COMPOSITE MATERIAL, AND CORRESPONDING DRILLING METHOD
CN109940521A (en) * 2019-04-10 2019-06-28 国宏工具系统（无锡）股份有限公司 It is exclusively used in the cemented carbide cutting tool of ceramic-like materials processing

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641954Y2 (en) * 1978-03-03 1981-10-01
DE2948665A1 (en) * 1979-12-04 1981-06-11 Friedrich Duss Maschinenfabrik GmbH & Co, 7265 Neubulach Hammer-drill with central exhaust passage - has two diametrically-opposite suction passages in shank behind hardened insert
JPS58181447U (en) * 1982-05-28 1983-12-03 同和工営株式会社 Flat bit for hole bottom polishing
JPS61252631A (en) * 1985-05-02 1986-11-10 Hitachi Electronics Eng Co Ltd Wafer aligning device
JPH0530891Y2 (en) * 1987-06-30 1993-08-09
JPH0746496Y2 (en) * 1988-03-03 1995-10-25 有限会社吉野精機 Rotary drill for small hole drilling
JPH0235676U (en) * 1988-08-30 1990-03-07
JP3043782B2 (en) * 1989-08-31 2000-05-22 株式会社不二越 Tools for drilling hard and brittle materials
JPH0388669U (en) * 1989-12-28 1991-09-10
JPH045367U (en) * 1990-04-28 1992-01-17

Also Published As

Publication number Publication date
JP2000210874A (en) 2000-08-02
TW425328B (en) 2001-03-11
WO2000043180A1 (en) 2000-07-27

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase