AU2003270287A1 - Autofocus device and method for optical examination and/or detection of layers - Google Patents

Autofocus device and method for optical examination and/or detection of layers

Info

Publication number
AU2003270287A1
AU2003270287A1 AU2003270287A AU2003270287A AU2003270287A1 AU 2003270287 A1 AU2003270287 A1 AU 2003270287A1 AU 2003270287 A AU2003270287 A AU 2003270287A AU 2003270287 A AU2003270287 A AU 2003270287A AU 2003270287 A1 AU2003270287 A1 AU 2003270287A1
Authority
AU
Australia
Prior art keywords
layers
detection
autofocus device
optical examination
examination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003270287A
Other languages
English (en)
Other versions
AU2003270287A8 (en
Inventor
Klaus Schaller
Matthias Seel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Evident Technology Center Europe GmbH
Original Assignee
Olympus Soft Imaging Solutions GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Olympus Soft Imaging Solutions GmbH filed Critical Olympus Soft Imaging Solutions GmbH
Publication of AU2003270287A1 publication Critical patent/AU2003270287A1/en
Publication of AU2003270287A8 publication Critical patent/AU2003270287A8/xx
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00—Microscopes
    • G02B21/24—Base structure
    • G02B21/241—Devices for focusing
    • G02B21/245—Devices for focusing using auxiliary sources, detectors

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Automatic Focus Adjustment (AREA)
  • Microscoopes, Condenser (AREA)
AU2003270287A 2002-09-25 2003-09-25 Autofocus device and method for optical examination and/or detection of layers Abandoned AU2003270287A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE2002144618 DE10244618A1 (de) 2002-09-25 2002-09-25 Einrichtung und Verfahren zur optischen Objektuntersuchung oder/und Erfassung oder/und Untersuchung von Schichten
DE10244618.0 2002-09-25
PCT/EP2003/010784 WO2004031830A2 (de) 2002-09-25 2003-09-25 Autofokus-einrichtung und verfahren zur optischen untersuchung oder/und erfassung bon schichten

Publications (2)

Publication Number Publication Date
AU2003270287A1 true AU2003270287A1 (en) 2004-04-23
AU2003270287A8 AU2003270287A8 (en) 2004-04-23

Family

ID=31984051

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003270287A Abandoned AU2003270287A1 (en) 2002-09-25 2003-09-25 Autofocus device and method for optical examination and/or detection of layers

Country Status (4)

Country Link
EP (1) EP1543369B1 (de)
AU (1) AU2003270287A1 (de)
DE (2) DE10244618A1 (de)
WO (1) WO2004031830A2 (de)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005022125A1 (de) * 2005-05-12 2006-11-16 Carl Zeiss Microlmaging Gmbh Lichtrastermikroskop mit Autofokusmechanismus
DE102006046370A1 (de) 2006-09-29 2008-04-03 Carl Zeiss Meditec Ag Vorrichtung und Verfahren zur Materialverarbeitung unter Verwendung eines transparenten Kontaktelements
EP3396430B1 (de) * 2017-04-27 2023-08-16 Euroimmun Medizinische Labordiagnostika AG Optische abtastanordnung und verfahren
DE102019130963B3 (de) * 2019-11-15 2020-09-17 Sick Ag Fokusmodul
DE102020202022A1 (de) 2020-02-18 2021-08-19 Carl Zeiss Microscopy Gmbh Verfahren zur Erfassung einer relativen Ausrichtung einer Oberfläche

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5863906A (ja) * 1981-10-14 1983-04-16 Olympus Optical Co Ltd 顕微鏡用合焦位置検出装置
DE3219503C2 (de) * 1982-05-25 1985-08-08 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Vorrichtung zum selbsttätigen Fokussieren auf in optischen Geräten zu betrachtende Objekte
JPS6269149A (ja) * 1985-09-24 1987-03-30 Hitachi Electronics Eng Co Ltd ウエハ異物検査装置
KR0156800B1 (ko) * 1995-02-10 1998-12-15 이대원 레이저 다이오드를 이용한 자동 초점 조절 장치
JP4076249B2 (ja) * 1997-09-24 2008-04-16 オリンパス株式会社 自動焦点顕微鏡
US6130745A (en) * 1999-01-07 2000-10-10 Biometric Imaging, Inc. Optical autofocus for use with microtiter plates
DE10101624A1 (de) * 2001-01-16 2002-07-18 Zeiss Carl Jena Gmbh Anordnung zur Scharfeinstellung für Mikroskope

Also Published As

Publication number Publication date
EP1543369A2 (de) 2005-06-22
DE10244618A1 (de) 2004-04-08
EP1543369B1 (de) 2006-03-08
WO2004031830A3 (de) 2004-06-17
DE50302613D1 (de) 2006-05-04
AU2003270287A8 (en) 2004-04-23
WO2004031830A2 (de) 2004-04-15

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase