AU2003261611A1 - Time based flow controller for incompressible fluid and method for controlling flow rate of incompressible fluid using it - Google Patents

Time based flow controller for incompressible fluid and method for controlling flow rate of incompressible fluid using it

Info

Publication number
AU2003261611A1
AU2003261611A1 AU2003261611A AU2003261611A AU2003261611A1 AU 2003261611 A1 AU2003261611 A1 AU 2003261611A1 AU 2003261611 A AU2003261611 A AU 2003261611A AU 2003261611 A AU2003261611 A AU 2003261611A AU 2003261611 A1 AU2003261611 A1 AU 2003261611A1
Authority
AU
Australia
Prior art keywords
incompressible fluid
time based
flow rate
flow controller
controlling flow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003261611A
Inventor
Young-Chul Chang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of AU2003261611A1 publication Critical patent/AU2003261611A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G05D7/0641—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means
    • G05D7/0647—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means using a plurality of throttling means the plurality of throttling means being arranged in series
AU2003261611A 2002-08-14 2003-08-14 Time based flow controller for incompressible fluid and method for controlling flow rate of incompressible fluid using it Abandoned AU2003261611A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
KR10-2002-0048144 2002-08-14
KR10-2002-0048144A KR100489307B1 (en) 2002-08-14 2002-08-14 Time-based flow controller for an incompressible fluid and method for controlling flow rate using it
PCT/KR2003/001644 WO2004017150A1 (en) 2002-08-14 2003-08-14 Time based flow controller for incompressible fluid and method for controlling flow rate of incompressible fluid using it

Publications (1)

Publication Number Publication Date
AU2003261611A1 true AU2003261611A1 (en) 2004-03-03

Family

ID=31884891

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003261611A Abandoned AU2003261611A1 (en) 2002-08-14 2003-08-14 Time based flow controller for incompressible fluid and method for controlling flow rate of incompressible fluid using it

Country Status (3)

Country Link
KR (1) KR100489307B1 (en)
AU (1) AU2003261611A1 (en)
WO (1) WO2004017150A1 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4511868B2 (en) * 2004-04-26 2010-07-28 株式会社コガネイ Flexible tank and chemical supply apparatus using the same

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4717596A (en) * 1985-10-30 1988-01-05 International Business Machines Corporation Method for vacuum vapor deposition with improved mass flow control
JPS6340739A (en) * 1986-08-06 1988-02-22 Sumitomo Electric Ind Ltd Method and apparatus for calibrating mass flow rate controller
JPH04214117A (en) * 1990-12-12 1992-08-05 Nec Kyushu Ltd Gas flow rate controller
JPH05127755A (en) * 1991-11-06 1993-05-25 Denki Kagaku Keiki Kk Gas flow rate controller
JP2635929B2 (en) * 1994-04-12 1997-07-30 シーケーディ株式会社 Mass flow controller absolute flow rate verification system
JPH09222344A (en) * 1996-02-16 1997-08-26 Hitachi Metals Ltd Mass flow controller
US5865205A (en) * 1997-04-17 1999-02-02 Applied Materials, Inc. Dynamic gas flow controller
KR200160500Y1 (en) * 1997-05-30 1999-11-01 류정열 Control system of hydraulic pump for a vehicle
KR100310033B1 (en) * 1998-01-17 2002-02-19 철 주 황 Liquid Delivery System for Use with Chemical Vapor Deposition Device
KR100458511B1 (en) * 2000-12-28 2004-12-03 장영철 Time-based flow controller and method for controlling mass flow using it

Also Published As

Publication number Publication date
KR100489307B1 (en) 2005-05-16
WO2004017150A1 (en) 2004-02-26
KR20040015966A (en) 2004-02-21

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase