AU2003260543A1 - Method and devices for cold plasma cleaning of the surface of a metal, ceramic or polymer workpiece - Google Patents

Method and devices for cold plasma cleaning of the surface of a metal, ceramic or polymer workpiece

Info

Publication number
AU2003260543A1
AU2003260543A1 AU2003260543A AU2003260543A AU2003260543A1 AU 2003260543 A1 AU2003260543 A1 AU 2003260543A1 AU 2003260543 A AU2003260543 A AU 2003260543A AU 2003260543 A AU2003260543 A AU 2003260543A AU 2003260543 A1 AU2003260543 A1 AU 2003260543A1
Authority
AU
Australia
Prior art keywords
ceramic
devices
metal
plasma cleaning
cold plasma
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003260543A
Other languages
English (en)
Inventor
Thierry Belmonte
Thierry Czerwiec
Henri Michel
Jean-Marie Thiebaut
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centre National de la Recherche Scientifique CNRS
Original Assignee
Centre National de la Recherche Scientifique CNRS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre National de la Recherche Scientifique CNRS filed Critical Centre National de la Recherche Scientifique CNRS
Publication of AU2003260543A1 publication Critical patent/AU2003260543A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Cleaning In General (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
AU2003260543A 2002-05-14 2003-05-12 Method and devices for cold plasma cleaning of the surface of a metal, ceramic or polymer workpiece Abandoned AU2003260543A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0205925A FR2839664A1 (fr) 2002-05-14 2002-05-14 Procede et dispositifs de nettoyage par plasma froid de la surface d'une piece en materiau metallique ceramique ou polymere
FR0205925 2002-05-14
PCT/FR2003/001440 WO2003097259A2 (fr) 2002-05-14 2003-05-12 Procede et dispositifs de nettoyage par plasma froid de la surface d'une piece en materiau metallique ceramique ou polymere

Publications (1)

Publication Number Publication Date
AU2003260543A1 true AU2003260543A1 (en) 2003-12-02

Family

ID=29286477

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003260543A Abandoned AU2003260543A1 (en) 2002-05-14 2003-05-12 Method and devices for cold plasma cleaning of the surface of a metal, ceramic or polymer workpiece

Country Status (3)

Country Link
AU (1) AU2003260543A1 (fr)
FR (1) FR2839664A1 (fr)
WO (1) WO2003097259A2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2424946A (en) * 2005-04-05 2006-10-11 Stratec Biomedical Systems Ag A detection system for substance binding using up-converting fluorescent probes

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5507874A (en) * 1994-06-03 1996-04-16 Applied Materials, Inc. Method of cleaning of an electrostatic chuck in plasma reactors
US5824375A (en) * 1996-10-24 1998-10-20 Applied Materials, Inc. Decontamination of a plasma reactor using a plasma after a chamber clean

Also Published As

Publication number Publication date
WO2003097259A2 (fr) 2003-11-27
WO2003097259A3 (fr) 2004-03-25
FR2839664A1 (fr) 2003-11-21

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase