WO2003097259A3 - Procede et dispositifs de nettoyage par plasma froid de la surface d'une piece en materiau metallique ceramique ou polymere - Google Patents

Procede et dispositifs de nettoyage par plasma froid de la surface d'une piece en materiau metallique ceramique ou polymere Download PDF

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Publication number
WO2003097259A3
WO2003097259A3 PCT/FR2003/001440 FR0301440W WO03097259A3 WO 2003097259 A3 WO2003097259 A3 WO 2003097259A3 FR 0301440 W FR0301440 W FR 0301440W WO 03097259 A3 WO03097259 A3 WO 03097259A3
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WO
WIPO (PCT)
Prior art keywords
workpiece
ceramic
metal
devices
polarization
Prior art date
Application number
PCT/FR2003/001440
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English (en)
Other versions
WO2003097259A2 (fr
Inventor
Thierry Belmonte
Thierry Czerwiec
Jean-Marie Thiebaut
Henri Michel
Original Assignee
Centre Nat Rech Scient
Thierry Belmonte
Thierry Czerwiec
Jean-Marie Thiebaut
Henri Michel
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centre Nat Rech Scient, Thierry Belmonte, Thierry Czerwiec, Jean-Marie Thiebaut, Henri Michel filed Critical Centre Nat Rech Scient
Priority to AU2003260543A priority Critical patent/AU2003260543A1/en
Publication of WO2003097259A2 publication Critical patent/WO2003097259A2/fr
Publication of WO2003097259A3 publication Critical patent/WO2003097259A3/fr

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Cleaning In General (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)

Abstract

L'invention concerne un procédé de nettoyage de la surface d'une pièce (4, 12) en un matériau métallique, céramique ou polymère, selon lequel on plonge ladite pièce dans un plasma froid, caractérisé en ce qu'on impose à ladite pièce de manière intermittente une polarisation ou une autopolarisation, de manière à réaliser lors des périodes de polarisation ou d'autopolarisation de la pièce (4, 12) une pulvérisation des impuretés présentes à la surface de la pièce pendant des périodes où on constate que ledit plasma ne permet plus de réaliser ledit nettoyage par un effet chimique seul. L'invention concerne aussi des dispositifs pour la mise en oeuvre de ce procédé.
PCT/FR2003/001440 2002-05-14 2003-05-12 Procede et dispositifs de nettoyage par plasma froid de la surface d'une piece en materiau metallique ceramique ou polymere WO2003097259A2 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU2003260543A AU2003260543A1 (en) 2002-05-14 2003-05-12 Method and devices for cold plasma cleaning of the surface of a metal, ceramic or polymer workpiece

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0205925 2002-05-14
FR0205925A FR2839664A1 (fr) 2002-05-14 2002-05-14 Procede et dispositifs de nettoyage par plasma froid de la surface d'une piece en materiau metallique ceramique ou polymere

Publications (2)

Publication Number Publication Date
WO2003097259A2 WO2003097259A2 (fr) 2003-11-27
WO2003097259A3 true WO2003097259A3 (fr) 2004-03-25

Family

ID=29286477

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/FR2003/001440 WO2003097259A2 (fr) 2002-05-14 2003-05-12 Procede et dispositifs de nettoyage par plasma froid de la surface d'une piece en materiau metallique ceramique ou polymere

Country Status (3)

Country Link
AU (1) AU2003260543A1 (fr)
FR (1) FR2839664A1 (fr)
WO (1) WO2003097259A2 (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2424946A (en) * 2005-04-05 2006-10-11 Stratec Biomedical Systems Ag A detection system for substance binding using up-converting fluorescent probes

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5507874A (en) * 1994-06-03 1996-04-16 Applied Materials, Inc. Method of cleaning of an electrostatic chuck in plasma reactors
US5824375A (en) * 1996-10-24 1998-10-20 Applied Materials, Inc. Decontamination of a plasma reactor using a plasma after a chamber clean

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5507874A (en) * 1994-06-03 1996-04-16 Applied Materials, Inc. Method of cleaning of an electrostatic chuck in plasma reactors
US5824375A (en) * 1996-10-24 1998-10-20 Applied Materials, Inc. Decontamination of a plasma reactor using a plasma after a chamber clean

Also Published As

Publication number Publication date
FR2839664A1 (fr) 2003-11-21
AU2003260543A1 (en) 2003-12-02
WO2003097259A2 (fr) 2003-11-27

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