AU2003241913A1 - Porous nanocomposite thin film and method of forming the same - Google Patents

Porous nanocomposite thin film and method of forming the same

Info

Publication number
AU2003241913A1
AU2003241913A1 AU2003241913A AU2003241913A AU2003241913A1 AU 2003241913 A1 AU2003241913 A1 AU 2003241913A1 AU 2003241913 A AU2003241913 A AU 2003241913A AU 2003241913 A AU2003241913 A AU 2003241913A AU 2003241913 A1 AU2003241913 A1 AU 2003241913A1
Authority
AU
Australia
Prior art keywords
forming
thin film
same
nanocomposite thin
porous nanocomposite
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003241913A
Inventor
Kaori Tsuruoka
Shunsuke Yokotsuka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Publication of AU2003241913A1 publication Critical patent/AU2003241913A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/024—Oxides
    • B01D71/027—Silicium oxide
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0002—Organic membrane manufacture
    • B01D67/0023—Organic membrane manufacture by inducing porosity into non porous precursor membranes
    • B01D67/003—Organic membrane manufacture by inducing porosity into non porous precursor membranes by selective elimination of components, e.g. by leaching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06—Organic material
    • B01D71/70—Polymers having silicon in the main chain, with or without sulfur, nitrogen, oxygen or carbon only
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/06—Organic material
    • B01D71/74—Natural macromolecular material or derivatives thereof
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/26—Electrical properties
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/30—Chemical resistance
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02107—Forming insulating materials on a substrate
    • H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
    • H01L21/02203—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being porous
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00—Apparatus or processes for manufacturing printed circuits
    • H05K3/46—Manufacturing multilayer circuits
    • H05K3/4644—Manufacturing multilayer circuits by building the multilayer layer by layer, i.e. build-up multilayer circuits
    • H05K3/4673—Application methods or materials of intermediate insulating layers not specially adapted to any one of the previous methods of adding a circuit layer
    • H05K3/4676—Single layer compositions

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Inorganic Chemistry (AREA)
  • Formation Of Insulating Films (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Manufacture Of Porous Articles, And Recovery And Treatment Of Waste Products (AREA)
AU2003241913A 2002-05-29 2003-05-29 Porous nanocomposite thin film and method of forming the same Abandoned AU2003241913A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2002155795A JP2003342411A (en) 2002-05-29 2002-05-29 Porous nanocomposite thin film and method of forming the same
JP2002-155795 2002-05-29
PCT/JP2003/006765 WO2003099915A1 (en) 2002-05-29 2003-05-29 Porous nanocomposite thin film and method of forming the same

Publications (1)

Publication Number Publication Date
AU2003241913A1 true AU2003241913A1 (en) 2003-12-12

Family

ID=29561439

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003241913A Abandoned AU2003241913A1 (en) 2002-05-29 2003-05-29 Porous nanocomposite thin film and method of forming the same

Country Status (4)

Country Link
JP (1) JP2003342411A (en)
AU (1) AU2003241913A1 (en)
TW (1) TW200400238A (en)
WO (1) WO2003099915A1 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006030695A1 (en) * 2004-09-13 2006-03-23 Nitto Denko Corporation Process for producing porous material, porous material, antireflective film, process for producing antireflective sheet, and antireflective sheet
JP5549900B2 (en) 2005-06-24 2014-07-16 旭硝子株式会社 Crosslinkable fluorine-containing aromatic prepolymer and use thereof
JP4275718B2 (en) 2006-01-16 2009-06-10 パナソニック株式会社 Semiconductor light emitting device
KR20080104308A (en) 2006-03-16 2008-12-02 아사히 가라스 가부시키가이샤 Negative-type photosensitive fluorinated aromatic resin composition
JP2007308544A (en) * 2006-05-17 2007-11-29 Hitachi Ltd Nano composite material having low dielectric constant and low refractive index
ATE518901T1 (en) 2006-06-02 2011-08-15 Asahi Glass Co Ltd CROSS-LINKABLE PREPOLYMER, PRODUCTION PROCESS THEREOF AND USE THEREOF
US8569391B2 (en) 2008-01-14 2013-10-29 Cornell University Ordered porous mesostructured materials from nanoparticle-block copolymer self-assembly
EP2504384B1 (en) * 2009-11-25 2018-03-21 Dow Global Technologies LLC Nanoporous polymeric foam having high porosity
WO2013073638A1 (en) * 2011-11-18 2013-05-23 旭硝子株式会社 Curable composition, composition for application, cured film, laser processing method, and manufacturing method for multi-layer wiring structure
CN114016290A (en) * 2021-11-11 2022-02-08 辽宁大学 Super-hydrophobic porous organic polymer, acid-alkali-resistant super-hydrophobic polyester fabric loaded with super-hydrophobic porous organic polymer and application of super-hydrophobic polyester fabric

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11255949A (en) * 1998-03-09 1999-09-21 Shin Etsu Polymer Co Ltd Microporous film and its production
JPH11322992A (en) * 1998-05-18 1999-11-26 Jsr Corp Porous film
JP2000119600A (en) * 1998-10-12 2000-04-25 Jsr Corp Composition for membrane formation, production of membrane and porous membrane
JP2001115021A (en) * 1999-10-18 2001-04-24 Asahi Kasei Corp Silica precursor/organic polymer composition

Also Published As

Publication number Publication date
WO2003099915A1 (en) 2003-12-04
JP2003342411A (en) 2003-12-03
TW200400238A (en) 2004-01-01

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase