AU2003241695A8 - Method of measuring electric characteristics of flat substrate using terahertz light - Google Patents
Method of measuring electric characteristics of flat substrate using terahertz lightInfo
- Publication number
- AU2003241695A8 AU2003241695A8 AU2003241695A AU2003241695A AU2003241695A8 AU 2003241695 A8 AU2003241695 A8 AU 2003241695A8 AU 2003241695 A AU2003241695 A AU 2003241695A AU 2003241695 A AU2003241695 A AU 2003241695A AU 2003241695 A8 AU2003241695 A8 AU 2003241695A8
- Authority
- AU
- Australia
- Prior art keywords
- flat substrate
- electric characteristics
- measuring electric
- terahertz light
- terahertz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3581—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light using far infrared light; using Terahertz radiation
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
- G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
- G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
- G01N21/3563—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light for analysing solids; Preparation of samples therefor
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002-161085 | 2002-06-03 | ||
JP2002161085A JP2004003902A (en) | 2002-06-03 | 2002-06-03 | Electric characteristic measuring method of plane substrate using terahertz light |
PCT/JP2003/006887 WO2003102557A1 (en) | 2002-06-03 | 2003-05-30 | Method of measuring electric characteristics of flat substrate using terahertz light |
Publications (2)
Publication Number | Publication Date |
---|---|
AU2003241695A1 AU2003241695A1 (en) | 2003-12-19 |
AU2003241695A8 true AU2003241695A8 (en) | 2003-12-19 |
Family
ID=29706568
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
AU2003241695A Abandoned AU2003241695A1 (en) | 2002-06-03 | 2003-05-30 | Method of measuring electric characteristics of flat substrate using terahertz light |
Country Status (3)
Country | Link |
---|---|
JP (1) | JP2004003902A (en) |
AU (1) | AU2003241695A1 (en) |
WO (1) | WO2003102557A1 (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005069840A (en) | 2003-08-22 | 2005-03-17 | Japan Science & Technology Agency | Optical path difference compensation mechanism for obtaining time sequential signal of time sequence conversion pulse spectrum measuring device |
JP5371293B2 (en) * | 2007-08-31 | 2013-12-18 | キヤノン株式会社 | Apparatus and method for obtaining information about terahertz waves |
EP2031374B1 (en) * | 2007-08-31 | 2012-10-10 | Canon Kabushiki Kaisha | Apparatus and method for obtaining information related to terahertz waves |
JP5063325B2 (en) * | 2007-12-14 | 2012-10-31 | 独立行政法人理化学研究所 | Carrier concentration measuring apparatus and carrier concentration measuring method |
JP5717335B2 (en) * | 2009-01-23 | 2015-05-13 | キヤノン株式会社 | Analysis equipment |
JP6524125B2 (en) * | 2017-02-13 | 2019-06-05 | シャープ株式会社 | Spectrum analyzer and spectrum analysis method |
KR102506803B1 (en) * | 2018-11-23 | 2023-03-07 | 삼성전자주식회사 | Method of testing an interconnection substrate and apparatus for performing the same |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IL122273A (en) * | 1997-11-21 | 2001-07-24 | Sela Semiconductor Eng Laboratories | Remote resistivity measurement |
JP4476462B2 (en) * | 2000-03-27 | 2010-06-09 | 株式会社栃木ニコン | Semiconductor electrical property evaluation system |
-
2002
- 2002-06-03 JP JP2002161085A patent/JP2004003902A/en active Pending
-
2003
- 2003-05-30 AU AU2003241695A patent/AU2003241695A1/en not_active Abandoned
- 2003-05-30 WO PCT/JP2003/006887 patent/WO2003102557A1/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
AU2003241695A1 (en) | 2003-12-19 |
WO2003102557A1 (en) | 2003-12-11 |
JP2004003902A (en) | 2004-01-08 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK6 | Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase | ||
TH | Corrigenda |
Free format text: IN VOL 18, NO 6, PAGE(S) 1484 UNDER THE HEADING APPLICATIONS OPI - NAME INDEX UNDER THE NAME NIKON CORPORATION, APPLICATION NO. 2003241695, UNDER INID (71) CORRECT THE NAME TO READ NIKON CORPORATION; TOCHIGI NIKON CORPORATION |