AU2003233869A1 - Method of etching optic elements - Google Patents

Method of etching optic elements

Info

Publication number
AU2003233869A1
AU2003233869A1 AU2003233869A AU2003233869A AU2003233869A1 AU 2003233869 A1 AU2003233869 A1 AU 2003233869A1 AU 2003233869 A AU2003233869 A AU 2003233869A AU 2003233869 A AU2003233869 A AU 2003233869A AU 2003233869 A1 AU2003233869 A1 AU 2003233869A1
Authority
AU
Australia
Prior art keywords
etching
optic elements
optic
elements
etching optic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003233869A
Other versions
AU2003233869A8 (en
Inventor
Sureshchandra M. Ojha
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lumentum Technology UK Ltd
Original Assignee
Bookham Technology PLC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Bookham Technology PLC filed Critical Bookham Technology PLC
Publication of AU2003233869A1 publication Critical patent/AU2003233869A1/en
Publication of AU2003233869A8 publication Critical patent/AU2003233869A8/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B6/13—Integrated optical circuits characterised by the manufacturing method
    • G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12169—Annealing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
    • G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
    • G02B2006/12166—Manufacturing methods
    • G02B2006/12173—Masking

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Integrated Circuits (AREA)
  • Drying Of Semiconductors (AREA)
AU2003233869A 2002-05-02 2003-04-30 Method of etching optic elements Abandoned AU2003233869A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB0210117A GB0210117D0 (en) 2002-05-02 2002-05-02 Method of teaching optic elements
GB0210117.8 2002-05-02
PCT/GB2003/001870 WO2003093886A2 (en) 2002-05-02 2003-04-30 Method of etching optic elements

Publications (2)

Publication Number Publication Date
AU2003233869A1 true AU2003233869A1 (en) 2003-11-17
AU2003233869A8 AU2003233869A8 (en) 2003-11-17

Family

ID=9935988

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003233869A Abandoned AU2003233869A1 (en) 2002-05-02 2003-04-30 Method of etching optic elements

Country Status (3)

Country Link
AU (1) AU2003233869A1 (en)
GB (1) GB0210117D0 (en)
WO (1) WO2003093886A2 (en)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6387750A (en) * 1986-09-30 1988-04-19 Nec Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
WO2003093886A2 (en) 2003-11-13
WO2003093886A3 (en) 2004-02-26
GB0210117D0 (en) 2002-06-12
AU2003233869A8 (en) 2003-11-17

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase