AU2003218990A1 - Method for producing the rotor of a drag vacuum pump and a rotor produced according to this method - Google Patents

Method for producing the rotor of a drag vacuum pump and a rotor produced according to this method

Info

Publication number
AU2003218990A1
AU2003218990A1 AU2003218990A AU2003218990A AU2003218990A1 AU 2003218990 A1 AU2003218990 A1 AU 2003218990A1 AU 2003218990 A AU2003218990 A AU 2003218990A AU 2003218990 A AU2003218990 A AU 2003218990A AU 2003218990 A1 AU2003218990 A1 AU 2003218990A1
Authority
AU
Australia
Prior art keywords
rotor
producing
vacuum pump
produced according
drag vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003218990A
Inventor
Christian Beyer
Heinz Englander
Peter Klingner
Martin Laerbusch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH filed Critical Leybold Vakuum GmbH
Publication of AU2003218990A1 publication Critical patent/AU2003218990A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F04D29/324—Blades

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
AU2003218990A 2002-03-08 2003-02-18 Method for producing the rotor of a drag vacuum pump and a rotor produced according to this method Abandoned AU2003218990A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10210404.2 2002-03-08
DE10210404A DE10210404A1 (en) 2002-03-08 2002-03-08 Method for manufacturing the rotor of a friction vacuum pump and rotor manufactured using this method
PCT/EP2003/001602 WO2003076809A1 (en) 2002-03-08 2003-02-18 Method for producing the rotor of a drag vacuum pump and a rotor produced according to this method

Publications (1)

Publication Number Publication Date
AU2003218990A1 true AU2003218990A1 (en) 2003-09-22

Family

ID=27762820

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003218990A Abandoned AU2003218990A1 (en) 2002-03-08 2003-02-18 Method for producing the rotor of a drag vacuum pump and a rotor produced according to this method

Country Status (7)

Country Link
US (1) US20050220606A1 (en)
EP (1) EP1483507A1 (en)
JP (1) JP2005519236A (en)
AU (1) AU2003218990A1 (en)
DE (1) DE10210404A1 (en)
TW (1) TW200303803A (en)
WO (1) WO2003076809A1 (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10053664A1 (en) * 2000-10-28 2002-05-08 Leybold Vakuum Gmbh Mechanical kinetic vacuum pump
US20100199495A1 (en) * 2006-04-29 2010-08-12 Oerlikon Leybold Vacuum Gmbh Process for preparing rotors or stators of a turbomolecular pump
GB2498816A (en) 2012-01-27 2013-07-31 Edwards Ltd Vacuum pump
DE102013207269A1 (en) * 2013-04-22 2014-10-23 Pfeiffer Vacuum Gmbh Stator element for a Holweckpumpstufe, vacuum pump with a Holweckpumpstufe and method for producing a stator element for a Holweckpumpstufe
DE102013219050B3 (en) * 2013-09-23 2015-01-22 Oerlikon Leybold Vacuum Gmbh High-performance rotors of a turbomolecular pump
DE102013219043A1 (en) 2013-09-23 2015-03-26 Oerlikon Leybold Vacuum Gmbh Alloys of rotors of a turbomolecular pump
EP3093496B1 (en) * 2015-05-15 2019-03-06 Pfeiffer Vacuum Gmbh Rotor of a vacuum pump
CN106401991A (en) * 2016-08-31 2017-02-15 四川九天真空科技股份有限公司 Molecular pump rotor and manufacturing method thereof
EP3670924B1 (en) * 2019-11-19 2021-11-17 Pfeiffer Vacuum Gmbh Vacuum pump and method for producing same
JP2021173257A (en) * 2020-04-28 2021-11-01 株式会社島津製作所 Turbomolecular pump and stator of turbomolecular pump
JP7396209B2 (en) * 2020-06-03 2023-12-12 株式会社島津製作所 Turbomolecular pumps, rotors and stators of turbomolecular pumps
JP2021191950A (en) * 2020-06-05 2021-12-16 エドワーズ株式会社 Vacuum pump and rotating body of vacuum pump

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
SU1152308A1 (en) * 1983-09-23 1990-05-15 A D Anishin Method of manufacturing blade disc of turbomolecular pump
JPS63173895A (en) * 1987-01-12 1988-07-18 Mitsubishi Electric Corp Manufacture of rotor for turbo molecular pump
JPH01195992A (en) * 1988-01-30 1989-08-07 Naoto Ibarada Moving blade of turbo molecular pump
GB2226603B (en) * 1988-02-26 1992-07-29 Nikolai Mikhailovich Novikov Turbomolecular vacuum pump
DE19627921A1 (en) * 1996-07-11 1998-01-15 Leybold Vakuum Gmbh High speed rotor balancing method
IT1293907B1 (en) * 1997-05-28 1999-03-11 Varian Spa MILLING PROCEDURE OF TURBOMOLECULAR PUMPS ROTORS WITH RESIN EMBOSSING OF THE PARTS TO BE MILLED.
DE19846188A1 (en) * 1998-10-07 2000-04-13 Leybold Vakuum Gmbh Friction vacuum pump with stator and rotor
DE19924616C2 (en) * 1999-05-28 2001-04-19 Bornemann J H Gmbh Process for the production of rotors
DE10102341A1 (en) * 2001-01-19 2002-08-08 Ralf Steffens Profile contour of a screw pump

Also Published As

Publication number Publication date
JP2005519236A (en) 2005-06-30
WO2003076809A1 (en) 2003-09-18
TW200303803A (en) 2003-09-16
EP1483507A1 (en) 2004-12-08
DE10210404A1 (en) 2003-09-18
US20050220606A1 (en) 2005-10-06

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase