AU2002356819A1 - Direct bonding of articles containing silicon - Google Patents

Direct bonding of articles containing silicon

Info

Publication number
AU2002356819A1
AU2002356819A1 AU2002356819A AU2002356819A AU2002356819A1 AU 2002356819 A1 AU2002356819 A1 AU 2002356819A1 AU 2002356819 A AU2002356819 A AU 2002356819A AU 2002356819 A AU2002356819 A AU 2002356819A AU 2002356819 A1 AU2002356819 A1 AU 2002356819A1
Authority
AU
Australia
Prior art keywords
containing silicon
direct bonding
articles containing
articles
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002356819A
Inventor
Robert Sabia
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Corning Inc
Original Assignee
Corning Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Corning Inc filed Critical Corning Inc
Publication of AU2002356819A1 publication Critical patent/AU2002356819A1/en
Abandoned legal-status Critical Current

Links

AU2002356819A 2001-10-26 2002-10-17 Direct bonding of articles containing silicon Abandoned AU2002356819A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/035,564 2001-10-26
US10/255,926 2002-09-25

Publications (1)

Publication Number Publication Date
AU2002356819A1 true AU2002356819A1 (en) 2003-05-12

Family

ID=

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