AU2002354573A1 - Thin wafer carrier - Google Patents

Thin wafer carrier

Info

Publication number
AU2002354573A1
AU2002354573A1 AU2002354573A AU2002354573A AU2002354573A1 AU 2002354573 A1 AU2002354573 A1 AU 2002354573A1 AU 2002354573 A AU2002354573 A AU 2002354573A AU 2002354573 A AU2002354573 A AU 2002354573A AU 2002354573 A1 AU2002354573 A1 AU 2002354573A1
Authority
AU
Australia
Prior art keywords
wafer carrier
thin wafer
thin
carrier
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002354573A
Inventor
Anthony Simpson
Brian Wiseman
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Entegris Inc
Original Assignee
Entegris Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Entegris Inc filed Critical Entegris Inc
Publication of AU2002354573A1 publication Critical patent/AU2002354573A1/en
Abandoned legal-status Critical Current

Links

AU2002354573A 2001-07-12 2002-07-12 Thin wafer carrier Abandoned AU2002354573A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US60/304,960 2001-07-12
US10/194,981 2002-07-11

Publications (1)

Publication Number Publication Date
AU2002354573A1 true AU2002354573A1 (en) 2003-01-29

Family

ID=

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