AU2002345365A1 - Electrode member for plasma treating apparatus, plasma treating apparatus and plasma treating method - Google Patents

Electrode member for plasma treating apparatus, plasma treating apparatus and plasma treating method

Info

Publication number
AU2002345365A1
AU2002345365A1 AU2002345365A AU2002345365A AU2002345365A1 AU 2002345365 A1 AU2002345365 A1 AU 2002345365A1 AU 2002345365 A AU2002345365 A AU 2002345365A AU 2002345365 A AU2002345365 A AU 2002345365A AU 2002345365 A1 AU2002345365 A1 AU 2002345365A1
Authority
AU
Australia
Prior art keywords
plasma treating
treating apparatus
electrode member
plasma
treating method
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002345365A
Inventor
Kiyoshi Arita
Hiroshi Haji
Tetsuhiro Iwai
Taiji Matano
Shoji Sakemi
Nobuhiro Satou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Krosaki Harima Corp
Panasonic Holdings Corp
Original Assignee
Krosaki Harima Corp
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Krosaki Harima Corp, Matsushita Electric Industrial Co Ltd filed Critical Krosaki Harima Corp
Publication of AU2002345365A1 publication Critical patent/AU2002345365A1/en
Abandoned legal-status Critical Current

Links

AU2002345365A 2001-06-25 2002-06-24 Electrode member for plasma treating apparatus, plasma treating apparatus and plasma treating method Abandoned AU2002345365A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001-190891 2001-06-25

Publications (1)

Publication Number Publication Date
AU2002345365A1 true AU2002345365A1 (en) 2003-01-08

Family

ID=

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