AU2002338546A1 - Capacitive differential pressure sensor - Google Patents

Capacitive differential pressure sensor

Info

Publication number
AU2002338546A1
AU2002338546A1 AU2002338546A AU2002338546A AU2002338546A1 AU 2002338546 A1 AU2002338546 A1 AU 2002338546A1 AU 2002338546 A AU2002338546 A AU 2002338546A AU 2002338546 A AU2002338546 A AU 2002338546A AU 2002338546 A1 AU2002338546 A1 AU 2002338546A1
Authority
AU
Australia
Prior art keywords
pressure sensor
differential pressure
capacitive differential
capacitive
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002338546A
Inventor
Ulfert Drewes
Frank Hegner
Andreas Rossberg
Elke Schmidt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Endress and Hauser SE and Co KG
Original Assignee
Endress and Hauser SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Endress and Hauser SE and Co KG filed Critical Endress and Hauser SE and Co KG
Publication of AU2002338546A1 publication Critical patent/AU2002338546A1/en
Abandoned legal-status Critical Current

Links

AU2002338546A 2001-04-05 2002-04-04 Capacitive differential pressure sensor Abandoned AU2002338546A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE10117142.0 2001-04-05

Publications (1)

Publication Number Publication Date
AU2002338546A1 true AU2002338546A1 (en) 2002-11-11

Family

ID=

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