AU2003218788A1 - Pressure sensor, especially for the capacitive determination of absolute pressure - Google Patents

Pressure sensor, especially for the capacitive determination of absolute pressure

Info

Publication number
AU2003218788A1
AU2003218788A1 AU2003218788A AU2003218788A AU2003218788A1 AU 2003218788 A1 AU2003218788 A1 AU 2003218788A1 AU 2003218788 A AU2003218788 A AU 2003218788A AU 2003218788 A AU2003218788 A AU 2003218788A AU 2003218788 A1 AU2003218788 A1 AU 2003218788A1
Authority
AU
Australia
Prior art keywords
pressure
pressure sensor
capacitive determination
absolute pressure
absolute
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2003218788A
Inventor
Roland Singpiel
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nord Micro AG and Co OHG
Original Assignee
Nord Micro AG and Co OHG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nord Micro AG and Co OHG filed Critical Nord Micro AG and Co OHG
Publication of AU2003218788A1 publication Critical patent/AU2003218788A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0042—Constructional details associated with semiconductive diaphragm sensors, e.g. etching, or constructional details of non-semiconductive diaphragms
    • G01L9/0048—Details about the mounting of the diaphragm to its support or about the diaphragm edges, e.g. notches, round shapes for stress relief

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
AU2003218788A 2002-03-22 2003-03-18 Pressure sensor, especially for the capacitive determination of absolute pressure Abandoned AU2003218788A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE2002112947 DE10212947C1 (en) 2002-03-22 2002-03-22 Pressure sensor determining absolute pressure capacitatively comprises main body, membrane, spacer and holder forming measurement cell assembly
DE10212947.9 2002-03-22
PCT/EP2003/002829 WO2003081194A1 (en) 2002-03-22 2003-03-18 Pressure sensor, especially for the capacitive determination of absolute pressure

Publications (1)

Publication Number Publication Date
AU2003218788A1 true AU2003218788A1 (en) 2003-10-08

Family

ID=27762977

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2003218788A Abandoned AU2003218788A1 (en) 2002-03-22 2003-03-18 Pressure sensor, especially for the capacitive determination of absolute pressure

Country Status (3)

Country Link
AU (1) AU2003218788A1 (en)
DE (1) DE10212947C1 (en)
WO (1) WO2003081194A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1946060A1 (en) 2005-08-23 2008-07-23 Continental Teves AG & Co. oHG Pressure sensor for hydraulic media in motor vehicle braking systems and use thereof
US8240331B2 (en) 2008-10-16 2012-08-14 Honeywell International Inc. Negative pressure relief valve assembly
DE102011051441B4 (en) * 2011-06-29 2018-10-25 CiS Forschungsinstitut für Mikrosensorik und Photovoltaik GmbH Pressure-conversion-based sensor for determining a measured variable in a medium

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3910646A1 (en) * 1989-04-01 1990-10-04 Endress Hauser Gmbh Co CAPACITIVE PRESSURE SENSOR AND METHOD FOR THE PRODUCTION THEREOF
US5202681A (en) * 1990-03-21 1993-04-13 Wilbur L. Dublin, Jr. Integral transducer housing and method
DE4023420A1 (en) * 1990-07-24 1992-01-30 Pfister Gmbh PRESSURE SENSOR
DE4031791A1 (en) * 1990-10-08 1992-04-09 Leybold Ag CAPACITY GAUGE SENSOR
DE4142101A1 (en) * 1991-11-28 1993-06-03 Lueder Ernst Prof Dr Ing PRESSURE MEASUREMENT ARRAY WITH HIGH LINEARITY
US5499158A (en) * 1994-11-14 1996-03-12 Texas Instruments Incorporated Pressure transducer apparatus with monolithic body of ceramic material
DE19633630A1 (en) * 1996-08-21 1998-02-26 Endress Hauser Gmbh Co Evaluation unit of a differential pressure sensor
US5974893A (en) * 1997-07-24 1999-11-02 Texas Instruments Incorporated Combined pressure responsive transducer and temperature sensor apparatus
EP1070239B1 (en) * 1997-12-23 2002-04-24 Unaxis Balzers Aktiengesellschaft Capacitive vacuum measuring cell
DE19848246A1 (en) * 1998-10-20 2000-04-27 Krauss Maffei Kunststofftech Thermoplastic component, especially for motor vehicles or electrical equipment housings, has a groove with undercuts holding an elastomer seal
EP1039284A1 (en) * 1999-03-24 2000-09-27 ENVEC Mess- und Regeltechnik GmbH + Co. Capacitive sensor of pressure or differential pressure
DE50015477D1 (en) * 2000-02-15 2009-01-22 Endress & Hauser Gmbh & Co Kg pressure sensor

Also Published As

Publication number Publication date
DE10212947C1 (en) 2003-09-18
WO2003081194A1 (en) 2003-10-02

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase