EP1946060A1 - Pressure sensor for hydraulic media in motor vehicle braking systems and use thereof - Google Patents

Pressure sensor for hydraulic media in motor vehicle braking systems and use thereof

Info

Publication number
EP1946060A1
EP1946060A1 EP06778327A EP06778327A EP1946060A1 EP 1946060 A1 EP1946060 A1 EP 1946060A1 EP 06778327 A EP06778327 A EP 06778327A EP 06778327 A EP06778327 A EP 06778327A EP 1946060 A1 EP1946060 A1 EP 1946060A1
Authority
EP
European Patent Office
Prior art keywords
membrane
sensor according
sensor
pressure
pressure sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP06778327A
Other languages
German (de)
French (fr)
Inventor
Roland Burghardt
Carsten Zahout-Heil
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Continental Teves AG and Co OHG
Original Assignee
Continental Teves AG and Co OHG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Continental Teves AG and Co OHG filed Critical Continental Teves AG and Co OHG
Publication of EP1946060A1 publication Critical patent/EP1946060A1/en
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0055—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements bonded on a diaphragm
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
    • G01L19/08—Means for indicating or recording, e.g. for remote indication
    • G01L19/086—Means for indicating or recording, e.g. for remote indication for remote indication
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0072—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance
    • G01L9/0075—Transmitting or indicating the displacement of flexible diaphragms using variations in capacitance using a ceramic diaphragm, e.g. alumina, fused quartz, glass

Definitions

  • the invention relates to a pressure sensor according to the preamble of claim 1 and its use.
  • DE 199 63 786 A1 discloses a pressure sensor which is basically suitable for use in an electronically controlled brake system for determining the pressure of a hydraulic fluid.
  • the sensor consists essentially of a semiconductor layer, which is applied to a Borsili ⁇ katglas. If the sensor is pressurized, a mechanical stress arises in the material between the layers, which can be measured on the basis of the piezoelectric effect by suitably mounted electrical electrodes. Due to the materials used is known from the above reference pressure sensor for ag ⁇ sive media without an additional protective measure, such as an embedded in silicon, can be used.
  • the invention relates to a pressure sensor, in particular for measuring pressures greater than 100 bar, with a through Pressurizing deflectable and / or deformable membrane.
  • a closed (first) hollow volume which is filled in particular at least partially ⁇ with a gas or a gas mixture.
  • the membrane is essentially flat (without any pressure difference) and rests on a support frame for the membrane, which tightly seals off the edge region of the membrane from a base body on which the support frame rests.
  • the support frame may be manufactured separately or brought on ⁇ or be part of a molding of the main body or the membrane surface.
  • the pressure sensor has at least one pressure transducer, which converts the deflection and / or deformation of the membrane into at least one electrical variable according to the capacitive, piezoresistive or another principle or with the aid of at least one strain gauge.
  • the pressure sensor is tightly gekap ⁇ sible on all sides and has no guided outward electrical contacts or lines.
  • the all-round sealed enclosure provides the advantage that a long life of the sensor is achieved even under harsh, humid ambient conditions.
  • the sensor is suitable for use in liquids, particularly preferably in aggressive media.
  • At least one electrically conductive measuring electrode is located in the region of the membrane surface, so that it is moved by the preformable membrane surface.
  • a counter electrode is present, which is attached to the main body and forms a capacitor together with the measuring electrode.
  • the membrane surface has a substantially non-deformed part, which is for example in the vicinity of the Ran ⁇ , on which is provided with a reference electrode, which allows a capacitive reference measurement in conjunction with the or another counter electrode.
  • a reference electrode which allows a capacitive reference measurement in conjunction with the or another counter electrode.
  • the base body and / or the support frame is preferably at least partially made of a corrosion-resistant material, in particular based on plastic or metal or ceramic.
  • the membrane is preferably made of either metal, plastic or a ceramic material. The materials mentioned may also contain small amounts of components of other materials, as long as the desired corrosion resistance is not significantly affected thereby.
  • the membrane consists of a ceramic material whose pressure-dependent deflection is determined to be particularly capacitive.
  • the membrane is also possible and therefore provided as an alternative preferred embodiment to equip the pressure sensor according to the invention with pressure-resistively changeable electrical conductor structures and in this way to provide a variable by the pressurization electrical signal available. It is expedient that the membrane is a pressure measuring plate.
  • the membrane surface is part of the housing.
  • the advantage is a very high resistance to aggressive media measurement, such as a high pressure fluid.
  • Possible materials for deformation body are then also ceramic, metal, glass but also plastic.
  • the degree of pressurization is not capacitive, but measured with resistively pressure-dependent measuring structures, which are connected to the electronic unit.
  • the sensor ⁇ form with a resistive measurement structure is preferably used of the resistive structure of the piezoresistive effect or dehnungsinduzier- te change of shape.
  • the deformation element is preferably formed monolithically from silicon. The actual measuring elements are then implanted in particular in the pressure measuring plate. Upon initiation of a pressure, a mechanical stress is generated in the membrane and / or the pressure measuring plate.
  • the resistive structures can be produced as a thin film or thick film. However, the resistive structures are preferably applied as thick-film material. It is expedient that the sensor in the housing for processing a signal ⁇ for processing the at least one electrical ⁇ rule output variable having the pressure transducer.
  • the senor for processing the capacitor voltage or in the case of the resistive conductor has a signal processing electrically connected to the corresponding structures.
  • This signal processing is designed in particular as a user-specific integrated circuit.
  • the sensor preferably further comprises means coupled to said signal processing ⁇ or integrated in this Sendeein ⁇ direction for wireless transmission of print information.
  • the sensor uses a particular tegrated in the sensor in ⁇ additional antenna structure and / or a formant ⁇ nentechnik, which is in particular an electrode of the condensate ⁇ sator structure. This has the advantage that compared to be ⁇ known pressure sensors no corrosion-sensitive electrical contacts are needed to the outside.
  • the senor is designed for a, in particular periodic ⁇ cal, measurement and / or data transmission at defined time ⁇ points.
  • expedient is the design of the sensor for a constant measurement and / or REMtra ⁇ tion.
  • the wireless signal transmission is well known.
  • the sensor has an internal source, which makes Ener ⁇ (battery) and systems in which the sensor is fed through an external electromagnetic field and this energy for periodically transmitting uses its values. All systems have in common that you need an antenna to carry over ⁇ and usually have a signal pre-processing and a high-frequency part.
  • the signal processing is preferably carried out integrated.
  • the sensor is expediently cylindrical, wherein the cylinder height is particularly suitably smaller than the cylinder diameter.
  • the basic body together with bearing surface and membrane forms a first cavity and additionally with a cover arranged opposite the membrane side and also opposite to the membrane introduced into the base recess a further cavity, wherein integrated in the further cavity signal processing is.
  • an antenna structure is preferably arranged, which is placed in particular on the inner surface of the cover.
  • the invention also relates to the use of the previously described sensor in motor vehicle control devices, in particular in motor vehicle brake control devices. Further preferred is the use of the sensor in directly measuring tire pressure monitoring systems. Further preferred embodiments will become apparent from the following description of an embodiment with reference to figures.
  • FIG. 1 is a schematic representation of a capacitive pressure sensor with a cavity in cross-section
  • FIG. 3 shows the pressure sensor according to FIGS. 1 and 2 in a spatial representation
  • Fig. 4 shows a second example of a pressure sensor with two cavities
  • Fig. 5 is an illustration of the sensor according to Fig. 1 with signal processing circuit and antenna structure.
  • the capacitive pressure sensor in FIG. 1 consists of a deformable ceramic membrane 1 which rests on a base body 3 made of ceramic via a solder ring 2.
  • a first metallic capacitor plate 4 (measuring electrode) is fixedly connected to the membrane.
  • a metallic second metallic Kon ⁇ capacitor plate 5 (counter electrode).
  • Electrode 4 is a further, electrically isolated from the measuring electrode reference electrode 8.
  • counter electrode 5 is designed so large that it is both measuring electrode 4 and reference electrode 7 opposite.
  • Lotring 2 forms an annular support frame for membrane 1 on the base 3.
  • the second capacitor plate 5 is directly connected to ASIC 7.
  • ASIC 7 a user-specific integrated circuit is included, which is electrically conductively connected to the capacitor plates 4, 5 and reference electrode 8. It is also possible according to an example not shown that counter electrode is combined with ASIC 7. is formed directly by the ASIC that also carries the pri ⁇ mare signal processing. Via a leadframe, the processed signals are routed to the outside. The housing is closed by a glued lid, for example. Metal or ceramic.
  • Fig. 2 shows the pressure sensor in Fig. 1 with a deformed by pressurization membrane 1 '.
  • the pressure-induced deflection of the membrane reduces the distance between the capacitor plates 4 and 5. This results in an electrically measurable increase in the capacitance of the capacitor formed by the capacitor plates 4, 5.
  • Fig. 3 the capacitive pressure sensor according to Figures 1 and 2 is shown in three-dimensional view.
  • FIG. 4 illustrates an example of a sensor having an antenna structure 9 and an additional cavity 8.
  • the antenna structure described in FIG. 4 may also be provided in the sensor according to FIGS. 1 to 3 according to an example which is not shown.
  • Antenna structure 4 is formed spirally. This can be applied by Dunnfilm- (CVD, sputtering) or thick film process in the desired shape.
  • the antenna structure can be applied by means of lithographic processes with a subsequent etching process.
  • HF components can be applied to membrane 1.
  • FIG. 4 shows a sensor with a further cavity 8, which is formed on the opposite side of the base body 3 as a recess. Cavity 8 is closed by a lower cover 10. ASIC 7 can be arranged in the lower cavity 8. Antenna structure 9 is placed in cavity 8 on cover 10. A connection of ASIC 7 with antenna structure 9 or the electrodes 4, 5 and 8 takes place either via bonding wires or other suitable connection technologies.
  • the components antenna structure 9, ASIC 7 with integrated RF transmitter are integrated together in the housing of the pressure sensor. This results in an all-round encapsulation of the sensor.
  • the sensor according to FIG. 5 differs from the previously explained sensors in that the capacitor plates are replaced by resistive layers 11.
  • the arrangement of ASIC 7 in cavity 6 corresponds to beispielgeclaren, not shown embodiment of a sensor according to FIG. 1 with ASIC.
  • Resistive layers 11 are applied to membrane 1 by means of thin-film or thick-film technologies. It is likewise possible to adhere suitable silicon elements known per se to membrane 1 for deformation measurement.
  • ⁇ hollow space 6 and 8 may alternatively be filled with oil or with some other material.
  • the senor has a pressure measuring plate instead of the membrane.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Measuring Fluid Pressure (AREA)

Abstract

The invention relates to a pressure sensor, particularly for measuring pressures greater than 100 bar, comprising a membrane (1, 1') that can be deflected and/or deformed under the effect of pressure, a closed hollow volume (6) disposed below the membrane and particularly at least partially filled with a gas or a gas mixture, a supporting frame (2) for the membrane, which tightly closes the edge region of the membrane against a base (3), and at least one pressure measurement transducer that transforms the deflection and/or deformation of the membrane by means of at least one strain gauge strip or by using the capacitive, piezoresistive or another principle into at least one electrical variable. According to the invention, the pressure sensor is sealingly encapsulated on all sides and has no outwardly oriented electrical contacts or lines.

Description

Drucksensor für hydraulische Medien in Kraftfahrzeugbrems- Systemen und dessen VerwendungPressure sensor for hydraulic media in automotive brake systems and its use
Die Erfindung betrifft einen Drucksensor gemäß Oberbegriff von Anspruch 1 sowie dessen Verwendung.The invention relates to a pressure sensor according to the preamble of claim 1 and its use.
Aus der DE 199 63 786 Al geht ein Drucksensor hervor, welcher grundsätzlich für die Anwendung in einem elektronisch geregelten Bremssystem zur Bestimmung des Drucks einer Hydraulikflüssigkeit geeignet ist. Der Sensor besteht im wesentlichen aus einer Halbleiterschicht, die auf ein Borsili¬ katglas aufgebracht ist. Wird der Sensor mit Druck beaufschlagt, entsteht zwischen den Schichten eine mechanische Spannung im Material, welche auf Grund des piezoelektrischen Effekts durch geeignet angebrachte elektrische Elektroden gemessen werden kann. Auf Grund der verwendeten Materialien ist der aus der obigen Schrift bekannte Drucksensor für ag¬ gressive Medien nicht ohne eine zusätzliche Schutzmaßnahme, wie zum Beispiel eine Einbettung in Silikon, einsetzbar.DE 199 63 786 A1 discloses a pressure sensor which is basically suitable for use in an electronically controlled brake system for determining the pressure of a hydraulic fluid. The sensor consists essentially of a semiconductor layer, which is applied to a Borsili ¬ katglas. If the sensor is pressurized, a mechanical stress arises in the material between the layers, which can be measured on the basis of the piezoelectric effect by suitably mounted electrical electrodes. Due to the materials used is known from the above reference pressure sensor for ag ¬ sive media without an additional protective measure, such as an embedded in silicon, can be used.
Es besteht daher die Aufgabe, einen für die oben genannte Anwendung besonders geeigneten Drucksensor zur Verfügung zu stellen, welcher sich durch eine besonders hohe Resistenz gegenüber aggressiven Medien auszeichnet.It is therefore an object to provide a particularly suitable for the above-mentioned application pressure sensor, which is characterized by a particularly high resistance to aggressive media.
Diese Aufgabe wird erfindungsgemäß gelöst durch einen Druck¬ sensor gemäß Anspruch 1, der insbesondere ohne eine Einbet¬ tung in ein Schutzmaterial auskommt.This object is achieved by a pressure ¬ sensor according to claim 1, which manages in particular without a Einbet ¬ tion in a protective material.
Die Erfindung betrifft einen Drucksensor, insbesondere zur Messung von Drücken größer als 100 bar, mit einer durch Druckbeaufschlagung auslenkbaren und/oder verformbaren Membran. Unterhalb der Membran befindet sich ein abgeschlossenes (erstes) Hohlvolumen, welches insbesondere zumindest teil¬ weise mit einem Gas oder einer Gasmischung gefüllt ist. Die Membran ist im Wesentlichen (ohne anstehender Druckdifferenz) eben und liegt auf einem Auflagerahmen für die Membran auf, welcher den Randbereich der Membran gegenüber einem Grundkörper dicht abschließt, auf dem der Auflagerahmen aufliegt. Der Auflagerahmen kann gesondert gefertigt oder auf¬ gebracht sein oder Teil einer Ausformung des Grundkörpers oder der Membranfläche sein. Der Drucksensor weist zumindest einem Druckmesswandler, welcher die Auslenkung und/oder Verformung der Membran nach dem kapazitiven, piezoresistiven oder einem anderen Prinzip oder mit Hilfe mindestens eines Dehnungsmessstreifens in mindestens eine elektrische Größe umwandelt, auf. Der Drucksensor ist allseitig dicht gekap¬ selt und weist keine nach außen geführten elektrischen Kontakte oder Leitungen auf.The invention relates to a pressure sensor, in particular for measuring pressures greater than 100 bar, with a through Pressurizing deflectable and / or deformable membrane. Below the membrane is a closed (first) hollow volume, which is filled in particular at least partially ¬ with a gas or a gas mixture. The membrane is essentially flat (without any pressure difference) and rests on a support frame for the membrane, which tightly seals off the edge region of the membrane from a base body on which the support frame rests. The support frame may be manufactured separately or brought on ¬ or be part of a molding of the main body or the membrane surface. The pressure sensor has at least one pressure transducer, which converts the deflection and / or deformation of the membrane into at least one electrical variable according to the capacitive, piezoresistive or another principle or with the aid of at least one strain gauge. The pressure sensor is tightly gekap ¬ sible on all sides and has no guided outward electrical contacts or lines.
Durch die allseitig dichte Kapselung ergibt sich der Vorteil, dass auch unter rauen, feuchten Umgebungsbedingungen eine lange Lebensdauer des Sensors erreicht wird. Insbesondere ist der Sensor für eine Verwendung in Flüssigkeiten, besonders bevorzugt in aggressiven Medien geeignet.The all-round sealed enclosure provides the advantage that a long life of the sensor is achieved even under harsh, humid ambient conditions. In particular, the sensor is suitable for use in liquids, particularly preferably in aggressive media.
Im Falle der Ausbildung des Sensors mit einer Kondensatorstruktur befindet sich zumindest eine elektrisch leitende Messelektrode im Bereich der Membranfläche, so dass diese von der vorformbaren Membranfläche bewegt wird. Zudem ist eine Gegenelektrode vorhanden, welche am Grundkörper befestigt ist und gemeinsam mit der Messelektrode einen Kondensator bildet. Durch die Druckbeaufschlagung des Sensors ändert sich die Auslenkung der Membran und damit der Abstand der Kondensatorplatten. Die damit einhergehende Kapazitätsänderung kann als ein Maß für den Druck herangezogen werden.In the case of forming the sensor with a capacitor structure, at least one electrically conductive measuring electrode is located in the region of the membrane surface, so that it is moved by the preformable membrane surface. In addition, a counter electrode is present, which is attached to the main body and forms a capacitor together with the measuring electrode. By the pressure of the sensor changes the deflection of the membrane and thus the distance of the capacitor plates. The associated capacity change can be used as a measure of pressure.
Vorzugsweise weist die Membranfläche einen im wesentlichen nicht verformten Teil, der zum Beispiel in der Nähe des Ran¬ des liegt, auf, welcher mit einer Referenzelektrode versehen ist, die in Verbindung mit der oder einer weiteren Gegenelektrode eine kapazitive Referenzmessung erlaubt. Durch Einbeziehung der Referenzmessung kann die Genauigkeit der Druckmessung erhöht werden beziehungsweise eine Kompensation von Störgrößen erreicht werden.Preferably, the membrane surface has a substantially non-deformed part, which is for example in the vicinity of the Ran ¬ , on which is provided with a reference electrode, which allows a capacitive reference measurement in conjunction with the or another counter electrode. By including the reference measurement, the accuracy of the pressure measurement can be increased or a compensation of disturbance variables can be achieved.
Der Grundkörper und/oder der Auflagerahmen besteht bevorzugt zumindest teilweise aus einem korrosionsbeständigen Material, insbesondere auf Basis von Kunststoff oder Metall oder Keramik. Die Membran ist vorzugsweise entweder aus Metall, aus Kunststoff oder aus einem keramischen Material hergestellt. Die genannten Materialien können außerdem in geringen Mengen Bestandteile anderer Materialien aufweisen, so lange die angestrebte Korrosionsbeständigkeit dadurch nicht wesentlich beeinträchtigt wird.The base body and / or the support frame is preferably at least partially made of a corrosion-resistant material, in particular based on plastic or metal or ceramic. The membrane is preferably made of either metal, plastic or a ceramic material. The materials mentioned may also contain small amounts of components of other materials, as long as the desired corrosion resistance is not significantly affected thereby.
Die Membran besteht insbesondere aus einem keramischen Material, dessen druckabhängige Auslenkung besonders bevorzugt kapazitiv ermittelt wird. Es ist aber auch möglich und daher als eine alternative bevorzugte Ausführungsform vorgesehen, den erfindungsgemäßen Drucksensor mit durch Druck resistiv veränderbaren elektrischen Leiterstrukturen auszurüsten und auf diese Weise ein durch die Druckbeaufschlagung veränderbares elektrisches Signal zur Verfügung zu stellen. Es ist zweckmäßig, dass die Membran eine Druckmessplatte ist .In particular, the membrane consists of a ceramic material whose pressure-dependent deflection is determined to be particularly capacitive. However, it is also possible and therefore provided as an alternative preferred embodiment to equip the pressure sensor according to the invention with pressure-resistively changeable electrical conductor structures and in this way to provide a variable by the pressurization electrical signal available. It is expedient that the membrane is a pressure measuring plate.
Vorzugsweise ist die Membranfläche Teil des Gehäuses.Preferably, the membrane surface is part of the housing.
Wenn der erfindungsgemäße Sensor insbesondere im Wesentlichen vollständig auf Basis von Keramik hergestellt ist, er¬ gibt sich der Vorteil einer besonders hohen Resistenz gegenüber aggressiven Messmedien, wie zum Beispiel einer unter hohem Druck stehenden Bremsflüssigkeit. Mögliche Materialien für Verformungskörper sind dann ebenfalls Keramik, Metall, Glas aber auch Kunststoff.When the sensor according to the invention is in particular essentially made entirely on the basis of ceramics, it ¬, the advantage is a very high resistance to aggressive media measurement, such as a high pressure fluid. Possible materials for deformation body are then also ceramic, metal, glass but also plastic.
Nach einer alternativ bevorzugten Ausführungsform wird das Maß der Druckbeaufschlagung nicht kapazitiv, sondern mit re- sistiv druckabhängigen Messstrukturen gemessen, welche mit der Elektronikeinheit verbunden sind. Bei der Ausführungs¬ form des Sensors mit einer resistiven Messstruktur wird bevorzugt der piezoresistive Effekt oder die dehnungsinduzier- te Gestaltsänderung der resistiven Struktur genutzt. Bei dem Sensor nach dem piezoresistiven Prinzip ist der Verformungskörper bevorzugt monolithisch aus Silizium gebildet. Die eigentlichen Messelemente sind dann insbesondere in die Druckmessplatte implantiert. Bei Einleitung eines Druckes wird eine mechanische Spannung in der Membran und/oder der Druckmessplatte erzeugt.According to an alternatively preferred embodiment, the degree of pressurization is not capacitive, but measured with resistively pressure-dependent measuring structures, which are connected to the electronic unit. In the execution of the sensor ¬ form with a resistive measurement structure is preferably used of the resistive structure of the piezoresistive effect or dehnungsinduzier- te change of shape. In the case of the sensor according to the piezoresistive principle, the deformation element is preferably formed monolithically from silicon. The actual measuring elements are then implanted in particular in the pressure measuring plate. Upon initiation of a pressure, a mechanical stress is generated in the membrane and / or the pressure measuring plate.
Die resistiven Strukturen lassen sich als Dünnfilm oder Dickschicht herstellen. Die resistiven Strukturen sind jedoch bevorzugt als Dickschichtmaterial aufgebracht. Es ist zweckmäßig, dass der Sensor im Gehäuse eine Signal¬ verarbeitung zur Verarbeitung der mindestens einen elektri¬ schen Ausgangsgroße des Druckmesswandlers aufweist.The resistive structures can be produced as a thin film or thick film. However, the resistive structures are preferably applied as thick-film material. It is expedient that the sensor in the housing for processing a signal ¬ for processing the at least one electrical ¬ rule output variable having the pressure transducer.
Bevorzugt weist der Sensor zur Verarbeitung der Kondensatorspannung oder im Falle der resistiven Leiter eine mit den entsprechenden Strukturen elektrisch verbundene Signalverarbeitung auf. Diese Signalverarbeitung ist insbesondere als anwenderspezifischer integrierter Schaltkreis aufgebaut.Preferably, the sensor for processing the capacitor voltage or in the case of the resistive conductor has a signal processing electrically connected to the corresponding structures. This signal processing is designed in particular as a user-specific integrated circuit.
Der Sensor umfasst weiterhin bevorzugt eine mit der Signal¬ verarbeitung verbundene oder in dieser integrierte Sendeein¬ richtung zur drahtlosen Übertragung einer Druckinformation. Hierzu nutzt der Sensor insbesondere eine in den Sensor in¬ tegrierte zusatzliche Antennenstruktur und/oder eine Anten¬ nenstruktur, welche insbesondere eine Elektrode der Konden¬ satorstruktur ist. Dies hat den Vorteil, dass gegenüber be¬ kannten Drucksensoren keine korrosionsempfindlichen elektrischen Kontakte nach außen benotigt werden.The sensor preferably further comprises means coupled to said signal processing ¬ or integrated in this Sendeein ¬ direction for wireless transmission of print information. For this purpose, the sensor uses a particular tegrated in the sensor in ¬ additional antenna structure and / or a formant ¬ nenstruktur, which is in particular an electrode of the condensate ¬ sator structure. This has the advantage that compared to be ¬ known pressure sensors no corrosion-sensitive electrical contacts are needed to the outside.
Vorzugsweise ist der Sensor für eine, insbesondere periodi¬ sche, Messung und/oder Datenübertragung zu definierten Zeit¬ punkten ausgelegt. Alternativ zweckmäßig ist die Auslegung des Sensors für eine standige Messung und/oder Datenübertra¬ gung.Preferably, the sensor is designed for a, in particular periodic ¬ cal, measurement and / or data transmission at defined time ¬ points. Alternatively expedient is the design of the sensor for a constant measurement and / or Datenübertra ¬ tion.
Die drahtlose Signalubertragung ist hinreichend bekannt. Es existieren Systeme bei denen der Sensor eine interne Ener¬ giequelle besitzt (Batterie) und Systeme, bei denen sich der Sensor durch ein externes elektromagnetisches Feld speist und diese Energie zum periodischen Übertragen seiner Werte nutzt . Allen Systemen ist gemein, dass Sie eine Antenne zum Über¬ tragen benotigen und in der Regel eine Signalvorverarbeitung sowie einen Hochfrequenzteil besitzen.The wireless signal transmission is well known. There are systems in which the sensor has an internal source, which makes Ener ¬ (battery) and systems in which the sensor is fed through an external electromagnetic field and this energy for periodically transmitting uses its values. All systems have in common that you need an antenna to carry over ¬ and usually have a signal pre-processing and a high-frequency part.
Wie gesagt, ist die Signalverarbeitung bevorzugt integriert ausgeführt .As mentioned, the signal processing is preferably carried out integrated.
Der Sensor ist zweckmaßigerweise zylinderförmig ausgebildet ist, wobei besonders zweckmäßig die Zylinderhohe kleiner als der Zylinderdurchmesser ist.The sensor is expediently cylindrical, wherein the cylinder height is particularly suitably smaller than the cylinder diameter.
Gemäß einer weiteren bevorzugten Ausfuhrungsform des Sensors bildet der Grundkorper zusammen mit Auflageflache und Membran einen ersten Hohlraum und zusatzlich mit einer gegenüber der Membranseite angeordneten Abdeckung und einer ebenfalls gegenüberliegend zur Membran in den Grundkorper eingebrachten Ausnehmung einen weiteren Hohlraum, wobei in dem weiteren Hohlraum die Signalverarbeitung integriert ist.According to a further preferred embodiment of the sensor, the basic body together with bearing surface and membrane forms a first cavity and additionally with a cover arranged opposite the membrane side and also opposite to the membrane introduced into the base recess a further cavity, wherein integrated in the further cavity signal processing is.
Im weiteren Hohlraum des Sensors nach der weiteren bevorzugten Ausfuhrungsform ist vorzugsweise eine Antennenstruktur angeordnet, welche insbesondere an der inneren Oberflache der Abdeckung platziert ist.In another cavity of the sensor according to the further preferred embodiment, an antenna structure is preferably arranged, which is placed in particular on the inner surface of the cover.
Die Erfindung betrifft außerdem die Verwendung des zuvor beschriebenen Sensors in Kraftfahrzeugsteuergeraten, insbesondere in Kraftfahrzeugbremsensteuergeraten . Weiterhin bevorzugt ist die Verwendung des Sensors in direkt messenden Reifendruckkontrollsystemen . Weitere bevorzugte Ausführungsformen ergeben sich aus der nachfolgenden Beschreibung eines Ausführungsbeispiels an Hand von Figuren.The invention also relates to the use of the previously described sensor in motor vehicle control devices, in particular in motor vehicle brake control devices. Further preferred is the use of the sensor in directly measuring tire pressure monitoring systems. Further preferred embodiments will become apparent from the following description of an embodiment with reference to figures.
Es zeigenShow it
Fig. 1 eine schematische Darstellung eines kapazitiven Drucksensor mit einem Hohlraum im Querschnitt,1 is a schematic representation of a capacitive pressure sensor with a cavity in cross-section,
Fig. 2 der Drucksensor nach Fig. 1 bei Beaufschlagung mit Druck,2, the pressure sensor of FIG. 1 upon application of pressure,
Fig. 3 der Drucksensor gemäß Fig. 1 und 2 in räumlicher Darstellung,3 shows the pressure sensor according to FIGS. 1 and 2 in a spatial representation,
Fig. 4 ein zweites Beispiel für einen Drucksensor mit zwei Hohlräumen undFig. 4 shows a second example of a pressure sensor with two cavities and
Fig. 5 eine Darstellung des Sensors entsprechend Fig. 1 mit Signalverarbeitungsschaltung und Antennenstruktur .Fig. 5 is an illustration of the sensor according to Fig. 1 with signal processing circuit and antenna structure.
Der kapazitive Drucksensor in Fig. 1 besteht aus einer verformbaren Keramikmembran 1, die über einen Lotring 2 auf einem Grundkörper 3 aus Keramik aufsitzt. In einem mittleren, nach innen zum Hohlraum 6 gerichteten Oberflächenbereich der Membran 1 ist eine erste metallische Kondensatorplatte 4 (Messelektrode) mit der Membran fest verbunden. Ebenfalls zum Hohlraum 6 hin gerichtet befindet sich auf einer Fläche des Grundkörpers 3 eine metallische zweite metallische Kon¬ densatorplatte 5 (Gegenelektrode) . Im Außenbereich der nach innen gerichteten Membranfläche, also benachbart zu Mess- elektrode 4 befindet sich ein weitere, von der Messelektrode elektrisch isolierte Referenzelektrode 8. Gegenelektrode 5 ist so groß ausgeführt, dass diese sowohl Messelektrode 4 als auch Referenzelektrode 7 gegenüber liegt. Lotring 2 bildet einen ringförmigen Auflagerahmen für Membran 1 auf Grundkorper 3. Die zweite Kondensatorplatte 5 ist mit ASIC 7 direkt verbunden. In ASIC 7 ist ein anwenderspezifischer integrierter Schaltkreis enthalten, welcher elektrisch leitend mit den Kondensatorplatten 4, 5 und Referenzelektrode 8 verbunden ist. Es ist auch nach einem nicht dargestellten Beispiel möglich, dass Gegenelektrode mit ASIC 7 vereint ist. wird direkt durch den ASIC gebildet, der auch die pri¬ märe Signalverarbeitung tragt. Über einen Leadframe werden die aufbereiteten Signale nach außen geleitet. Das Gehäuse ist verschlossen durch einen geklebten Deckel, bspw. aus Metall oder ebenfalls Keramik.The capacitive pressure sensor in FIG. 1 consists of a deformable ceramic membrane 1 which rests on a base body 3 made of ceramic via a solder ring 2. In a middle, inwardly directed to the cavity 6 surface region of the membrane 1, a first metallic capacitor plate 4 (measuring electrode) is fixedly connected to the membrane. Also directed to the cavity 6 is located on a surface of the base body 3, a metallic second metallic Kon ¬ capacitor plate 5 (counter electrode). In the outer area of the inward-facing membrane surface, ie adjacent to measurement Electrode 4 is a further, electrically isolated from the measuring electrode reference electrode 8. counter electrode 5 is designed so large that it is both measuring electrode 4 and reference electrode 7 opposite. Lotring 2 forms an annular support frame for membrane 1 on the base 3. The second capacitor plate 5 is directly connected to ASIC 7. In ASIC 7, a user-specific integrated circuit is included, which is electrically conductively connected to the capacitor plates 4, 5 and reference electrode 8. It is also possible according to an example not shown that counter electrode is combined with ASIC 7. is formed directly by the ASIC that also carries the pri ¬ mare signal processing. Via a leadframe, the processed signals are routed to the outside. The housing is closed by a glued lid, for example. Metal or ceramic.
Fig. 2 zeigt den Drucksensor in Fig. 1 mit einer durch Druckbeaufschlagung verformten Membran 1 ' . Durch die druckinduzierte Auslenkung der Membran verringert sich der Abstand der Kondensatorplatten 4 und 5. Hierdurch ergibt sich eine elektrisch messbare Erhöhung der Kapazität des durch die Kondensatorplatten 4, 5 gebildeten Kondensators.Fig. 2 shows the pressure sensor in Fig. 1 with a deformed by pressurization membrane 1 '. The pressure-induced deflection of the membrane reduces the distance between the capacitor plates 4 and 5. This results in an electrically measurable increase in the capacitance of the capacitor formed by the capacitor plates 4, 5.
In Fig. 3 ist der kapazitive Drucksensor gemäß den Figuren 1 und 2 in dreidimensionaler Ansicht dargestellt.In Fig. 3, the capacitive pressure sensor according to Figures 1 and 2 is shown in three-dimensional view.
Fig. 4 stellt ein Beispiel für einen Sensor mit einer Antennenstruktur 9 und einem zusatzlichen Hohlraum 8 dar. Die in Fig. 4 beschriebene Antennenstruktur kann nach einem nicht dargestellten Beispiel auch in dem Sensor nach den Fig. 1 bis 3 vorgesehen werden. Antennenstruktur 9 benachbart zu Messelektrode 4 auf der In¬ nenseite von Membran 1 angebracht. Antennenstruktur 4 ist spiralförmig ausgebildet. Diese kann mittels Dunnfilm- (CVD, Sputtern) oder Dickschichtverfahren in der gewünschten Form aufgebracht werden. Ebenso kann ein Aufbringen der Antennenstruktur mittels lithografischer Verfahren mit anschließendem Atzprozess erfolgen. Eine elektrische Verbindung von An¬ tennenstruktur 4 mit ASIC 7 erfolgt über geeignete, nicht dargestellte Verbindungsstellen des Deckels. Dabei kommt so¬ wohl Kleben als auch Loten in Frage.4 illustrates an example of a sensor having an antenna structure 9 and an additional cavity 8. The antenna structure described in FIG. 4 may also be provided in the sensor according to FIGS. 1 to 3 according to an example which is not shown. Antenna structure 9 adjacent to measuring electrode 4 on the In ¬ nenseite of membrane 1 attached. Antenna structure 4 is formed spirally. This can be applied by Dunnfilm- (CVD, sputtering) or thick film process in the desired shape. Likewise, the antenna structure can be applied by means of lithographic processes with a subsequent etching process. An electrical connection of An ¬ tennenstruktur 4 with ASIC 7 via suitable, not shown connection points of the lid. In this case, both sticking and soldering come into question.
Zusatzlich zu Antennenstruktur 4 können an Membran 1 auch zusatzliche oberflachenmontierbare Bauteile - wie HF- Komponenten - aufgebracht werden.In addition to antenna structure 4, additional surface-mountable components, such as HF components, can be applied to membrane 1.
Das Ausfuhrungsbeispiel in Fig. 4 zeigt einen Sensor mit einem weiteren Hohlraum 8, welcher auf der gegenüberliegenden Seite von Grundkorper 3 als Ausnehmung ausgebildet ist. Hohlraum 8 ist durch einen untere Abdeckung 10 verschlossen. ASIC 7 kann im unteren Hohlraum 8 angeordnet werden. Antennenstruktur 9 ist in Hohlraum 8 an Abdeckung 10 platziert. Eine Verbindung von ASIC 7 mit Antennenstruktur 9 oder den Elektroden 4, 5 und 8 erfolgt entweder über Bonddrahte oder andere geeignete Verbindungstechnologien.The exemplary embodiment in Fig. 4 shows a sensor with a further cavity 8, which is formed on the opposite side of the base body 3 as a recess. Cavity 8 is closed by a lower cover 10. ASIC 7 can be arranged in the lower cavity 8. Antenna structure 9 is placed in cavity 8 on cover 10. A connection of ASIC 7 with antenna structure 9 or the electrodes 4, 5 and 8 takes place either via bonding wires or other suitable connection technologies.
Im Sensor gemäß Fig. 4 sind die Komponenten Antennenstruktur 9, ASIC 7 mit integriertem HF-Sender gemeinsam in das Gehäuse des Drucksensors integriert. Hierdurch ergibt sich eine allseitige Kapselung des Sensors. Der Sensor gemäß Fig. 5 unterscheidet sich von den zuvor erläuterten Sensoren dadurch, dass die Kondensatorplatten durch resistive Schichten 11 ersetzt sind. Die Anordnung von ASIC 7 in Hohlraum 6 entspricht der beispielgemaßen, nicht dargestellten Ausfuhrungsform eines Sensors gemäß Fig. 1 mit ASIC. Resistive Schichten 11 sind mittels Dunnschicht- oder Dickschichttechnologien auf Membran 1 aufgebracht. Es ist ebenfalls möglich, zur Verformungsmessung geeignete, an sich bekannte Siliziumelemente auf Membran 1 aufzukleben. Hohl¬ räume 6 und 8 können mit Ol oder alternativ mit einem anderen Material gefüllt sein.In the sensor according to FIG. 4, the components antenna structure 9, ASIC 7 with integrated RF transmitter are integrated together in the housing of the pressure sensor. This results in an all-round encapsulation of the sensor. The sensor according to FIG. 5 differs from the previously explained sensors in that the capacitor plates are replaced by resistive layers 11. The arrangement of ASIC 7 in cavity 6 corresponds to beispielgemaßen, not shown embodiment of a sensor according to FIG. 1 with ASIC. Resistive layers 11 are applied to membrane 1 by means of thin-film or thick-film technologies. It is likewise possible to adhere suitable silicon elements known per se to membrane 1 for deformation measurement. ¬ hollow space 6 and 8 may alternatively be filled with oil or with some other material.
In einem nicht dargestellten Ausfuhrungsbeispiel weist der Sensor eine Druckmessplatte anstatt der Membran auf. In an exemplary embodiment, not shown, the sensor has a pressure measuring plate instead of the membrane.

Claims

Patentansprüche claims
1. Drucksensor, insbesondere zur Messung von Drücken größer als 100 bar, mit einer durch Druckbeaufschlagung auslenkbaren und/oder verformbaren Membran (1, 1'), einem unter der Membran liegenden abgeschlossenen Hohlvolumen1. pressure sensor, in particular for the measurement of pressures greater than 100 bar, with a deflectable by pressurization and / or deformable membrane (1, 1 '), lying below the membrane closed hollow volume
(6), welches insbesondere zumindest teilweise mit einem Gas oder einer Gasmischung gefüllt ist, einem Auflagerahmen (2) für die Membran, welcher den Randbereich der Membran gegenüber einem Grundkörper (3) dicht abschließt, und mit zumindest einem Druckmesswandler, welcher die Auslenkung und/oder Verformung der Membran nach dem kapazitiven, piezoresistiven oder einem anderen Prinzip oder mit Hilfe mindestens eines Dehnungsmessstreifens in mindestens eine elektrische Größe umwandelt, dadurch gekennzeichnet, dass der Drucksensor allseitig dicht gekapselt ist und keine nach außen geführten elektrischen Kontakte oder Leitungen aufweist.(6), which is in particular at least partially filled with a gas or a gas mixture, a support frame (2) for the membrane, which closes the edge region of the membrane against a base body (3), and with at least one pressure transducer, which the deflection and / or deformation of the membrane according to the capacitive, piezoresistive or another principle or with the aid of at least one strain gauge converts into at least one electrical variable, characterized in that the pressure sensor is tightly encapsulated on all sides and has no outwardly guided electrical contacts or lines.
2. Sensor nach Anspruch 1, dadurch gekennzeichnet, dass dessen Druckmesswandler nach dem kapazitiven Prinzip arbeitet und wobei der Sensor zumindest eine elektrisch leitende Messelektrode (4), die von der vorformbaren Membranfläche bewegt wird, und zumindest eine Gegenelektrode (5), welche am Grundkörper befestigt ist und gemeinsam mit der Messelektrode einen Kondensator bildet, aufweist.2. Sensor according to claim 1, characterized in that the pressure transducer operates on the capacitive principle and wherein the sensor at least one electrically conductive measuring electrode (4) which is moved by the preformable membrane surface, and at least one counter electrode (5), which on the base body is fixed and together with the measuring electrode forms a capacitor has.
3. Sensor nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Membranfläche einen im wesentlichen nicht verformten Teil aufweist, welcher mit einer Referenzelekt- rode (8) versehen ist, die in Verbindung mit der oder einer weiteren Gegenelektrode eine kapazitive Referenzmessung erlaubt.3. Sensor according to claim 1 or 2, characterized in that the membrane surface has a substantially non-deformed part, which with a Referenzelectekt Rode (8) is provided, which allows a capacitive reference measurement in conjunction with the or another counter electrode.
4. Sensor nach mindestens einem der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass der Grundkorper und/oder der Auflagerahmen zumindest teilweise aus einem korrosionsbeständigen Material, insbesondere auf Basis von Kunststoff oder Metall oder Keramik besteht und die Membran entweder aus Metall, aus Kunststoff oder aus einem keramischen Material besteht.4. Sensor according to at least one of claims 1 to 3, characterized in that the basic body and / or the support frame at least partially made of a corrosion-resistant material, in particular based on plastic or metal or ceramic and the membrane made of either metal, plastic or consists of a ceramic material.
5. Sensor nach mindestens einem der Ansprüche 1 bis 4, dadurch gekennzeichnet, dass dieser im Gehäuse eine Sig¬ nalverarbeitung (7) zur Verarbeitung der mindestens einen elektrischen Ausgangsgroße des Druckmesswandlers aufweist .5. Sensor according to at least one of claims 1 to 4, characterized in that this has a Sig ¬ nalverarbeitung (7) in the housing for processing the at least one electrical output variable of the pressure transducer.
6. Sensor nach Anspruch 5, dadurch gekennzeichnet, dass dieser eine mit der Signalverarbeitung verbundene oder in dieser integrierte Sendeeinrichtung zur drahtlosen Übertragung einer Druckinformation umfasst.6. Sensor according to claim 5, characterized in that it comprises a connected to the signal processing or integrated in this transmission device for the wireless transmission of pressure information.
7. Sensor nach Anspruch 6, dadurch gekennzeichnet, dass dieser eine in den Sensor integrierte zusatzliche Antennenstruktur (9, 9') umfasst und/oder eine Antennenstruktur, welche insbesondere eine Elektrode der Kondensatorstruktur nutzt.7. Sensor according to claim 6, characterized in that it comprises an integrated into the sensor additional antenna structure (9, 9 ') and / or an antenna structure, which uses in particular an electrode of the capacitor structure.
8. Sensor nach mindestens einem der Ansprüche 1 bis 7, dadurch gekennzeichnet, dass die Membranflache Teil des Gehäuses ist. 8. Sensor according to at least one of claims 1 to 7, characterized in that the membrane surface is part of the housing.
9. Sensor nach mindestens einem der Ansprüche 1 bis 8, dadurch gekennzeichnet, dass dieser zylinderförmig ausgebildet ist, wobei insbesondere die Zylinderhöhe kleiner als der Zylinderdurchmesser ist.9. Sensor according to at least one of claims 1 to 8, characterized in that it is cylindrical, in particular, the cylinder height is smaller than the cylinder diameter.
10. Sensor nach mindestens einem der Ansprüche 1 bis 9, dadurch gekennzeichnet, dass die Signalverarbeitung integriert ausgeführt ist.10. Sensor according to at least one of claims 1 to 9, characterized in that the signal processing is carried out integrated.
11. Sensor nach mindestens einem der Ansprüche 1 bis 10, dadurch gekennzeichnet, dass der Grundkörper (3) zusammen mit Auflagefläche (2) und Membran (1, 1') einen ersten Hohlraum (6) bildet und der Grundkörper mit einer gegenüber der Membranseite angeordneten Abdeckung (10) und einer ebenfalls gegenüberliegend zur Membran in den Grundkörper eingebrachten Ausnehmung einen weiteren Hohlraum (8) bildet, wobei in dem weiteren Hohlraum die Signalverarbeitung (7) integriert ist.11. Sensor according to at least one of claims 1 to 10, characterized in that the base body (3) together with bearing surface (2) and membrane (1, 1 ') forms a first cavity (6) and the base body with respect to the membrane side arranged cover (10) and also introduced opposite to the membrane in the base recess a further cavity (8), wherein in the further cavity, the signal processing (7) is integrated.
12. Sensor nach Anspruch 11, dadurch gekennzeichnet, dass im weitern Hohlraum eine Antennenstruktur (9') angeordnet ist, welche insbesondere an der inneren Oberfläche der Abdeckung platziert ist.12. Sensor according to claim 11, characterized in that in the wider cavity an antenna structure (9 ') is arranged, which is placed in particular on the inner surface of the cover.
13. Verwendung des Sensors gemäß mindestens einem der Ansprüche 1 bis 12 in Kraftfahrzeugsteuergeräten, insbesondere in Kraftfahrzeugbremsensteuergeräten. 13. Use of the sensor according to any one of claims 1 to 12 in motor vehicle control units, in particular in motor vehicle brake control units.
EP06778327A 2005-08-23 2006-08-23 Pressure sensor for hydraulic media in motor vehicle braking systems and use thereof Withdrawn EP1946060A1 (en)

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PCT/EP2006/065602 WO2007023168A1 (en) 2005-08-23 2006-08-23 Pressure sensor for hydraulic media in motor vehicle braking systems and use thereof
DE102006039422A DE102006039422A1 (en) 2005-08-23 2006-08-23 Pressure sensor for hydraulic media in motor vehicle braking systems is sealed tight on all sides and has no outwardly fed electrical contacts or lines

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