AU2002338441A1 - Transport box for optical masks - Google Patents

Transport box for optical masks

Info

Publication number
AU2002338441A1
AU2002338441A1 AU2002338441A AU2002338441A AU2002338441A1 AU 2002338441 A1 AU2002338441 A1 AU 2002338441A1 AU 2002338441 A AU2002338441 A AU 2002338441A AU 2002338441 A AU2002338441 A AU 2002338441A AU 2002338441 A1 AU2002338441 A1 AU 2002338441A1
Authority
AU
Australia
Prior art keywords
transport box
optical masks
masks
optical
transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2002338441A
Inventor
Daniel Declercq
Felix Jager
Eva Kruger-Velthusen
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ACR Automation in Cleanroom GmbH
Original Assignee
ACR Automation in Cleanroom GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ACR Automation in Cleanroom GmbH filed Critical ACR Automation in Cleanroom GmbH
Publication of AU2002338441A1 publication Critical patent/AU2002338441A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67359—Closed carriers specially adapted for containing masks, reticles or pellicles
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67383—Closed carriers characterised by substrate supports
AU2002338441A 2001-04-21 2002-04-18 Transport box for optical masks Abandoned AU2002338441A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE20106909U DE20106909U1 (en) 2001-04-21 2001-04-21 Transport box for optical masks
DE20106909.1 2001-04-21
PCT/EP2002/004305 WO2002086949A2 (en) 2001-04-21 2002-04-18 Transport box for optical masks

Publications (1)

Publication Number Publication Date
AU2002338441A1 true AU2002338441A1 (en) 2002-11-05

Family

ID=7956039

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2002338441A Abandoned AU2002338441A1 (en) 2001-04-21 2002-04-18 Transport box for optical masks

Country Status (3)

Country Link
AU (1) AU2002338441A1 (en)
DE (1) DE20106909U1 (en)
WO (1) WO2002086949A2 (en)

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4687097A (en) * 1984-12-11 1987-08-18 Empak, Inc. Wafer processing cassette
IT1181778B (en) * 1985-05-07 1987-09-30 Dynamit Nobel Silicon Spa CONTAINER FOR THE STORAGE AND TRANSPORT OF SILICON DISKS (SLICES)
US4697704A (en) * 1986-06-30 1987-10-06 Royal Master Systems, Inc. Storage container for floppy discs
US4696395A (en) * 1986-11-14 1987-09-29 Northrop Corporation Substrate container
US4718548A (en) * 1986-12-19 1988-01-12 Advanced Micro Devices, Inc. Protective housing for a leadless chip carrier or plastic leaded chip carrier package
US4798305A (en) * 1987-11-16 1989-01-17 National Semiconductor Corporation Adjustable shipping tray
US5025924A (en) * 1988-11-16 1991-06-25 Toppan Printing Co., Ltd. Container
US5727685A (en) * 1995-10-19 1998-03-17 Svg Lithography Systems, Inc. Reticle container with corner holding
JPH10163310A (en) * 1996-11-28 1998-06-19 Komatsu Electron Metals Co Ltd Wafer holding structure of semiconductor wafer packaging container
US5921397A (en) * 1996-12-10 1999-07-13 Empak, Inc. Disk cassette
JPH10310145A (en) * 1997-05-13 1998-11-24 Zeon Kasei Co Ltd Container for thin plate
JP3556480B2 (en) * 1998-08-17 2004-08-18 信越ポリマー株式会社 Precision substrate storage container

Also Published As

Publication number Publication date
DE20106909U1 (en) 2002-08-29
WO2002086949A3 (en) 2003-02-27
WO2002086949A2 (en) 2002-10-31

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Legal Events

Date Code Title Description
MK6 Application lapsed section 142(2)(f)/reg. 8.3(3) - pct applic. not entering national phase