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WO2002086949A3 - Transport box for optical masks - Google Patents

Transport box for optical masks Download PDF

Info

Publication number
WO2002086949A3
WO2002086949A3 PCT/EP2002/004305 EP0204305W WO02086949A3 WO 2002086949 A3 WO2002086949 A3 WO 2002086949A3 EP 0204305 W EP0204305 W EP 0204305W WO 02086949 A3 WO02086949 A3 WO 02086949A3
Authority
WO
WIPO (PCT)
Prior art keywords
masks
provided
transport box
mask
box
Prior art date
Application number
PCT/EP2002/004305
Other languages
German (de)
French (fr)
Other versions
WO2002086949A2 (en
Inventor
Eva Krueger-Velthusen
Daniel Declercq
Felix Jaeger
Original Assignee
Acr Automation In Cleanroom
Schott Glas
Zeiss Stiftung
Eva Krueger-Velthusen
Daniel Declercq
Felix Jaeger
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to DE20106909U priority Critical patent/DE20106909U1/en
Priority to DE20106909.1 priority
Application filed by Acr Automation In Cleanroom, Schott Glas, Zeiss Stiftung, Eva Krueger-Velthusen, Daniel Declercq, Felix Jaeger filed Critical Acr Automation In Cleanroom
Publication of WO2002086949A2 publication Critical patent/WO2002086949A2/en
Publication of WO2002086949A3 publication Critical patent/WO2002086949A3/en

Links

Classifications

    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67359Closed carriers specially adapted for containing masks, reticles or pellicles
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67373Closed carriers characterised by locking systems
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735Closed carriers
    • H01L21/67383Closed carriers characterised by substrate supports

Abstract

The invention relates to a transport box (10) for optical masks (11) used during the production of semiconductor substrates. Said box is provided with a closable housing composed of an upper part (13) and a lower part (12), between which the masks (11) are held in a parallel manner. A receiving element (21) comprising compartments (26) and supporting a longitudinal edge (57) of the mask (11) is provided in the lower part (12), and a holding device (30) is provided in the upper part (13). The aim of the invention is to enable the masks to be positioned in one such transport box in a vibrationless manner. To this end, the holding device (30) is formed from two angled ridges (31, 32) which are parallel to the corner regions of the masks (11); one side (37) of each angled ridge (31, 32) comprises successively arranged holding-down tongues (38), a longitudinal edge region of the mask being received in the grooves (43) of the same; and the other side (33) of each angled ridge (31, 32) comprises successively arranged lateral guiding elements.
PCT/EP2002/004305 2001-04-21 2002-04-18 Transport box for optical masks WO2002086949A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE20106909U DE20106909U1 (en) 2001-04-21 2001-04-21 Transport box for optical masks
DE20106909.1 2001-04-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
AU2002338441A AU2002338441A1 (en) 2001-04-21 2002-04-18 Transport box for optical masks

Publications (2)

Publication Number Publication Date
WO2002086949A2 WO2002086949A2 (en) 2002-10-31
WO2002086949A3 true WO2002086949A3 (en) 2003-02-27

Family

ID=7956039

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2002/004305 WO2002086949A2 (en) 2001-04-21 2002-04-18 Transport box for optical masks

Country Status (3)

Country Link
AU (1) AU2002338441A1 (en)
DE (1) DE20106909U1 (en)
WO (1) WO2002086949A2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4718549A (en) * 1985-03-08 1988-01-12 Dynamit Nobel Silicon S.P.A. Container for the storage and shipment of silicon disks or wafers
US5025924A (en) * 1988-11-16 1991-06-25 Toppan Printing Co., Ltd. Container
EP0769807A2 (en) * 1995-10-19 1997-04-23 Svg Lithography Systems, Inc. Reticle container with corner holding
US5904251A (en) * 1997-05-13 1999-05-18 Zeon Kasei Co. , Ltd. Container for flat panel

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4687097A (en) * 1984-12-11 1987-08-18 Empak, Inc. Wafer processing cassette
US4697704A (en) * 1986-06-30 1987-10-06 Royal Master Systems, Inc. Storage container for floppy discs
US4696395A (en) * 1986-11-14 1987-09-29 Northrop Corporation Substrate container
US4718548A (en) * 1986-12-19 1988-01-12 Advanced Micro Devices, Inc. Protective housing for a leadless chip carrier or plastic leaded chip carrier package
US4798305A (en) * 1987-11-16 1989-01-17 National Semiconductor Corporation Adjustable shipping tray
JPH10163310A (en) * 1996-11-28 1998-06-19 Komatsu Electron Metals Co Ltd Wafer holding structure of semiconductor wafer packaging container
US5921397A (en) * 1996-12-10 1999-07-13 Empak, Inc. Disk cassette
JP3556480B2 (en) * 1998-08-17 2004-08-18 信越ポリマー株式会社 Precision substrate storage container

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4718549A (en) * 1985-03-08 1988-01-12 Dynamit Nobel Silicon S.P.A. Container for the storage and shipment of silicon disks or wafers
US5025924A (en) * 1988-11-16 1991-06-25 Toppan Printing Co., Ltd. Container
EP0769807A2 (en) * 1995-10-19 1997-04-23 Svg Lithography Systems, Inc. Reticle container with corner holding
US5904251A (en) * 1997-05-13 1999-05-18 Zeon Kasei Co. , Ltd. Container for flat panel

Also Published As

Publication number Publication date
WO2002086949A2 (en) 2002-10-31
DE20106909U1 (en) 2002-08-29
AU2002338441A1 (en) 2002-11-05

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